Micro-electromechanical systems switch and method of fabricating the same
First Claim
1. A micro-electromechanical systems switch comprising:
- a substrate;
a signal line formed on the substrate and having a predetermined opening portion;
at least one supporting frame each formed on the substrate at both sides of the signal line;
a ground line formed on the substrate between the supporting frame and the signal line;
a moving plate fixed to the supporting frame at both sides thereof, the moving plate being movable upward and downward;
a switching unit positioned on the moving plate, the switching unit comprising contact means for connecting the opened signal line; and
a supporting layer for supporting the moving plate and the switching unit, wherein the supporting layer comprises a support protrusion portion depending from the moveable plate at a location central to the predetermined opening portion and configured to maintain a predetermined distance from the substrate, the support protrusion portion formed at a height to reach to the substrate when the contact means comes in contact with the signal line.
1 Assignment
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Accused Products
Abstract
Provided is a micro-electromechanical systems switch for controlling signal delivery in a high frequency band wireless communication and a radio frequency (RF) system and, comprising: a substrate; a signal line formed on the substrate and having a predetermined opening portion; at least one supporting frame each formed on the substrate at both sides of the signal line; a ground line formed on the substrate between the supporting frame and the signal line; a moving plate fixed to the supporting frame at both sides thereof, the moving plate being movable upward and downward; a switching unit positioned on the moving plate, the switching unit comprising contact means for connecting the opened signal line; and a supporting layer for supporting the moving plate and the switching unit, wherein the supporting layer comprises a support protrusion portion for maintaining a distance from the substrate.
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Citations
7 Claims
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1. A micro-electromechanical systems switch comprising:
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a substrate;
a signal line formed on the substrate and having a predetermined opening portion;at least one supporting frame each formed on the substrate at both sides of the signal line; a ground line formed on the substrate between the supporting frame and the signal line; a moving plate fixed to the supporting frame at both sides thereof, the moving plate being movable upward and downward; a switching unit positioned on the moving plate, the switching unit comprising contact means for connecting the opened signal line; and a supporting layer for supporting the moving plate and the switching unit, wherein the supporting layer comprises a support protrusion portion depending from the moveable plate at a location central to the predetermined opening portion and configured to maintain a predetermined distance from the substrate, the support protrusion portion formed at a height to reach to the substrate when the contact means comes in contact with the signal line. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification