Method of forming amorphous silica-based coating film with low dielectric constant and thus obtained silica-based coating film

• US 7,232,769 B2
• Filed: 10/27/2003
• Issued: 06/19/2007
• Est. Priority Date: 10/31/2002
• Status: Active Grant

• Current Assignee: JGC Catalysts and Chemicals Ltd. (JGC Holdings Corporation)
• Original Assignee: Fujitsu Limited, Catalysts & Chemicals Industries Co. Ltd. (JGC Holdings Corporation)
• Inventors: Nakata, Yoshihiro, Nakashima, Akira, Egami, Miki, Yano, Ei, Komatsu, Michio, Suzuki, Katsumi
• Primary Examiner(s): Sarkar; Asok K.
• Assistant Examiner(s): Yevsikov; Victor V.
• Application Number:
  US10/533,238
• Publication Number:
  US 20060084277A1
• Time in Patent Office: 1,331 Days
• Field of Search: 438/780, 438/781, 438/758
• US Class Current: 438/758
• CPC Class Codes: C08G 77/08 characterised by the catalysts used
• CPC Class Codes: C09D 183/02 Polysilicates
• CPC Class Codes: H01L 21/02126 the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
• CPC Class Codes: H01L 21/02203 the layer being porous
• CPC Class Codes: H01L 21/02216 the compound being a molecule comprising at least one silicon-oxygen bond and the compound having hydrogen or an organic group attached to the silicon or oxygen, e.g. a siloxane
• CPC Class Codes: H01L 21/02282 liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
• CPC Class Codes: H01L 21/02337 treatment by exposure to a gas or vapour
• CPC Class Codes: H01L 21/316 composed of oxides or glassy oxides or oxide based glass
• CPC Class Codes: H01L 21/31695 Deposition of porous oxides or porous glassy oxides or oxide based porous glass

Abstract

The present invention relates to an amorphous silica-based coating film with a low specific dielectric constant of 2.5 or below and the Young'"'"'s modulus of 6.0 GPa or more and having excellent hydrophobic property, and to a method of forming the same. A liquid composition containing a silicon compound obtained by hydrolyzing tetraalkyl ortho silicate (TAOS) and specific alkoxysilane (AS) in the presence of tetraalkyl ammonium hydroxide (TAAOH) is prepared. The liquid composition is then applied on a substrate, heated and cured to obtain a coating film. The coating film obtained as described has a smooth surface and also has specific micropores therein.

Claims

1. A method of forming an amorphous silica-based coating film with a low dielectric constant having a high film strength and excellent hydrophobic property and capable of ensuring smoothness of a surface coated therewith on a substrate comprising the steps of:

(a) preparing a liquid composition containing;

1) a silicon compound obtained by hydrolyzing tetraalkyl ortho silicate (TAOS) and alkoxysilane (AS) expressed by general formula (I) in the presence of tetraalkyl ammonium hydroxide (TAAOH) purified to remove impurities comprising compounds of alkali metal elements and halogen group elements; and

2) said tetraalkyl ammonium hydroxide (TAAOH); and

wherein the general formula is;

X_nSi(OR)_4-n 

 

(I)

wherein X indicates a hydrogen atom, a fluorine atom, or an alkyl group, a fluorine-substituted alkyl group, an aryl group or a vinyl group each having 1 to 8 carbon atoms;

R indicates a hydrogen atom, or an alkyl group, an aryl group or a vinyl group each having 1 to 8 carbon atoms; and

n is an integral number from 1 to 3,

(b) applying the liquid composition on a substrate;

(c) heating the substrate at a temperature in a range from 80 to 350°

C.; and

(d) curing the substrate at a temperature in a range from 350 to 450°

C.

2. The method of forming an amorphous silica-based coating film with a low dielectric constant according to claim 1, wherein said tetraalkyl ortho silicate (TAOS) used in the preparing step (a) is tetraethyl ortho silicate (TEOS), tetramethyl ortho silicate (TMOS) or a mixture thereof.

3. The method of forming an amorphous silica-based coating film with a low dielectric constant according to claim 1, wherein said alkoxysilane (AS) used in the preparing step (a) is methytrimethoxy silane (MTMS), methyltriethoxy silane (MTES) or a mixture thereof.

