Planar inertial sensor, in particular for portable devices having a stand-by function

• US 7,252,002 B2
• Filed: 09/23/2004
• Issued: 08/07/2007
• Est. Priority Date: 09/26/2003
• Status: Active Grant

• Current Assignee: STMicroelectronics SRL (STMicroelectronics NV)
• Original Assignee: STMicroelectronics SRL (STMicroelectronics NV)
• Inventors: Lasalandra, Ernesto, Merassi, Angelo, Zerbini, Sarah, Vigna, Benedetto
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US10/948,095
• Publication Number:
  US 20050274184A1
• Time in Patent Office: 1,048 Days
• Field of Search: 735/143.2, 361/278
• US Class Current: 73/514.32
• CPC Class Codes: G01P 15/0891 with indication of predetermined acceleration values G01P15/135 takes precedence
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0857 using a particular shape of the suspension spring
• CPC Class Codes: H04M 2250/12 including a sensor for measuring a physical value, e.g. temperature or motion telephones including GPS signal receivers H04M2250/10

Abstract

A planar inertial sensor includes a first region and a second region of semiconductor material. The second region is capacitively coupled, and mobile with respect to the first region. The second region extends in a plane and has second portions, which face respective first portions of the first region. Movement of the second region, relative to the first region, in any direction belonging to the plane modifies the distance between the second portions and the first portions, which in turn modifies a value of the capacitive coupling.

Claims

1. An inertial sensor, comprising:

a first region of semiconductor material formed by a first plurality of arc-shaped regions arranged on concentric circumferences, said first region being fixed; and

a second region of semiconductor material formed by a second plurality of arc-shaped regions arranged on concentric circumferences, each of said arc-shaped regions of said first plurality facing, on a first side thereof, a respective arc-shaped region of said second plurality, and positioned such that a distance between each of said arc-shaped regions of said first plurality and the respective arc-shaped region of said second plurality is substantially less than a distance between each of said arc-shaped regions of said first plurality and any of the arc-shaped regions of said second plurality positioned on a second side of the respective one of said first plurality of arc-shaped regions, said second region being mobile and extending in a plane, and said second region being translatable with respect to said first region in any direction belonging to said plane.

2. The inertial sensor according to claim 1 wherein said first and second regions are capacitively coupled to one another.

3. The inertial sensor according to claim 2 wherein said first and second regions have a basically circular shape and said first and second portions are shaped like the arc of a circumference.

4. The inertial sensor according to claim 2 wherein a capacitive value of the capacitive coupling between the first and second regions varies in accordance with a distance of translation of the second region with respect to first region, and wherein the variation is substantially independent of a direction of translation belonging to said plane.

5. The inertial sensor according to claim 1 wherein said arc-shaped regions of said second region arranged on a same circumference are connected together to form a plurality of concentric rings connected to one another through radial-connection arms.

6. The inertial sensor according to claim 1 wherein said second region is supported by a central anchorage.

7. The inertial sensor according to claim 6 wherein said second region has a central opening and said central anchorage comprises a pin element extending in said central opening and a plurality of spiral springs extending between said pin element and said second region.

8. The inertial sensor according to claim 1 wherein said first and second regions have a substantially elliptical shape.

9. The inertial sensor according to claim 1 wherein said first and second regions have a substantially polygonal shape.

10. A portable electronic apparatus comprising:

a device for re-activation from stand-by, said device for re-activation from stand-by including an inertial sensor having a first region of semiconductor material, said first region having a first plurality of electrodes, and a second region of semiconductor material, said second region being mobile with respect to said first region and having a second plurality of electrodes formed by a plurality of concentric rings, each of the second plurality of electrodes facing, at least in part, a respective one of said first plurality of electrodes, said second region extending in a plane, and said second region being translatable with respect to said first region in any direction belonging to said plane.

11. The electronic apparatus of claim 10 wherein the portable electronic apparatus is one of a palm-top computer, a cellphone, a pocket video-game, or a calculator.

12. The electronic apparatus of claim 11 wherein the first plurality of electrodes of the first region of semiconductor material is fixed with respect to the device.

13. A device, comprising:

a support substrate;

a stator region formed on the substrate and including a sensor region having a plurality of sensor electrodes electrically coupled to a common node; and

a rotor, including a plurality of rotor electrodes mechanically coupled to the rotor, movably coup led to the substrate such that the rotor is free to move in any direction lying in a plane parallel to a surface of the substrate, the rotor being capacitively coupled to the stator region such that translation of the rotor a given distance in any direction lying in the plane changes the capacitive coupling to a degree substantially equal to a change of the coupling resulting from displacement of the rotor the same distance in any other direction lying in the plane.

14. The device of claim 13 wherein the support substrate is a first semiconductor material layer, and wherein the stator region and rotor region are formed in a second semiconductor material layer formed on the first semiconductor material layer.

15. The device of claim 13, comprising:

a detection circuit including a capacitor formed by the capacitive coupling and configured to detect changes of the capacitive coupling that exceed a selected threshold.

16. The device of claim 15 wherein the detection circuit is configured to bring a system from standby to active when the selected threshold is exceeded.

17. The device of claim 13 wherein:

the rotor is radially symmetrical, in plan view.

18. The device of claim 17 wherein the rotor has a polygonal shape.

19. The device of claim 17 wherein the rotor has a substantially circular shape.

20. The device of claim 13 wherein:

the rotor has a substantially annular shape; and

wherein the rotor is movably coupled to the substrate via a plurality of springs surrounded by the annular shaped rotor and mechanically coupled at respective first ends to the rotor and at respective second ends to the substrate.

21. The device of claim 13 wherein:

the plurality of rotor electrodes is formed by a plurality of concentric rings mechanically coupled to the roto; and

each of the plurality of sensor electrodes faces a respective one of the plurality of rotor electrodes.

22. The device of claim 13 wherein the device comprises a cellular telephone.

23. The device of claim 13 wherein the device comprises a hand-held video game.

24. The device of claim 13 wherein the device comprises a palm-top computer.

25. The device of claim 13 wherein the device comprises a calculator.

26. The device of claim 13 wherein each of the plurality of sensor electrodes and each of the plurality of rotor electrodes is arc-shaped.

27. The device of claim 13 wherein each of the concentric rings of rotor electrodes is coupled to the rotor by radial connection arms.

28. A method, comprising:

displacing a rotor having a plurality of concentric rings mechanically coupled to the rotor, within a plane, a distance relative to a stator having a plurality of sensor electrodes arranged such that each sensor electrode faces a respective portion of one of the plurality of concentric rings; and

varying a capacitive coupling between the rotor and the stator in direct relation to the distance the rotor is displaced, a magnitude of the variation being substantially independent of a direction of displacement of the rotor within the plane.

29. The method of claim 28 wherein the relationship between the distance of displacement and magnitude of variation is non-linear.

30. The method of claim 28, comprising performing the displacing step in response to movement of an electronic device.

31. The method of claim 28 wherein the plurality of concentric rings are mechanically coupled to the rotor by rigid arms extending radially from the rotor.