Light quantity distribution control element and optical apparatus using the same
First Claim
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1. An optical element for controlling a light quantity comprising:
- a substrate having an optical surface without a periodic structure; and
an antireflective structure including a plurality of antireflective elements provided on the optical surface of the substrate, the antireflective elements having a pitch equal to or less than a wavelength of the light to be controlled,wherein heights of the antireflective elements differ in accordance with portions of the optical surface on which the antireflective elements are respectively placed.
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Abstract
A light quantity distribution control element includes a substrate of 20 mm×20 mm×3 mm made of a material that transmits light, such as optical glass or acryl, and a antireflective structure provided on a surface of the substrate. As the antireflective structure, a conical antireflective structure of a pitch of 0.15 μm (periodic structure having conical convexities) is formed. This corresponds to a antireflective structure having a pitch of a wavelength or less in the ultraviolet band (150 nm to 400 nm) at the time when ultraviolet light is used as incident light.
9 Citations
25 Claims
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1. An optical element for controlling a light quantity comprising:
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a substrate having an optical surface without a periodic structure; and an antireflective structure including a plurality of antireflective elements provided on the optical surface of the substrate, the antireflective elements having a pitch equal to or less than a wavelength of the light to be controlled, wherein heights of the antireflective elements differ in accordance with portions of the optical surface on which the antireflective elements are respectively placed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. An optical apparatus comprising:
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an optical element for controlling a light quantity, the optical element comprising; a substrate having an optical surface without a periodic structure; and an antireflective structure including a plurality of antireflective elements provided on the optical surface of the substrate, the antireflective elements having a pitch equal to or less than a wavelength of the light to be controlled, wherein heights of the antireflective elements differ in accordance with portions of the optical surface on which the antireflective elements are respectively placed. - View Dependent Claims (23, 24, 25)
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Specification