Rear projection TV with improved micromirror array

• US 7,262,817 B2
• Filed: 08/05/2004
• Issued: 08/28/2007
• Est. Priority Date: 08/30/2000
• Status: Expired due to Term

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Huibers, Andrew G.
• Primary Examiner(s): LEE, MICHAEL
• Application Number:
  US10/914,038
• Publication Number:
  US 20050007557A1
• Time in Patent Office: 1,118 Days
• Field of Search: 348/771, 348/770, 348/755, 348/756, 348/742, 348/743, 359290-295
• US Class Current: 348/771
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G03B 21/28 Reflectors in projection beam in illumination beam G03B21/2066
• CPC Class Codes: Y10S 359/904 Micromirror

Abstract

In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention, micromirrors are provided which are not rectangular. Also, in order to minimize the cost of the illumination optics and the size of the display unit of the present invention, the light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. The incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in light ‘leakage’ into the ‘on’ state even if the micromirror is in the ‘off’ state. This light diffraction decreases the contrast ratio of the micromirror. The micromirrors of the present invention result in an improved contrast ratio, and the arrangement of the light source to micromirror array in the present invention results in a more compact system. Another feature of the invention is the ability of the micromirrors to pivot in opposite direction to on and off positions (the on position directing light to collection optics), where the movement to the on position is greater than movement to the off position. A further feature of the invention is a package for the micromirror array, the package having a window that is not parallel to the substrate upon which the micromirrors are formed. One example of the invention includes all the above features.

Claims

1. A rear projection TV, comprising:

an arc lamp for providing light to a light modulator that comprises a rectangular array of micromirrors;

the micromirrors of the array being tiled together, each micromirror having four substantially straight sides and wherein the micromirrors are substantially square;

a screen on which an image to be viewed is displayed;

wherein a light beam from the arc lamp is incident on the array of micromirrors during operation and directed as a rectangular image to the screen;

wherein the micromirrors of the array are capable of movement between an OFF state and an ON state by pulse width modulation to form an image on the screen;

wherein both the ON and OFF states of the micromirrors are in a position other than a flat non-deflected state;

wherein the ON position of the micromirrors is from 10 to 15 degrees from a non-deflected position;

wherein none of the four substantially straight sides of the micromirrors is parallel to any sides of the array;

wherein the viewed image has four sides; and

wherein the micromirror array has a substantially rectangular shape;

one or more lenses for directing and focusing a beam of light onto the micromirrors;

wherein the light beam is incident at a substantially 90 degree angle to at least one side of the rectangular array;

wherein the light beam incident on the micromirrors is from 10 to 50 degrees from a line normal to the plane of the micromirrors when not deflected;

wherein the micromirrors comprise micromirror plates that are connected via hinges to a substrate;

wherein the substrate, micromirror plates and hinges are disposed in different planes;

wherein the hinge has a width of from 0.1 to 10 um;

wherein the micromirrors are positioned on a lattice aligned at an angle to the sides of the rectangular array;

wherein the micromirrors are disposed on a semiconductor substrate which is a silicon substrate;

wherein the micromirrors are connected via underlying hinges to the silicon substrate by an electrically conductive material;

wherein the micromirrors are formed on the silicon substrate with circuitry and electrodes adjacent to the micromirrors;

wherein at least two electrodes are disposed adjacent each micromirror,

wherein one of the two electrodes is for electrostatically addressing the adjacent micromirror to an OFF position, and another of the two electrodes is for electrostatically addressing the adjacent micromirror to an ON position;

wherein the light is directed at an angle substantially perpendicular to the switching axis of the micromirrors;

wherein the micromirrors in the array have switching axes substantially parallel to at least one side of the rectangular array;

wherein the micromirrors in the array have switching axes at an angle of from 35 to 60 degrees to one or more sides of the micromirrors;

where the micromirrors have substantially no micromirror sides perpendicular to the light beam from the light source;

wherein the micromirror comprises a reflective material that comprises aluminum;

wherein the micromirror array is disposed in a package having a light transmissive window, and wherein the light transmissive window is glass or quartz;

wherein the package is hermetic;

wherein the micromirror array comprises circuitry and electrodes on a semiconductor substrate, and bond wires for electrically connecting the semiconductor substrate to the package;

wherein a getter is provided within the package; and

and wherein the projection TV further comprising optics including a plurality of lenses disposed so as to project light reflected from the micromirrors onto the screen.

2. The rear projection TV of claim 1, wherein the micromirrors are capable of rotating at least +12 degrees to the ON position.

3. The rear projection TV of claim 1, wherein from 64,000 to 2,000,000 micromirrors are provided in the array.

4. The rear projection TV of claim 1, having HDTV format.

5. The rear projection TV of claim 1, having QXGA or UXGA format.

6. The rear projection TV of claim 1, wherein the micromirror has a resolution of 1,920,000 or higher.

7. The rear projection TV of claim 4, wherein a color filter is provided for forming a series of sequential colors onto the micromirror array.

8. The rear projection TV of claim 7, wherein a mask is provided as part of the package.

9. The rear projection TV of claim 7, further comprising a total internal reflection (TIR) prism.

10. The rear projection TV of claim 1, wherein a horizontal row of micromirrors extends corner to corner in the row parallel to a side of the micromirror array, and wherein vertical lines corresponding to addressing columns extend from each micromirror in the row and connect to every other row of micromirrors.

11. The rear projection TV of claim 1, wherein a vertical column of micromirrors extends corner to corner in the column parallel to a side of the micromirror array, and wherein horizontal lines corresponding to addressing rows extend from each micromirror in the column and connect to every other column of micromirrors.

12. The rear projection TV of claim 1, wherein the rectangular array has two longer sides and two shorter sides, and wherein the light beam is incident at a substantially 90 degree angle to a shorter side of the rectangular array.

13. The rear projection TV of claim 1, wherein the thickness of the micromirror plate is from 200 to 7300 angstroms.

14. The rear projection TV of claim 1, wherein the micromirror array has an area of from 1 cm² to 1 in².

15. The rear projection TV of claim 1, wherein a source of suction reducing agent is provided within the package.