Surface acoustic wave devices for high temperature applications

• US 7,285,894 B1
• Filed: 01/31/2005
• Issued: 10/23/2007
• Est. Priority Date: 02/13/2004
• Status: Active Grant

• Current Assignee: University of Maine System Board of Trustees
• Original Assignee: University of Maine System Board of Trustees
• Inventors: da Cunha, Mauricio Pereira
• Primary Examiner(s): BUDD, MARK OSBORNE
• Application Number:
  US11/046,712
• Time in Patent Office: 995 Days
• Field of Search: 310/313.A, 310/313.B, 310/313.D, 310/313.R, 310/363, 310/364
• US Class Current: 310/313.00A
• CPC Class Codes: H03H 9/02543 Characteristics of substrate, e.g. cutting angles
• CPC Class Codes: H03H 9/0259 of langasite substrates
• CPC Class Codes: H03H 9/02598 of langatate substrates
• CPC Class Codes: H03H 9/02606 of langanite substrates
• CPC Class Codes: H03H 9/02629 of the edges
• CPC Class Codes: H03H 9/02637 Details concerning reflective or coupling arrays
• CPC Class Codes: H03H 9/02929 of ageing changes of characteristics, e.g. electro-acousto-migration
• CPC Class Codes: H03H 9/14547 Fan shaped; Tilted; Shifted; Slanted; Tapered; Arched; Stepped finger transducers
• CPC Class Codes: H03H 9/14594 Plan-rotated or plan-tilted transducers

Abstract

A Surface Acoustic Wave device including a resonator or a delay line formed from an electrically conductive material having a high melting temperature disposed upon the surface of a substrate formed from one of the LGX family of crystals or gallium phosphate. The Surface Acoustic Wave Device is operative as a sensor at high temperatures.

Claims

1. A Surface Acoustic Wave (SAW) device comprising:

a substrate formed from a material selected from the group of the LGX family of crystals and gallium phosphate, the substrate having a SAW propagation surface;

a first interdigital transducer formed upon said substrate propagation surface with electrodes formed from an electrically conductive material having a high melting temperature, said first transducer operative upon excitation by an oscillator to launch surface acoustic waves across said propagation surface;

a second interdigital transducer formed upon said substrate propagation surface spaced apart from said first interdigital transducer, said second transducer having electrodes formed upon said propagation surface from an electrically conductive material having a high melting temperature, said second transducer operative to detect said surface acoustic waves; and

an adhesive layer formed from a zirconium material that does not migrate into said interdigital transducers, said adhesive layer disposed between said substrate and said first and second interdigital transducers.

2. The device according to claim 1 further including two sets of reflecting electrodes formed upon said adhesive layer, each set of reflecting electrodes being between each of said interdigital transducers and the end of said substrate adjacent to said interdigital transducer, said reflecting electrodes formed from an electrically conductive material having a high melting temperature.

3. The device according to claim 2 wherein said first and second interdigital transducers and said reflecting electrodes are formed from one of the group of platinum and palladium.

4. The device according to claim 3 further including shorting strips formed across the ends of said reflecting electrodes.

5. The device according to claim 4 wherein said propagation surface has Euler angle ranges that include an Euler angle φ

being within a range from −

20°

to +20°

;

an Euler angle θ

, within a range from 0°

to +180°

; and

an Euler angle ψ

, within a range from 0°

to +90°

.

6. The device according to claim 5 wherein said propagation surface has Euler angles of (0°

, 138.5°

, 26.6°

).

7. The device according to claim 5 wherein each of said interdigital transducers includes a plurality of intertwined fingers with said fingers defining an interdigital structural geometry, said interdigital structural geometry being related to the operating frequency of the device.

8. The device according to claim 7 wherein each of said reflectors includes a plurality of parallel strips extending transversely across said substrate with said reflector strips defining a reflector structural geometry that is related to the operating frequency of the device.

9. The device according to claim 3 wherein the device is included in a high temperature gas sensor whereby the presence of gases having temperatures in excess of several hundred degrees Centigrade are detected.

10. The device according to claim 9 further including a coating of a chemically sensitive material deposited upon said surface of said substrate whereby the presence of a high temperature gas is detected.

11. The device according to claim 3 wherein said first interdigital transducer is connected to an oscillator and further wherein the centers of the first and second first interdigital transducers are separated by a distance equivalent to a plurality of wavelengths of the signal generated by said oscillator.

12. The device according to claim 11 wherein the centers of the first and second first interdigital transducers are separated by a distance within a range of 5 to 3,000 wavelengths.

13. The device according to claim 11 wherein the centers of the first and second first interdigital transducers are separated by a distance within a range of one mm to five cm.

14. A Surface Acoustic Wave (SAW) device comprising:

a substrate formed from a material selected from one of the group of the LGX family of crystals and gallium phosphate, the substrate having a SAW propagation surface;

a single interdigital transducer formed upon said substrate propagation surface with electrodes formed from an electrically conductive material having a high melting temperature, said first transducer operative upon excitation by an oscillator to launch surface acoustic waves across said propagation surface;

at least one set of reflecting electrodes formed upon said substrate propagation surface between said interdigital transducer and an end of said substrate, said reflecting electrodes formed from an electrically conductive material having a high melting temperature, said reflecting electrodes co-operating with said interdigital transducer to form a resonator; and

an adhesive layer formed from a zirconium material that does not migrate into said interdigital transducer and said at least one set of reflecting electrodes, said adhesive layer disposed between said substrate and said interdigital transducer and between said substrate and said at least one set of reflecting electrodes.

15. The device according to claim 14 wherein said interdigital transducer and said reflecting electrodes are formed from one of the group of platinum and palladium.

16. The device according to claim 15 wherein the device is included in a high temperature sensor.

17. The device according to claim 16 further including a coating of a chemically sensitive material deposited upon said propagation surface of said substrate whereby the presence of a high temperature gas is detected.