ALD method and apparatus
First Claim
1. An ALD method for depositing a layer on a surface of a substrate, comprising conducting a plurality of ALD cycles in a reaction chamber containing said substrate, wherein an ALD cycle comprises a saturating chemical dosage stage and a saturating CRISP stage, said saturating CRISP stage comprising;
- introducing a plurality of CRISP reactants into said reaction chamber;
reacting said plurality of CRISP reactants in a continuous and non-saturating reaction which consumes said plurality of reactants and generates a volatile by product and an intermediate molecular fragment; and
reacting said intermediate molecular fragment with an intermediate ALD surface in a saturating fragment-surface reaction.
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Abstract
A method and an apparatus for executing efficient and cost-effective Atomic Layer Deposition (ALD) at low temperatures are presented. ALD films such as oxides and nitrides are produced at low temperatures under controllable and mild oxidizing conditions over substrates and devices that are moisture- and oxygen-sensitive. ALD films, such as oxides, nitrides, semiconductors and metals, are efficiently and cost-effectively deposited from conventional metal precursors and activated nonmetal sources. Additionally, substrate preparation methods for optimized ALD are disclosed.
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43 Claims
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1. An ALD method for depositing a layer on a surface of a substrate, comprising conducting a plurality of ALD cycles in a reaction chamber containing said substrate, wherein an ALD cycle comprises a saturating chemical dosage stage and a saturating CRISP stage, said saturating CRISP stage comprising;
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introducing a plurality of CRISP reactants into said reaction chamber; reacting said plurality of CRISP reactants in a continuous and non-saturating reaction which consumes said plurality of reactants and generates a volatile by product and an intermediate molecular fragment; and reacting said intermediate molecular fragment with an intermediate ALD surface in a saturating fragment-surface reaction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
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Specification