MEMS device with thinned comb fingers

• US 7,258,010 B2
• Filed: 03/09/2005
• Issued: 08/21/2007
• Est. Priority Date: 03/09/2005
• Status: Expired due to Fees

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Johnson, Burgess R., Horning, Robert D., Weber, Mark W.
• Primary Examiner(s): Kwok; Helen C.
• Application Number:
  US11/076,193
• Publication Number:
  US 20060201249A1
• Time in Patent Office: 895 Days
• Field of Search: 735/143.2, 735/143.6, 735/143.8, 735/142.9, 735/040.2, 735/040.4, 735/041.2, 735/041.4, 735/041.5, 735/141.6
• US Class Current: 73/514.32
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type

Abstract

Methods of fabricating thinned comb MEMS devices are disclosed. A comb drive device in accordance with an illustrative embodiment of the present invention can include a number of interdigitated comb fingers some of which have a reduced thickness along at least a portion of their length relative to other comb fingers.

Claims

1. A comb drive device, comprising:

a first number of comb fingers each having a top surface, a bottom surface, and a thickness defined by the distance between the top and bottom surfaces;

a second number of comb fingers each having a top surface, a bottom surface, and a thickness defined by the distance between the top and bottom surfaces, said second number of comb fingers being spaced apart from and interdigitated with said first number of comb fingers;

wherein the thickness of at least a portion of the second number of comb fingers is less than the thickness of at least a portion of the first number of comb fingers; and

wherein the second number of comb fingers each have a first region with a first thickness that transitions to a second region with a second thickness that is less than the first thickness.

2. The comb drive device of claim 1, wherein said first number of comb fingers comprises one or more stationary comb fingers.

3. The comb drive device of claim 1, wherein said second number of comb fingers comprises one or more moving comb fingers.

4. The comb drive device of claim 3, wherein the moving comb fingers are configured to move in a substantially horizontal direction during actuation.

5. The comb drive device of claim 1, wherein each of the second number of comb fingers defines a length, and the first region with the first thickness transitions to the second region with the second thickness at an abrupt transition point along the length.

6. The comb drive device of claim 1, wherein the first region with the first thickness transitions with a taper to the second region with the second thickness.

7. The comb drive device of claim 1, wherein the top and bottom surfaces of the second number of comb fingers are configured to remain between horizontal planes defined by the top and bottom surfaces of the first number of comb fingers during actuation.

8. The comb drive device of claim 1, further comprising an overlapping region between each adjacent interdigitated comb finger.

9. The comb drive device of claim 8, wherein the thickness of each of the second number of comb fingers is less than the thickness of the first number of comb fingers at said overlapping region.

10. The comb drive device of claim 1, wherein said first number of comb fingers are coupled to a comb drive member.

11. The comb drive device of claim 10, wherein said second number of comb fingers are coupled to a proof mass.

12. The comb drive device of claim 1, wherein said first number of comb fingers are coupled to a proof mass.

13. The comb drive device of claim 12, wherein said second number of comb fingers are coupled to a comb drive member.

14. The comb drive device of claim 11, further comprising an underlying support substrate adapted to freely support the proof mass thereabove.

15. The comb drive device of claim 11, further comprising a suspension member operatively coupled to the proof mass.

16. The comb drive device of claim 1, wherein said comb drive device is an electrostatic comb drive device.

17. The comb drive device of claim 1, wherein said comb drive device is a gyroscope.

18. The comb drive device of claim 1, wherein said comb drive device is an accelerometer.

19. The comb drive device of claim 1, wherein said comb drive device is a Steered Agile Beam module.

20. A comb drive device, comprising:

a comb drive member including a first plurality of comb fingers each having a top surface, a bottom surface, and a thickness defined between the top and bottom surfaces;

a proof mass including a second plurality of comb fingers each having a top surface, a bottom surface, and a thickness defined between the top and bottom surfaces, said second plurality of comb fingers being spaced apart from and interdigitated with the first plurality of comb fingers to form an overlapping region between each adjacent interdigitated comb finger;

wherein the thickness of at least a portion of the second plurality of comb fingers is less than the thickness of the first plurality of comb fingers; and

wherein the second plurality of comb fingers each have a first region with a first thickness that transitions to a second region with a second thickness that is less than the first thickness.

