Interdigitated, full wheatstone bridge flow sensor transducer

• US 7,278,309 B2
• Filed: 03/01/2006
• Issued: 10/09/2007
• Est. Priority Date: 03/01/2006
• Status: Expired due to Fees

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Speldrich, Jamie W., Morales, Gilberto, Beck, Scott Edward, Dmytriw, Anthony M., Kilian, Wayne T., Gehman, Richard William
• Primary Examiner(s): PATEL, HARSHAD R
• Application Number:
  US11/366,653
• Publication Number:
  US 20070204688A1
• Time in Patent Office: 587 Days
• Field of Search: None
• US Class Current: 73/204.26
• CPC Class Codes: G01F 1/6845 Micromachined devices
• CPC Class Codes: G01F 1/688 using a particular type of heating, cooling or sensing element G01F1/6847 takes precedence

Abstract

A sensor apparatus includes a heating element comprising an upstream side and a downstream side. A first heat sensing set is generally configured adjacent to the upstream side of the heating element and comprises a first sensing element and a second sensing element, the first and second sensing elements configured in a serpentine, interdigitated pattern. A second heat sensing set can be configured adjacent to the downstream side of the heating element and comprises a third sensing element and a fourth sensing element, the third and fourth sensing elements configured in a serpentine, interdigitated pattern.

Claims

1. A sensor apparatus, comprising:

a heating element comprising an upstream side and a downstream side;

a first heat sensing set configured adjacent to the upstream side of the heating element and comprising a first sensing element and a second sensing element, the first and second sensing elements configured in a serpentine, interdigitated pattern;

a second heat sensing set configured adjacent to the downstream side of the heating element and comprising a third sensing element and a fourth sensing element, the third and fourth sensing elements configured in a serpentine, interdigitated pattern that provides for a consistent measurement across a single sensing element and wherein said serpentine, interdigitated pattern provides for an interdigitated configuration that increases the consistency of measurement between said first, second, third and fourth sensing elements; and

a plurality of thermal isolation barriers configured adjacent to the first and second heat sensing sets, wherein the first sensing element is coupled to the third sensing element to form one half of a Wheatstone bridge and wherein the second sensing element is coupled to the fourth sensing element to form a second half of the Wheatstone bridge in order to thereby permit said sensor apparatus to quantify flow rate data with an enhanced signal-to-noise ratio, which in turn provides for an improvement in the accuracy and resolution of quantifying mass flow rates via said sensor apparatus.

2. The apparatus of claim 1 wherein the heating element comprises a heating resistor.

3. The apparatus of claim 2, wherein the heating resistor is configured in a serpentine pattern.

4. The apparatus of claim 1, wherein at least one of the first sensing element, second sensing element, third sensing element, and fourth sensing element is a resistive temperature detector (RTD).

5. The apparatus of claim 4, further comprising a thermal isolation barrier interposed between the upstream side and the downstream side of the heating element.

6. The apparatus of claim 4, wherein the sensor apparatus is coupled to a substrate and further comprising a thermal isolation barrier interposed between the sensor apparatus and the substrate.

7. The apparatus of claim 1, further comprising a first voltage source coupled to the first heat sensing set and a second voltage source coupled to the second heat sensing set.

8. The apparatus of claim 1, further comprising a voltage source coupled to the first heat sensing set and the second heat sensing set.

9. A system for sensing mass flow, comprising:

a base configured to couple to a microchip;

a heating element coupled to the base and configured in a serpentine pattern with an upstream side and a downstream side;

a first heat sensing element coupled to the base and configured in a serpentine pattern adjacent to the upstream side of the heating element and further configured as a first leg of a Wheatstone bridge;

a second heat sensing element coupled to the base and configured in a serpentine pattern interdigitated with the first heat sensing element and further configured as a second leg of a Wheatstone bridge;

a third heat sensing element coupled to the base and configured in a serpentine pattern adjacent to the downstream side of the heating element and further configured as a third leg of a Wheatstone bridge; and

a fourth heat sensing element coupled to the base and configured in a serpentine pattern interdigitated with the third heat sensing element and further configured as a fourth leg of a Wheatstone bridge in order to thereby permit said system to quantify flow rate data with an enhanced signal-to-noise ratio, which in turn provides for an improvement in the accuracy and resolution of quantifying mass flow rates via said system, wherein said serpentine pattern provides for a consistent measurement across a single sensing element and increases the consistency of measurement between said first, second, third and fourth sensing elements.

10. The system of claim 9, further comprising:

a first thermal isolation barrier interposed between the first and second heat sensing elements and the base; and

a second thermal isolation barrier interposed between the third and fourth heat sensing elements and the base.

11. The system of claim 9, further comprising a first wire bonding pad coupled to the first and second sensing elements and configured to couple to a voltage source and a second wire bonding pad coupled to the third and fourth sensing elements and configured to couple to a voltage source.

12. The system of claim 9, wherein the heating element comprises a heating resistor.

13. The system of claim 9, wherein the first, second, third, and fourth heat sensing elements each comprise a resistive thermal detector (RTD).

14. A method for sensing mass flow, comprising:

providing a heating element configured in a serpentine pattern and comprising an upstream side and a downstream side;

providing a first heat sensing set adjacent to the upstream side of the heating element configured as a first one-half of a Wheatstone bridge and comprising a first heat sensing element and a second heat sensing element configured in a serpentine, interdigitated pattern;

providing a second heat sensing set adjacent to the downstream side of the heating element configured as a second one-half of a Wheatstone bridge and comprising a third heat sensing element and a fourth heat sensing element configured in a serpentine, interdigitated pattern that provides for a consistent measurement across a single sensing element and wherein said serpentine, interdigitated pattern provides for an interdigitated configuration that increases the consistency of measurement between said first, second, third and fourth sensing elements;

measuring by the first heat sensing set a first temperature;

measuring by the second heat sensing set a second temperature; and

determining a mass flow rate in response to the first and second temperatures in order to thereby quantify flow rate data with an enhanced signal-to-noise ratio, which in turn provides for an improvement in the accuracy and resolution of quantifying mass flow rates.

15. The method of claim 14, further comprising providing a plurality of thermal isolation barriers configured adjacent to the first and second heat sensing sets.

16. The method of claim 14, further comprising providing a thermal isolation barrier interposed between the upstream side and the downstream side of the heating element.

17. The method of claim 14 wherein the steps of measuring by the first sensing set and measuring by the second sensing set comprises detecting a voltage associated with an ambient temperature.

18. The method of claim 14, further comprising providing a first voltage source coupled to the first heat sensing set and a second voltage source coupled to the second heat sensing set.

19. The method of claim 14, wherein the step of determining a mass flow rate comprises comparing the first temperature and the second temperature.