Exposure apparatus

• US 7,215,410 B2
• Filed: 03/28/2005
• Issued: 05/08/2007
• Est. Priority Date: 03/29/2004
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Sumiyoshi, Yuhei
• Primary Examiner(s): NGUYEN, HUNG
• Application Number:
  US11/093,097
• Publication Number:
  US 20050213066A1
• Time in Patent Office: 771 Days
• Field of Search: 355/30, 355/52, 355/53, 355/55, 250/201.2, 250/548, 359/820
• US Class Current: 355/55
• CPC Class Codes: G03F 7/70233 Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
• CPC Class Codes: G03F 7/70341 Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply chemical composition of immersion liquids G03F7/2041
• CPC Class Codes: G03F 7/70983 Optical system protection, e.g. pellicles or removable covers for protection of mask

Abstract

An exposure apparatus includes a illumination optical system for illuminating a reticle with light from a light source, and a projection optical system for projecting a pattern of the reticle onto an object, said projection optical system includes a lens closest to the object, wherein a surface on the object side of the lens is smaller than an effective area of a surface on the reticle side of the lens, and wherein said exposure apparatus exposes the object via a liquid that is filled in a space between the lens and the object.

Claims

1. An exposure apparatus comprising:

an illumination optical system for illuminating a reticle with light from a light source; and

a projection optical system for projecting a pattern of the reticle onto an object to be exposed, said projection optical system including a lens closest to the object, and a lens barrel for holding the lens,

wherein said exposure apparatus exposes the object via a liquid that is filled in a space between the lens and the object, and

wherein the lens includes;

a convex surface on a reticle side;

a first plane that contacts the liquid and is formed in the middle of the lens at an object side; and

a second plane that is held by a retainer of the lens barrel, formed at the edge of the lens at the object side, and parallel to the first plane,

the first plane being closer to the object than the second plane, and smaller than an effective area of the convex surface.

2. An exposure apparatus according to claim 1, wherein the first plane has an area ¼

or less of the effective area.

3. An exposure apparatus according to claim 1, wherein an outer diameter of the first plane is smaller than an effective diameter of the convex surface.

4. An exposure apparatus according to claim 3, wherein said outer diameter of the first plane is ½

or less of the effective diameter of the convex surface.

5. An exposure apparatus according to claim 1, wherein said lens includes a protective layer for preventing a contact between the lens and the liquid.

6. An exposure apparatus according to claim 1, wherein the first plane has a circular shape.

7. An exposure apparatus according to claim 1, wherein the first plane has a rectangular shape.

8. A device fabrication method comprising the steps of:

exposing an object using an exposure apparatus; and

performing a development process for the object exposed,

wherein said exposure apparatus includes, a projection optical system for projecting a pattern of the reticle onto an object to be exposed, said projection optical system including a lens closest to the object, and a lens barrel for holding the lens,

wherein said exposure apparatus exposes the object via a liquid that is filled in a space between the lens and the object, and

wherein the lens includes;

a convex surface on a reticle side;

a first plane that contacts the liquid and is formed in the middle of the lens at an object side; and

a second plane that is held by a retainer of the lens barrel, formed at the edge of the lens at the object side, and parallel to the first plane,

the first plane being closer to the object than the second plane, and smaller than an effective area of the convex surface.