Pressure sensor having thin pressure sensing membrane
First Claim
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1. A pressure sensor comprising:
- a chamber partially defined by a flexible membrane which is less than three microns thick and is exposed to fluid pressure, the flexible membrane being configured to deflect from a reference position due to changes in said fluid pressure; and
associated circuitry for converting the deflection of the flexible membrane into an output signal indicative of the fluid pressure,wherein the flexible membrane is a laminate having at least two layers of different metal ceramics.
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Abstract
A pressure sensor is provided having a chamber partially defined by a flexible membrane which is less than three microns thick, exposed to fluid pressure and is configured to deflect from a reference position due to changes in the fluid pressure, and associated circuitry for converting the deflection of the flexible membrane into an output signal indicative of the fluid pressure.
23 Citations
18 Claims
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1. A pressure sensor comprising:
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a chamber partially defined by a flexible membrane which is less than three microns thick and is exposed to fluid pressure, the flexible membrane being configured to deflect from a reference position due to changes in said fluid pressure; and associated circuitry for converting the deflection of the flexible membrane into an output signal indicative of the fluid pressure, wherein the flexible membrane is a laminate having at least two layers of different metal ceramics. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification