Tunable gas distribution plate assembly

• US 7,270,713 B2
• Filed: 01/07/2003
• Issued: 09/18/2007
• Est. Priority Date: 01/07/2003
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: White, John M., Blonigan, Wendell T., Bagley, William A.
• Primary Examiner(s): Zervigon; Rudy
• Application Number:
  US10/337,483
• Publication Number:
  US 20040129211A1
• Time in Patent Office: 1,715 Days
• Field of Search: 118/715, 118/728, 118/50, 156/345.29, 15634533- 36, 156/345.26, 156/345.51
• US Class Current: 118/715
• CPC Class Codes: C23C 16/455 characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/45591 Fixed means, e.g. wings, baffles
• CPC Class Codes: C23C 16/5096 Flat-bed apparatus
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32449 Gas control, e.g. control of the gas flow

Abstract

A gas distribution plate assembly and a method for distributing gas in a processing chamber are provided. In one embodiment, a gas distribution plate assembly includes a tuning plate coupled to a diffuser plate. The tuning plate has a plurality of orifice holes formed therethrough that align with a plurality of apertures formed through the diffuser plate, where the apertures each have a greater sectional area than the holes in the tuning plate. Each aperture is aligned with a respective hole to define gas passages through the gas distribution plate assembly. The tuning plate may be interchanged with a replacement tuning plate to change the gas flow characteristics through the gas distribution plate assembly.

Claims

1. A gas distribution plate assembly for a processing chamber, comprising:

a tuning plate having a plurality of orifice holes formed therethrough;

a diffuser plate disposed against a lower surface of the tuning plate, the diffuser plate having a plurality of apertures formed therethrough, each aperture aligned with a respective orifice hole in the tuning plate and defining a gas passage through the gas distribution plate assembly, wherein each aperture has a sectional area greater than the respective orifice hole in the tuning plate; and

an expansion bracket extending above an upper surface of the tuning plate and configured to position the tuning plate in a vertically spaced-apart relation to a lid of the processing chamber, the expansion bracket further having an inwardly extending flange, wherein the flange of the expansion bracket is adapted to support the tuning and diffuser plates.

2. The gas distribution plate assembly of claim 1, wherein the tuning plate is thinner than the diffuser plate.

3. The gas distribution plate assembly of claim 1, wherein the tuning plate and the diffuser plate are comprised of aluminum.

4. The gas distribution plate assembly of claim 1, wherein a surface of the tuning plate facing away from the diffuser plate is non-anodized aluminum and a surface of the diffuser plate facing away from the tuning plate is anodized aluminum.

5. The gas distribution plate assembly of claim 1, wherein the tuning plate is coupled to the diffuser plate by at least one fastener.

6. The gas distribution plate assembly of claim 5 wherein the fastener further comprises:

an aluminum shank that has a threaded portion; and

an aluminum nut for engaging the threaded portion of the shank.

7. The gas distribution plate assembly of claim 6, wherein the aluminum shank further comprises a necked region adapted to shear when subjected to a stress exceeding a predetermined amount.

8. The gas distribution plate assembly of claim 1, wherein at least one of the orifice holes has a bore coupled to a flared portion that exits a side of the tuning plate disposed against the diffuser plate.

9. The gas distribution plate assembly of claim 1, wherein at least one of the apertures has a bore coupled to a flared portion that exits a side of the diffuser plate facing away from the tuning plate.

10. The gas distribution plate assembly of claim 1, wherein at least one orifice hole has a radius or chamfer edge disposed against the diffuser plate and at least one aperture has a radius or chamfer edge disposed against the tuning plate.

11. The gas distribution plate assembly of claim 1 further comprising:

a backing plate coupled to the tuning plate opposite a surface of the tuning plate in contact with the diffuser plate.

12. The gas distribution plate assembly of claim 11, wherein the expansion bracket circumscribes the backing plate and coupled thereto in a manner that accommodates differences in thermal expansion.

13. The gas distribution plate assembly of claim 12, wherein the expansion bracket further comprises:

a flange having a plurality of pins extending therefrom and adapted to mate with a slot formed in the backing plate.

14. The gas distribution plate assembly of claim 1, wherein the diffuser plate is polygonal.

15. The gas distribution plate assembly of claim 1, wherein the diffuser plate is a disk.

16. The gas distribution plate assembly of claim 1, wherein at least one of the orifice holes formed through the tuning plate has a flow restricting attribute different than another one of the orifice holes.

17. The gas distribution plate assembly of claim 1, wherein the plurality of orifice holes defines a first set of orifice holes and at least a second set of orifice holes disposed inward of the first set of orifice holes and having a flow restricting attribute different than the first set of orifice holes.

18. The gas distribution plate assembly of claim 16, wherein the flow restricting attribute comprises one or more orifice hole attributes selected from the group consisting of sectional area, hole section profile, bore smoothness, bore depth, length of concentric flared sections of the orifice hole, angle of concentric flared sections of the orifice hole, and amount of orifice hole chamfer.

