Method and system for a mass flow controller with reduced pressure sensitivity

• US 7,216,019 B2
• Filed: 07/08/2004
• Issued: 05/08/2007
• Est. Priority Date: 07/08/2004
• Status: Expired due to Fees

• Current Assignee: Brooks Instrument LLC (Illinois Tool Works Inc.)
• Original Assignee: Celerity Incorporated (ICHOR Holdings, Ltd.)
• Inventors: Tariq, Faisal, Tinsley, Kenneth E.
• Primary Examiner(s): KOSOWSKI, ALEXANDER J
• Application Number:
  US10/886,836
• Publication Number:
  US 20050288825A1
• Time in Patent Office: 1,034 Days
• Field of Search: 700/282, 702/45, 73/232, 137/115.2
• US Class Current: 700/282
• CPC Class Codes: G05D 7/0635 by action on throttling means G05D7/0688, G05D7/0694 take precedence

Abstract

Systems and methods for mass flow controllers which minimize false flow conditions and display a reduced sensitivity to pressure transients are disclosed. Pressure gradients that exist within the volume of a mass flow controller fluid path are minimized in order to limit the potential energy contained in compressed or pressurized process gas. Additionally, process gas pressure may be monitored using a pressure sensor. This pressure signal is utilized in conjunction with a control algorithm to cancel the detrimental effect of certain flow components. These mass flow controllers may be used as drop in replacements for legacy mass flow controllers and reduce the cost of gas sticks due to elimination of discrete components such as pressure regulators, gas filters, pressure transducers, local pressure displays, isolation valves, seals, etc.

Claims

1. A flow controller with reduced sensitivity to pressure, comprising:

an inlet;

an outlet;

a flow path coupled to the inlet and the outlet;

a flow sensor coupled to the flow path;

a control valve downstream of the flow sensor and upstream of the outlet; and

a control system operable to;

generate a first signal corresponding to a time rate of change of pressure sensed by a pressure sensor coupled to the flow path;

receive a second signal corresponding to a setpoint for the flow controller;

receive a third signal corresponding to a measured flow determined by the flow sensor;

generate an error term by combining each of the first signal, the second signal and the third signal; and

adjust the flow controller based on the error term,

wherein a volume of the flow path downstream of the flow sensor and upstream of the control valve is optimized.

2. The flow controller of claim 1, wherein the control valve is positioned vertically.

3. The flow controller of claim 2, wherein the optimization minimizes the volume.

4. The flow controller of claim 1, wherein the pressure sensor is coupled to the flow path downstream of the inlet and upstream of the flow sensor.

5. The flow controller of claim 4, wherein the time rate of change of pressure corresponds to the time rate of change of pressure downstream of the inlet and upstream of the flow sensor.

6. The flow controller of claim 1, wherein the first signal is calculated based on a scaled derivative of a signal from the pressure sensor.

7. The flow controller of claim 6, wherein the error term is used to generate a drive signal for the control valve.

8. The flow controller of claim 6, wherein the scaled derivative is a function of at least one factor selected from a group consisting of gas species, upstream pressure, real-time mass flow rate of gas in the flow controller, internal volume in the flow controller and gas temperature.

9. The flow controller of claim 1, wherein the error term is generated by summing the first signal, the second signal and the third signal.

10. The flow controller of claim 1, wherein the third signal is generated using a scaled derivative of a flow signal.

11. The flow controller of claim 10, wherein the flow signal is generated by enhancing the measured flow.

12. The flow controller of claim 11, wherein the flow signal includes a zero offset.

13. The flow controller of claim 11, wherein the flow signal is generated by correlating the measured flow with a mass flow standard.

14. The flow controller of claim 1, wherein the third signal corresponds to the measured flow uncompensated for pressure.

15. The flow controller of claim 1, wherein the flow sensor includes an inlet and an outlet, and wherein the pressure sensor is physically disposed prior to the inlet of the flow sensor.