4. The method of forming an amorphous silica-based coating film with a low dielectric constant according to claim 1, wherein said tetraalkyl ammonium hydroxide (TAAOH) used in the preparing step (a) is tetrapropyl ammonium hydroxide (TPAOH), tetrabutyl ammonium hydroxide (TBAOH) or a mixture thereof.

5. The method of forming an amorphous silica-based coating film with a low dielectric constant according to claim 1, wherein a content of impurities comprising compounds of alkali metal elements such as sodium (Na) and potassium (K) contained in said tetraalkyl ammonium hydroxide (TAAOH) used in the preparing step (a) is 50 ppb by weight or below on respective element bases.

6. The method of forming an amorphous silica-based coating film with a low dielectric constant according to claim 1, wherein a content of impurities comprising compounds of halogen group elements such as bromine (Br) and chlorine (Cl) contained in said tetraalkyl ammonium hydroxide (TAAOH) used in the preparing step (a) is 1 ppm by weight or less on respective element bases.

7. The method of forming an amorphous silica-based coating film with a low dielectric constant according to claim 1, wherein a molar ratio (TAOS/AS) of said tetraalkyl ortho silicate (TAOS) and said alkoxysilane (AS) used in the preparing step (a) is in a range from 6/4 to 2/8 in terms of SiO₂.

8. The method of forming an amorphous silica-based coating film with a low dielectric constant according to claim 1, wherein a molar ratio (TAAOH)/(TAOS+AS) of said tetraalkyl ammonium hydroxide (TAAOH) and the components for forming a silica-based coating film (TAOS+AS) used in the preparing step (a) is in a range from 1/10 to 7/10 in terms of SiO₂.

9. The method of forming an amorphous silica-based coating film with a low dielectric constant according to claim 1, wherein the operation used in the applying step (b) is executed with a spin coat method.

10. The method of forming an amorphous silica-based coating film with a low dielectric constant according to claim 1, wherein the operation used in the heating step (c) is executed for 1 to 10 minutes in an atmosphere of nitrogen or air.

11. The method of forming an amorphous silica-based coating film with a low dielectric constant according to claim 1, wherein the operation used in the curing step (d) is executed for 5 to 90 minutes in an atmosphere of nitrogen.

12. An amorphous silica-based coating film with a low dielectric constant, wherein the obtained coating film using the method according to claim 1, has a specific dielectric constant of 2.5 or below and a film strength of Young'"'"'s modulus of 6.0 GPa or more.

13. The amorphous silica-based coating film with a low dielectric constant according to claim 12, wherein said coating film contains pores having an average diameter of 3 nm or below and also with volume percentage of micropores each with the diameter of 2 nm or below of 70% or more.

14. The amorphous silica-based coating film with a low dielectric constant according to claim 12, wherein said coating film has a smooth surface with surface roughness (Rms) of 1 nm or below.

15. The amorphous silica-based coating film with a low dielectric constant according to claim 12, wherein said coating film is an amorphous silica-based coating film not having any X-ray diffraction peak specific to a MFI crystal structure.

16. The amorphous silica-based coating film with a low dielectric constant according to claim 12, wherein said coating film is an inter-layer insulation film or an inter-metal insulation film formed on a semiconductor substrate.

17. A method of forming an amorphous silica-based coating film with a low dielectric constant having a high film strength and excellent hydrophobic property and capable of ensuring smoothness of a surface coated therewith on a substrate comprising the steps of:

(a) preparing a liquid composition containing;

1) a silicon compound obtained by hydrolyzing or partially hydrolyzing tetraalkyl ortho silicate (TAOS) in the presence of tetraalkyl ammonium hydroxide (TAAOH) purified to remove impurities comprising compounds of alkali metal elements and halogen group elements, mixing the reaction product with the alkoxysilane (AS) expressed by general formula (I) or a hydrolysate or a partial hydrolysate thereof, and further hydrolyzing all or a portion of the mixture; and

2) said tetraalkyl ammonium hydroxide (TAAOH); and

wherein the general formula (I) is;

X_nSi(OR)_4-n 

 

(I)

wherein X indicates a hydrogen atom, a fluorine atom, or an alkyl group, a fluorine-substituted alkyl group, an aryl group or a vinyl group each having 1 to 8 carbon atoms;

R indicates a hydrogen atom, or an alkyl group, an aryl group or a vinyl group each having 1 to 8 carbon atoms; and

n is an integral number from 1 to 3;

(b) applying the liquid composition on a substrate;

(c) heating the substrate at a temperature in a range from 80 to 350°

C.; and

(d) curing the substrate at a temperature in a range from 350 to 450°

C.

