Carousel device, system and method for electronic circuit tester

• US 7,274,202 B2
• Filed: 10/07/2005
• Issued: 09/25/2007
• Est. Priority Date: 10/07/2005
• Status: Active Grant

• Current Assignee: Advantest Corporation
• Original Assignee: Verigy Limited (Advantest Corporation)
• Inventors: Kolman, Robert S.
• Primary Examiner(s): Nguyen; Ha Tran
• Assistant Examiner(s): Vazquez; Arleen M.
• Application Number:
  US11/246,487
• Publication Number:
  US 20070080700A1
• Time in Patent Office: 718 Days
• Field of Search: 324/158.1, 324/765
• US Class Current: 324/756.01
• CPC Class Codes: G01R 31/2887 involving moving the probe head or the IC under test; docking stations moving single probes G01R1/06705; moving individual probes in multiple probes G01R1/07392
• CPC Class Codes: G01R 31/2893 Handling, conveying or loading, e.g. belts, boats, vacuum fingers G01R31/2867 takes precedence; handling semiconductor devices or wafers during manufacture or treatment H01L21/67

Abstract

A rotatable or translatable carousel configured to facilitate electrical or electronic testing of Devices Under Test (DUTs) in combination with an insertion handler and a test head is disclosed. The carousel is configured to be placed on a test head of a tester in a first position with a first Device under Test (DUT) (such as a system-on-a-chip (SOC) integrated circuit (IC)) loaded in a first test position of the carousel. A first electrical or electronic test is performed on the first DUT at the first position, after which the carousel is advanced to a second position and a second DUT is loaded in a second test position of the carousel. While the carousel is positioned at the second position, the first test is performed on the second DUT and a second electrical or electronic test is performed on the first DUT. In one embodiment, the process of testing DUTs, inserting DUTs and rotating or translating the carousel in respect of the test head is repeated until all test positions in the carousel have been filled and all desired electrical or electrical tests have been performed on the first DUT. At this point the process of removing fully-tested DUTs from the carousel is optimally undertaken.

Claims

1. Apparatus to facilitate electrical or electronic testing of Devices Under Test (DUTs), comprising:

a rotatable or translatable carousel having,

an upper surface configured to be accessed by a insertion handler;

a plurality of test stations disposed in, and interior to the periphery of, the upper surface of the carousel, wherein each of the test stations is configured to accept individual ones of a plurality of DUTs that are inserted in and removed from the test stations by the insertion handler;

a lower surface configured for releasable attachment to a test head, in a plurality of carousel positions, as the carousel is rotated or translated;

means disposed on the lower surface of the carousel for, as the carousel is rotated or translated to different ones of the plurality of carousel positions, electrically connecting i) different ones of the test stations to ii) different test positions on the test head.

2. The apparatus of claim 1, further comprising:

the test head, the test head having an upper surface with a plurality of different test positions, wherein each test position has electrical contacts or connections disposed thereon or therein, wherein the electrical contacts or connections are configured to make electrical contact with the means for electrically connecting i) different ones of the test stations to ii) different test positions on the test head, and wherein the test head is positioned adjacent the lower surface of the carousel; and

the insertion handler, positioned adjacent the upper surface of the carousel.

3. The apparatus of claim 2, wherein the insertion handler is a first insertion handler, and wherein the apparatus further comprises a second insertion handler, the first handler being configured for inserting DUTs in the carousel, and the second insertion handler being configured for removing DUTs from the carousel.

4. The apparatus of claim 1, wherein the carousel is configured for rotation through a series of discrete predetermined angular displacements, each such angular displacement approximating (360 degrees)/(number of test stations disposed in the upper surface of the carousel).

5. The apparatus of claim 1, wherein the carousel is one of circular, multi-sided, square, rectangular, pentagonal, hexagonal and octagonal in shape.

6. The apparatus of claim 1, wherein the DUTs the carousel is configured to accept are integrated circuits (ICs).

7. The apparatus of claim 6, wherein the ICs the carousel is configured to accept are system-on-a-chip (SOC) integrated circuits.