RF-MEMS switch and its fabrication method
First Claim
1. A MEMS switch comprising:
- a base portion including a substrate;
a first anchor formed over said substrate;
a first spring connected to said first anchor;
an upper electrode member connected to said first spring, wherein said upper electrode member makes a motion above said substrate by elastically deforming said first spring;
a lower electrode member formed over said substrate and positioned under said upper electrode member;
a second spring connected to said upper electrode member; and
a movable second anchor connected to said second spring,wherein said MEMS switch is switched on or off by switching contacting state between said upper electrode member and said lower electrode member,wherein said movable second anchor is brought into contact with said base portion before said MEMS switch turns on,wherein said second spring applies upward force to said upper electrode member when said MEMS switch is on; and
wherein said lower electrode member includes an insulator film formed over a lower electrode, and when said upper electrode member is brought into contact with said lower electrode member, electrical capacitance is produced between said upper electrode member and said lower electrode member.
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Accused Products
Abstract
The MEMS switch comprises a first anchor formed over a substrate, a first spring connected to the first anchor, an upper electrode which is connected to the first spring and makes a motion above the substrate, elastically deforming the first spring, a lower electrode formed over the substrate, positioned under the upper electrode, a second spring connected to the upper electrode, and a second anchor connected to the second spring. When voltage is applied between the upper and lower electrodes and the upper electrode makes a downward motion, the second anchor is brought into contact with the substrate. As a result, the second spring is elastically deformed. When the upper electrode is subsequently brought into contact with the lower electrode, thereby the upper and lower electrodes are electrically connected. The first and second anchors, first and second springs, and upper electrode are formed of identical metal in integral structure.
55 Citations
8 Claims
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1. A MEMS switch comprising:
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a base portion including a substrate; a first anchor formed over said substrate; a first spring connected to said first anchor; an upper electrode member connected to said first spring, wherein said upper electrode member makes a motion above said substrate by elastically deforming said first spring; a lower electrode member formed over said substrate and positioned under said upper electrode member; a second spring connected to said upper electrode member; and a movable second anchor connected to said second spring, wherein said MEMS switch is switched on or off by switching contacting state between said upper electrode member and said lower electrode member, wherein said movable second anchor is brought into contact with said base portion before said MEMS switch turns on, wherein said second spring applies upward force to said upper electrode member when said MEMS switch is on; and wherein said lower electrode member includes an insulator film formed over a lower electrode, and when said upper electrode member is brought into contact with said lower electrode member, electrical capacitance is produced between said upper electrode member and said lower electrode member. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A MEMS switch comprising:
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a base portion including a substrate; a first anchor formed over said substrate; a first spring connected to said first anchor; an upper electrode member connected to said first spring, wherein said upper electrode member makes a motion above said substrate by elastically deforming said first spring; a lower electrode member formed over said substrate and positioned under said upper electrode member; a second spring connected to said upper electrode member; and a movable second anchor connected to said second spring, wherein said MEMS switch is switched on or off by switching a contacting state between said upper electrode member and said lower electrode member, wherein said movable second anchor is brought into contact with said base portion before said MEMS switch turns on, wherein said second spring applies upward force to said upper electrode member when said MEMS switch is on, and wherein a respective said upper electrode, a respective said second spring, and a respective said movable second anchor are attached in that order at each of two sides of said first spring to form a push-pull structure.
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Specification