MEMS fluidic actuator

• US 7,246,524 B1
• Filed: 05/02/2005
• Issued: 07/24/2007
• Est. Priority Date: 05/02/2005
• Status: Active Grant

• Current Assignee: National Technology & Engineering Solutions Of Sandia LLC (Honeywell International Inc.)
• Original Assignee: Sandia Corporation (Martin Marietta Corporation)
• Inventors: Johnston, Gabriel A., Okandan, Murat, Galambos, Paul C., Rohrer, Brandon R., Kholwadwala, Deepesh K.
• Primary Examiner(s): THOMPSON, JEWEL VERGIE
• Application Number:
  US11/120,843
• Time in Patent Office: 813 Days
• Field of Search: 702/45, 264/401, 731/46, 735/041.5, 735/401.2, 737/15, 257/416
• US Class Current: 73/715
• CPC Class Codes: B64C 3/46 by inflatable elements
• CPC Class Codes: F16K 2099/009 Fluid power devices
• CPC Class Codes: F16K 99/0001 Microvalves microdevices B81B1/00; manufacture or treatment of devices or systems in or on a substrate B81C1/00; microfluidic structures B01L3/5027; micropumps F04B19/006
• CPC Class Codes: F16K 99/0007 of cantilever type
• CPC Class Codes: F16K 99/0011 Gate valves or sliding valves
• CPC Class Codes: F16K 99/0013 Rotary valves
• CPC Class Codes: F16K 99/0036 operated by temperature variations
• CPC Class Codes: F16K 99/0048 using piezoelectric means
• CPC Class Codes: F16K 99/0051 using electrostatic means

Abstract

The present invention comprises a novel, lightweight, massively parallel device comprising microelectromechanical (MEMS) fluidic actuators, to reconfigure the profile, of a surface. Each microfluidic actuator comprises an independent bladder that can act as both a sensor and an actuator. A MEMS sensor, and a MEMS valve within each microfluidic actuator, operate cooperatively to monitor the fluid within each bladder, and regulate the flow of the fluid entering and exiting each bladder. When adjacently spaced in a array, microfluidic actuators can create arbitrary surface profiles in response to a change in the operating environment of the surface. In an embodiment of the invention, the profile of an airfoil is controlled by independent extension and contraction of a plurality of actuators, that operate to displace a compliant cover.

Claims

1. A fluidic MEMS actuator comprising:

a bladder, said bladder comprising an elastic membrane and said bladder includes means for attaching said elastic membrane, along a perimeter edge of said elastic membrane, to a base;

a MEMS sensor operatively configured to measure at least one of the pressure of a fluid within said bladder or, at least one parameter related to the flow rate of a fluid, into or out of said bladder;

a MEMS valve operatively configured to control the amount of fluid within said bladder;

wherein at least one of said MEMS sensor and said MEMS valve, is disposed within said bladder.

2. The actuator of claim 1 wherein said base comprises one or more selected from the group consisting of a laminate printed wiring board, a ceramic, a glass ceramic, a co-fired ceramic and a glass-coated metal.

3. A system of MEMS fluidic actuators comprising:

a substrate;

a plurality of fluidic MEMS actuators attached to at least one surface of said substrate, each fluidic MEMS actuator of said plurality comprising;

a bladder;

a MEMS sensor operatively configured to measure at least one of the pressure of a fluid within said bladder or, at least one parameter related to the flow rate of a fluid, into or out of said bladder;

a MEMS valve operatively configured to control the amount of fluid within said bladder;

wherein at least one of said MEMS sensor and said MEMS valve, is disposed within said bladder; and

,

a compliant cover being displaceable by one or more said bladders of said plurality of fluidic MEMS actuators.

4. The system of claim 3 wherein said compliant cover comprises one or more selected from the group consisting of an elastomeric polymer, a rubber, a fabric, a silk, a polymer composite, and a metallic sheet.

5. A system of MEMS fluidic actuators comprising:

a substrate;

a plurality of fluidic MEMS actuators attached to at least one surface of said substrate, each fluidic MEMS actuator of said plurality comprising;

a bladder;

a MEMS sensor operatively configured to measure at least one of the pressure of a fluid within said bladder or, at least one parameter related to the flow rate of a fluid, into or out of said bladder;

a MEMS valve operatively configured to control the amount of fluid within said bladder;

wherein at least one of said MEMS sensor and said MEMS valve, is disposed within said bladder; and

,

wherein one or more said bladders each comprise an individual elastic membrane, attached along a perimeter edge, to a surface of said substrate.

6. A system of MEMS fluidic actuators comprising:

a substrate;

a plurality of fluidic MEMS actuators attached to at least one surface of said substrate, each fluidic MEMS actuator of said plurality comprising;

a bladder;

a MEMS sensor operatively configured to measure at least one of the pressure of a fluid within said bladder or, at least one parameter related to the flow rate of a fluid, into or out of said bladder;

a MEMS valve operatively configured to control the amount of fluid within said bladder;

wherein at least one of said MEMS sensor and said MEMS valve, is disposed within said bladder; and

,

wherein one or more said bladders, comprise a continuous elastic membrane, having a plurality of bladders formed therein.

7. A system of MEMS fluidic actuators comprising:

a substrate;

a plurality of fluidic MEMS actuators attached to at least one surface of said substrate, each fluidic MEMS actuator of said plurality comprising;

a bladder;

a MEMS sensor operatively configured to measure at least one of the pressure of a fluid within said bladder or, at least one parameter related to the flow rate of a fluid, into or out of said bladder;

a MEMS valve operatively configured to control the amount of fluid within said bladder;

wherein at least one of said MEMS sensor and said MEMS valve, is disposed within said bladder; and

,

said substrate includes one or more fluidic channels, at least one fluidic channel being fluidically connected to one or more bladders.

8. A system of MEMS fluidic actuators comprising:

a substrate;

a plurality of fluidic MEMS actuators attached to at least one surface of said substrate, each fluidic MEMS actuator of said plurality comprising;

a bladder;

a MEMS sensor operatively configured to measure at least one of the pressure of a fluid within said bladder or, at least one parameter related to the flow rate of a fluid, into or out of said bladder;

a MEMS valve operatively configured to control the amount of fluid within said bladder;

wherein at least one of said MEMS sensor and said MEMS valve, is disposed within said bladder; and

,

wherein said plurality of fluidic MEMS actuators are adjacently spaced, so as to allow at least one sidewall of the corresponding bladder of at least one said MEMS actuator, to touch at least one adjacent sidewall of the corresponding bladder of at least one neighboring actuator.