Plasma processing apparatus

• US 7,234,413 B2
• Filed: 01/30/2004
• Issued: 06/26/2007
• Est. Priority Date: 01/31/2003
• Status: Expired due to Fees

• Current Assignee: Shimadzu Corporation
• Original Assignee: Shimadzu Corporation
• Inventors: Suzuki, Masayasu
• Primary Examiner(s): Hassanzadeh; Parviz
• Assistant Examiner(s): Dhingra; Rakesh
• Application Number:
  US10/768,469
• Publication Number:
  US 20040221816A1
• Time in Patent Office: 1,243 Days
• Field of Search: 156/345.36, 156/345.41, 118/723.MW
• US Class Current: 118/723.0MW
• CPC Class Codes: H01J 37/32192 Microwave generated discharge H01J37/32357, H01J37/32366, H01J37/32394, H01J37/32403 take precedence

Abstract

In a plasma processing apparatus, microwaves being transmitted in a waveguide pass through a microwave transmitted window via first and second slot antennas provided in a magnetic field side, so as to form surface waves. Process gas in a chamber is excited by the surface waves so as to generate surface wave plasma. A substrate is processed by the plasma. Each first slot antenna is provided with an aperture, which has a curved or bent shape and whose longitudinal direction extends substantially to follow the lines of magnetic force of the microwaves. Each second slot antenna is provided with an aperture which has a rectangular shape.

Claims

1. A plasma processing apparatus comprising:

a rectangular waveguide in which microwaves are transmitted;

a slot antenna provided in a magnetic field side;

a microwave transmitting window; and

a vacuum chamber into which process gas is introduced,

wherein the microwaves being transmitted in said rectangular waveguide form standing waves and pass through said microwave transmitting window via said slot antenna so as to generate surface waves, and the process gas in said vacuum chamber is excited by the surface waves to thereby generate surface wave plasma, with which a substrate is processed, and wherein said slot antenna includes at least one first slot antenna provided with an aperture having a curved or bent shape generally extending in a longitudinal direction of the rectangular waveguide and being positioned such that the aperture substantially follows lines of magnetic force of the microwaves.

2. The plasma processing apparatus according to claim 1, wherein said slot antenna further includes at least one second slot antenna provided with an aperture having a rectangular shape.

3. The plasma processing apparatus according to claim 1, wherein at least two said first slot antennas are provided at an interval corresponding to an integral multiple of λ

g/2 when λ

g designates a wavelength in said rectangular waveguide of said microwaves.

4. The plasma processing apparatus according to claim 2, wherein said slot antenna comprises at least two slot antenna sets each including at least one of said first slot antenna and said second slot antenna, which are provided at an interval corresponding to an integral multiple of λ

g/2 when λ

g designates a wavelength in said rectangular waveguide of said microwaves.

5. The plasma processing apparatus according to claim 2, wherein a longitudinal direction of the aperture of said second slot antenna is made variable with respect to an axis parallel with a direction in which the microwaves are transmitted.

6. The plasma processing apparatus according to claim 4, wherein a longitudinal direction of the aperture of said second slot antenna is made variable with respect to an axis parallel with a direction in which the microwaves are transmitted.