Method and apparatus for electronic cancellation of quadrature error

• US 7,290,435 B2
• Filed: 02/06/2006
• Issued: 11/06/2007
• Est. Priority Date: 02/06/2006
• Status: Active Grant

• Current Assignee: Invensense Incorporated (TDK Corporation)
• Original Assignee: Invensense Incorporated (TDK Corporation)
• Inventors: Seeger, Joseph, Tormey, Milton T., Rastegar, Ali
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US11/347,978
• Publication Number:
  US 20070180908A1
• Time in Patent Office: 638 Days
• Field of Search: 73 137- 138, 735/040.4, 735/040.2, 735/041.2, 735/041.3, 735/041.4, 735/041.5, 735/041.6
• US Class Current: 73/1.37
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: G01C 19/5726 Signal processing

Abstract

Methods and apparatus are provided for detecting a rate of rotation. In one implementation, the method includes vibrating a proof mass at a pre-determined frequency in a drive axis. In response to a rotation, sensing an amount of deflection of the proof mass in an axis orthogonal to the drive axis, in which the amount of deflection is sensed as a change in charge. The method further includes generating a quadrature error cancellation signal to substantially cancel quadrature error from the sensed change in charge.

Claims

1. A method for detecting a rate of rotation, the method comprising:

vibrating a proof mass at a pre-determined frequency in a drive axis;

in response to a rotation, sensing an amount of deflection of the proof mass in an axis orthogonal to the drive axis, the amount of deflection being sensed as a change in charge; and

generating a quadrature error cancellation signal to substantially cancel quadrature error from the sensed change in charge, including capacitively coupling the quadrature error cancellation signal to the sensed change in charge to substantially cancel quadrature error from the sensed change in charge.

2. The method of claim 1, further comprising converting the sensed change in charge having quadrature error substantially removed therefrom into a corresponding voltage or current.

3. The method of claim 2, wherein generating a quadrature error cancellation signal includes generating the quadrature error cancellation signal based on a feedback loop that runs continuously to substantially cancel quadrature error from the sensed change in charge.

4. The method of claim 3, wherein generating the quadrature error cancellation signal based on a feedback loop includes measuring an amount of quadrature error contained within the corresponding voltage or current using a drive signal that is used to vibrate the proof mass as a reference.

5. The method of claim 1, wherein the quadrature error cancellation signal is derived from a drive signal within a drive circuit that is used to vibrate the proof mass.

6. The method of claim 5, further comprising scaling the drive signal, and wherein generating the quadrature error cancellation signal includes generating the quadrature error cancellation signal based on the scaled drive signal.

7. The method of claim 6, further comprising:

storing one or more pre-determined digital codes that each represents a particular scale factor for scaling the drive signal; and

wherein scaling the drive signal includes scaling the drive signal based on a selected one of the one or more pre-determined digital codes to minimize quadrature error within the sensed change in charge.

8. The method of claim 7, wherein the one or more pre-determined digital codes are determined during production testing of a sensor including the proof mass.

9. A sensor operable to detect a rate of rotation, the sensor comprising:

a proof mass;

a drive circuit to vibrate the proof mass at a pre-determined frequency in a drive axis;

an electrode operable to sense an amount of deflection of the proof mass in an axis orthogonal to the drive axis in response to a rotation of the sensor, the electrode sensing the amount of deflection as a change in charge; and

a quadrature error cancellation circuit operable to generate a quadrature error cancellation signal to substantially cancel quadrature error from the sensed change in charge,

wherein the quadrature error cancellation signal is capacitively coupled to the sensed change in charge to substantially cancel quadrature error from the sensed change in charge.

10. The sensor of claim 9, further comprising a sense mass position sensor circuit operable to receive the sensed change in charge having quadrature error substantially removed therefrom and convert the received sensed change in charge into a corresponding voltage or current.

11. The sensor of claim 10, wherein the quadrature error cancellation circuit generates the quadrature error cancellation signal based on a feedback loop that runs continuously to substantially cancel quadrature error from the sensed change in charge.

12. The sensor of claim 11, wherein the quadrature error cancellation circuit includes a demodulator operable to measure an amount of quadrature error contained within a signal from the sense mass position sensor circuit using a drive signal that is used to vibrate the proof mass within the drive circuit as a reference.

13. The sensor of claim 9, wherein the quadrature error cancellation signal is derived from a drive signal within the drive circuit that is used to vibrate the proof mass.

14. The sensor of claim 13, wherein the quadrature error cancellation circuit includes an amplitude scaling circuit operable to scale the drive signal and generate the quadrature error cancellation signal based on the scaled drive signal.

15. The sensor of claim 14, wherein:

the quadrature error cancellation circuit further includes a memory operable to store one or more pre-determined digital codes that each represents a particular scale factor for scaling the drive signal; and

the amplitude scaling circuit scales the drive signal based on a selected one of the one or more pre-determined digital codes to minimize quadrature error within the sensed change in charge.

16. The sensor of claim 15, wherein the one or more pre-determined digital codes are determined during production testing of the sensor.

17. The sensor of claim 9, wherein the sensor comprises a single-axis MEMS gyroscope, a dual-axis MEMS gyroscope, or a multiple axis MEMS gyroscope.