Method and system for a mass flow controller with reduced pressure sensitivity

  • US 7,216,019 B2
  • Filed: 07/08/2004
  • Issued: 05/08/2007
  • Est. Priority Date: 07/08/2004
  • Status: Expired due to Fees
First Claim
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1. A flow controller with reduced sensitivity to pressure, comprising:

  • an inlet;

    an outlet;

    a flow path coupled to the inlet and the outlet;

    a flow sensor coupled to the flow path;

    a control valve downstream of the flow sensor and upstream of the outlet; and

    a control system operable to;

    generate a first signal corresponding to a time rate of change of pressure sensed by a pressure sensor coupled to the flow path;

    receive a second signal corresponding to a setpoint for the flow controller;

    receive a third signal corresponding to a measured flow determined by the flow sensor;

    generate an error term by combining each of the first signal, the second signal and the third signal; and

    adjust the flow controller based on the error term,wherein a volume of the flow path downstream of the flow sensor and upstream of the control valve is optimized.

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