19. A gas distribution plate assembly, comprising:

a first plate having a first surface and a second surface, the first surface free of anodization;

a second plate coupled to the first plate, the second plate having a first side disposed against the second side of the first plate and a second side that is anodized, wherein the second plate is thicker than the first plate;

a plurality of gas passages each having a first portion formed through the first plate and a second portion formed through the second plate, wherein the first portion of the gas passage has a sectional area less than the second portion thereof and an expansion bracket extending above an upper surface of the first plate and configured to position the first plate in a vertically spaced-apart relation to a lid of a processing chamber, the expansion bracket further having an inwardly extending flange, wherein the flange of the expansion bracket is adapted to support the tuning and diffuser plates.

20. The gas distribution plate assembly of claim 19 further comprising:

an aluminum fastener disposed through the first plate and the second plate, the fastener having a necked region adapted to shear when subjected to a stress exceeding a predetermined amount; and

an aluminum nut mated to the fastener.

21. The gas distribution plate assembly of claim 20, wherein the second plate further comprises a slot adapted to receive the nut.

22. The gas distribution plate assembly of claim 19, wherein the plurality of gas passages includes at least a first bore formed through the first plate and having a flared portion that exits a side of the first plate disposed against the second plate.

23. The gas distribution plate assembly of claim 19, wherein the plurality of gas passages further comprises:

at least a first bore formed through the first plate and having a flared portion that exits a side of the first plate disposed against the second plate; and

at least a second bore formed through the second plate and disposed inward of the first bore, the second bore having a flow restricting attribute different than the first bore.

25. The gas distribution plate assembly of claim 19 further comprising:

an aluminum fastener disposed through the first plate and the second plate, the fastener having a necked region adapted to shear when subjected to a stress exceeding a predetermined amount; and

an aluminum nut mated to the fastener.

26. The gas distribution plate assembly of claim 25, wherein the second plate further comprises a slot adapted to receive the nut.

24. A gas distribution plate assembly for a processing chamber, comprising:

a first plate having a plurality of holes formed therethrough, at least one anodized surface, and at least one non-anodized surface; and

, a second plate coupled to the first plate, the second plate having holes formed therethrough and aligned with each of the holes of the first plate to define gas passages through the plates, the second plate also having at least one anodized surface, and at least one non-anodized surface, an expansion bracket extending above an upper surface of the first plate wherein;

the anodized surface of the first plate is disposed against the non-anodized surface of the second plate; and

each hole of the second plate has a sectional area greater than the respectively aligned hole of the first plate, wherein the second plate is thicker than the first plate, the expansion bracket further having an inwardly extending flange, wherein the flange of the expansion bracket is adapted to support the first and second plates.

27. The gas distribution plate assembly of claim 24, wherein the plurality of gas passages includes at least a first bore formed through the first plate and having a flared portion that exits a side of the first plate disposed against the second plate.

28. The gas distribution plate assembly of claim 24, wherein the plurality of gas passages further comprises:

at least a first bore formed through the first plate and having a flared portion that exits a side of the first plate disposed against the second plate; and

at least a second bore formed through the second plate and disposed inward of the first bore, the second bore having a flow restricting attribute different than the first bore.

29. A gas distribution plate assembly for a processing chamber, comprising:

a tuning plate having a plurality of orifice holes formed therethrough; and

a diffuser plate disposed against the tuning plate having a plurality of apertures formed therethrough, an expansion bracket extending above an upper surface of the tuning plate, wherein each aperture is aligned with a respective orifice hole in the tuning plate and defining a gas passage through the gas distribution plate assembly, wherein each aperture has a sectional area greater than the respective orifice hole in the tuning plate, and wherein the tuning plate is thinner than the diffuser plate, the expansion bracket further having an inwardly extending flange, wherein the flange of the expansion bracket is adapted to support the tuning and diffuser plates.

30. A gas distribution plate assembly for a processing chamber, comprising:

a plate assembly configured for mounting in a space-apart relation to a lid of the processing chamber, a top surface of the plate assembly adapted to bound a portion of a plenum defined between the plate assembly and the lid, the plate assembly further comprising;

a tuning plate forming the top surface of the plate assembly;

a diffuser plate disposed against the tuning plate, the diffuser plate thicker than the tuning plate;

an expansion bracket extending above an upper surface of the tuning plate and a plurality of gas passages, each gas passage extending axially from a top of the tuning plate to a bottom of the diffuser plate and isolated from the other gas passages, wherein a portion of the gas passages formed in the tuning plate have a smaller diameter than a portion of the gas passages formed in the diffuser plate, the expansion bracket further having an inwardly extending flange, wherein the flange of the expansion bracket is adapted to support the tuning and diffuser plates.