16. A system for reducing the sensitivity of a flow controller to pressure, comprising:

a pressure sensor;

a flow controller, including;

an inlet;

an outlet;

a flow path coupled to the inlet and the outlet;

a flow sensor coupled to the flow path; and

a control valve downstream of the flow sensor and upstream of the outlet; and

a control system operable to;

generate a first signal corresponding to a time rate of change of pressure sensed by the pressure sensor;

receive a second signal corresponding to a setpoint for the flow controller;

receive a third signal corresponding to a measured flow determined by the flow sensor;

generate an error term by combining each of the first signal, the second signal and the third signal; and

adjust the flow controller based on the error term.

17. The system of claim 16, wherein the pressure sensor is coupled to the flow path downstream of the inlet and upstream of the flow sensor.

18. The system of claim 17, wherein the time rate of change of pressure corresponds to the time rate of change of pressure downstream of the inlet and upstream of the flow sensor.

19. The system of claim 16, wherein the first signal is calculated based on a scaled derivative of a signal from the pressure sensor.

20. The system of claim 19, wherein the error term is used to generate a drive signal for the control valve.

21. The system of claim 19, wherein the scaled derivative is a function of at least one factor selected from a group consisting of gas species, upstream pressure, real-time mass flow rate of gas in the flow controller, internal volume in the flow controller and gas temperature.

22. The system of claim 16, wherein a volume of the flow path downstream of the flow sensor and upstream of the control valve is optimized.

23. The system of claim 22, wherein the control valve is positioned vertically.

24. The system of claim 23, wherein the optimization minimizes the volume.

25. The system of claim 16, wherein the error term is generated by summing the first signal, the second signal and the third signal.

26. The system of claim 16, wherein the third signal is generated using a scaled derivative of a flow signal.

27. The system of claim 26, wherein the flow signal is generated by enhancing the measured flow.

28. The system of claim 27, wherein the flow signal includes a zero offset.

29. The system of claim 27, wherein the flow signal is generated by correlating the measured flow with a mass flow standard.

30. The system of claim 16, wherein the third signal corresponds to the measured flow uncompensated for pressure.

31. A gas stick with reduced sensitivity to pressure disturbances, comprising:

a pressure sensor coupled to the gas stick;

a flow controller coupled to the gas stick, including;

an inlet coupled to the gas stick;

an outlet coupled to the gas stick;

a flow path coupled to the inlet and the outlet;

a flow sensor coupled to the flow path; and

a control valve downstream of the flow sensor and upstream of the outlet; and

a control system coupled to the flow controller, the control system operable to;

generate a first signal corresponding to a time rate of change of pressure sensed by the pressure sensor;

receive a second signal corresponding to a setpoint for the flow controller;

receive a third signal corresponding to a measured flow determined by the flow sensor;

generate an error term by combining each of the first signal, the second signal and the third signal; and

adjust the flow controller based on the error term.

32. The gas stick of claim 31, wherein the time rate of change of pressure corresponds to the time rate of change of pressure downstream of the inlet and upstream of the flow sensor.

33. The gas stick of claim 32, wherein the pressure sensor is coupled to the flow path downstream of the inlet and upstream of the flow sensor.

34. The gas stick of claim 32, further comprising

a pneumatic shut off valve;

and

a manual shut off valve.

35. The gas stick of claim 31, wherein the first signal is calculated based on a scaled derivative of a signal from the pressure sensor.

36. The gas stick of claim 35, wherein the error term is used to generate a drive signal for the control valve.

37. The gas stick of claim 36, wherein a volume of the flow path downstream of the flow sensor and upstream of the control valve is optimized.

38. The gas stick of claim 35, wherein the scaled derivative is a function of at least one factor selected from a group consisting of gas species, upstream pressure, real-time mass flow rate of gas in the flow controller, internal volume in the flow controller and gas temperature.

39. The gas stick of claim 31, wherein the error term is generated by summing the first signal, the second signal and the third signal.

40. The gas stick of claim 31, wherein the third signal is generated using a scaled derivative of a flow signal.

41. The gas stick of claim 40, wherein the flow signal is generated by enhancing the measured flow.

42. The gas stick of claim 41, wherein the flow signal includes a zero offset.

43. The gas stick of claim 41, wherein the flow signal is generated by correlating the measured flow with a mass flow standard.

44. The gas stick of claim 31, wherein the third signal corresponds to the measured flow uncompensated for pressure.