18. The method of forming an amorphous silica-based coating film with a low dielectric constant according to claim 17, wherein said tetraalkyl ortho silicate (TAOS) used in the preparing step (a) is tetraethyl ortho silicate (TEOS), tetramethyl ortho silicate (TMOS) or a mixture thereof.

19. The method of forming an amorphous silica-based coating film with a low dielectric constant according to claim 17, wherein said alkoxysilane (AS) used in the preparing step (a) is methytrimethoxy silane (MTMS), methyltriethoxy silane (MTES) or a mixture thereof.

20. The method of forming an amorphous silica-based coating film with a low dielectric constant according to claim 17, wherein said tetraalkyl ammonium hydroxide (TAAOH) used in the preparing step (a) is tetrapropyl ammonium hydroxide (TPAOH), tetrabutyl ammonium hydroxide (TBAOH) or a mixture thereof.

21. The method of forming an amorphous silica-based coating film with a low dielectric constant according to claim 17, wherein a content of impurities comprising compounds of alkali metal elements such as sodium (Na) and potassium (K) contained in said tetraalkyl ammonium hydroxide (TAAOH) used in the preparing step (a) is 50 ppb by weight or below on respective element bases.

22. The method of forming an amorphous silica-based coating film with a low dielectric constant according to claim 17, wherein a content of impurities comprising compounds of halogen group elements such as bromine (Br) and chlorine (Cl) contained in said tetraalkyl ammonium hydroxide (TAAOH) used in the preparing step (a) is 1 ppm by weight or less on respective element bases.

23. The method of forming an amorphous silica-based coating film with a low dielectric constant according to claim 17, wherein a molar ratio (TAOS/AS) of said tetraalkyl ortho silicate (TAOS) and said alkoxysilane (AS) used in the preparing step (a) is in a range from 6/4 to 2/8 in terms of SiO₂.

24. The method of forming an amorphous silica-based coating film with a low dielectric constant according to claim 17, wherein a molar ratio (TAAOH)/(TAOS+AS) of said tetraalkyl ammonium hydroxide (TAAOH) and the components for forming a silica-based coating film (TAOS+AS) used in the preparing step (a) is in a range from 1/10 to 7/10 in terms of SiO₂.

25. The method of forming an amorphous silica-based coating film with a low dielectric constant according to claim 17, wherein the operation used in the applying step (b) is executed with a spin coat method.

26. The method of forming an amorphous silica-based coating film with a low dielectric constant according to claim 17, wherein the operation used in the heating step (c) is executed for 1 to 10 minutes in an atmosphere of nitrogen or air.

27. The method of forming an amorphous silica-based coating film with a low dielectric constant according to claim 17, wherein the operation used in the curing step (d) is executed for 5 to 90 minutes in an atmosphere of nitrogen.

28. An amorphous silica-based coating film with a low dielectric constant, wherein the obtained coating film using the method according to claim 17, has a specific dielectric constant of 2.5 or below and a film strength of Young'"'"'s modulus of 6.0 GPa or more.

29. The amorphous silica-based coating film with a low dielectric constant according to claim 28, wherein said coating film contains pores having an average diameter of 3 nm or below and also with volume percentage of micropores each with the diameter of 2 nm or below of 70% or more.

30. The amorphous silica-based coating film with a low dielectric constant according to claim 28, wherein said coating film has a smooth surface with surface roughness (Rms) of 1 nm or below.

31. The amorphous silica-based coating film with a low dielectric constant according to claim 28, wherein said coating film is an amorphous silica-based coating film not having any X-ray diffraction peak specific to a MFI crystal structure.

32. The amorphous silica-based coating film with a low dielectric constant according to claim 28, wherein said coating film is an inter-layer insulation film or an inter-metal insulation film formed on a semiconductor substrate.