21. The comb drive device of claim 20, wherein said first plurality of comb fingers are stationary comb fingers.

22. The comb drive device of claim 20, wherein said second plurality of comb fingers are moving comb fingers.

23. The comb drive device of claim 22, wherein the moving comb fingers are configured to move in a substantially horizontal direction during actuation.

24. The comb drive device of claim 20, wherein each of the second plurality of comb fingers defines a length, and the first region with the first thickness transitions to the second region with the second thickness at an abrupt transition point along the length.

25. The comb drive device of claim 20, wherein the first region with the first thickness transitions with a taper to the second region with the second thickness.

26. The comb drive device of claim 20, wherein the top and bottom surfaces of the second plurality of comb fingers are configured to remain within horizontal planes defined by the top and bottom surfaces of the first plurality of comb fingers during actuation.

27. The comb drive device of claim 20, wherein the thickness of each of the second plurality of comb fingers is less than the thickness of the first plurality of comb fingers at said overlapping region.

28. The comb drive device of claim 20, further comprising an underlying support substrate adapted to freely support the proof mass thereabove.

29. The comb drive device of claim 20, further comprising a suspension member operatively coupled to the proof mass.

30. The comb drive device of claim 20, wherein said comb drive device is an electrostatic comb drive device.

31. The comb drive device of claim 20, wherein said comb drive device is a gyroscope.

32. The comb drive device of claim 20, wherein said comb drive device is an accelerometer.

33. The comb drive device of claim 20, wherein said comb drive device is a Steered Agile Beam module.

34. A comb drive device, comprising:

a plurality of stationary comb fingers each having a top surface, a bottom surface, and a thickness defined between the top and bottom surfaces;

a plurality of moving comb fingers each having a top surface, a bottom surface, and a thickness defined between the top and bottom surfaces, said plurality of moving comb fingers being spaced apart from and interdigitated with said plurality of stationary comb fingers;

wherein the thickness of at least a portion of said plurality of moving comb fingers is less than the thickness of said plurality of stationary comb fingers; and

wherein the moving comb fingers each have a first region with a first thickness that transitions to a second region with a second thickness that is less than the first thickness.

35. A comb drive device, comprising:

a stationary comb drive member including a first plurality of comb fingers each having a top surface, a bottom surface, and a thickness defined between the top and bottom surfaces;

a moving proof mass including a second plurality of comb fingers each having a top surface, a bottom surface, and a thickness defined between the top and bottom surfaces, said second plurality of comb fingers being spaced apart from and interdigitated with the first plurality of comb fingers to form an overlapping region between each adjacent interdigitated comb finger;

wherein the thickness of at least a portion of the second plurality of comb fingers is less than the thickness of the first plurality of comb fingers at the overlapping region; and

wherein the second plurality of comb fingers each have a first region with a first thickness that transitions to a second region with a second thickness that is less than the first thickness.

36. A comb drive device, comprising:

a plurality of stationary comb fingers each having a top surface, a bottom surface, and a thickness defined between the top and bottom surfaces;

a plurality of moving comb fingers each having a top surface, a bottom surface, and a thickness defined between the top and bottom surfaces, said plurality of moving comb fingers being spaced apart from and interdigitated with said plurality of stationary comb fingers;

wherein the thickness of at least a portion of said plurality of stationary comb fingers is less than the thickness of said plurality of moving comb fingers; and

wherein the stationary comb fingers each have a first region with a first thickness that transitions to a second region with a second thickness that is less than the first thickness.

37. A comb drive device, comprising:

a plurality of stationary comb fingers each having a top surface, a bottom surface, and a thickness defined between the top and bottom surfaces;

a plurality of moving comb fingers each having a top surface, a bottom surface, and a thickness defined between the top and bottom surfaces, said plurality of moving comb fingers being spaced apart from and interdigitated with said plurality of stationary comb fingers;

wherein each of said plurality of moving comb fingers defines a length, and wherein the thickness of each of said plurality of moving comb fingers is reduced along a portion of the length such that the moving comb fingers each have a first region with a first thickness that transitions to a second region with a second thickness that is less than the first thickness.