Acceleration sensor

• US 7,299,695 B2
• Filed: 08/24/2004
• Issued: 11/27/2007
• Est. Priority Date: 02/25/2002
• Status: Expired due to Fees

• Current Assignee: Fujitsu Media Devices Limited (Fujitsu Limited)
• Original Assignee: Fujitsu Media Devices Limited (Fujitsu Limited)
• Inventors: Tanaka, Hiroshi, Yachi, Masanori, Ishikawa, Hiroshi, Kato, Takashi
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US10/924,261
• Publication Number:
  US 20050066725A1
• Time in Patent Office: 1,190 Days
• Field of Search: 735/143.4, 735/142, 734/93, 735/10, 735/140.2, 310/329
• US Class Current: 73/510
• CPC Class Codes: G01P 15/09 by piezoelectric pick-up
• CPC Class Codes: G01P 15/0915 of the shear mode type

Abstract

An acceleration sensor includes a weight and a vibrator that supports the weight at its center of gravity. When acceleration is applied to the weight, stress equivalent to the applied acceleration is generated in the vibrator. As the vibrator is arranged to support the weight at its center of gravity, a characteristic relationship is observed between the acceleration, such as angular acceleration or translational acceleration, and the size of electric charges and the polarity. By taking advantage of this relationship, different types of acceleration can be easily detected.

Claims

1. An acceleration sensor comprising:

a weight;

a vibrator for supporting the weight at the center of gravity thereof, wherein the vibrator has such a cut angle that the piezoelectric constant in the longitudinal direction of the weight is zero and the piezoelectric constant in the thickness direction of the weight is also zero and for detecting an in-plane acceleration, the vibrator being positioned in a center of the weight in a longitudinal direction of the weight such that a center of rotation being located at a position further out than the vibrator in the longitudinal direction;

a first circuit that adds up outputs generated from two regions formed by dividing a surface of the vibrator into two in the longitudinal direction of the weight and provides output detection signals corresponding to translational acceleration; and

a second circuit that outputs the difference between the outputs and provides output detection signals correspond to angular acceleration, and

wherein the weight having a size greater than that of the vibrator in the longitudinal direction, and

wherein a sense signal based on the in-plane angular acceleration being output across detection electrodes provided on the vibrator.

2. The acceleration sensor as claimed in claim 1, further comprising two detection electrodes that are placed on a surface of the vibrator and are arranged to divide the surface into two.

3. The acceleration sensor as claimed in claim 1, further comprising two detection electrodes that are placed on a surface of the vibrator and are arranged to divide the surface into two in the longitudinal direction of the weight.

4. The acceleration sensor as claimed in claim 1, further comprising two detection electrodes that are placed on a surface of the vibrator and are arranged to divide the surface into two in the longitudinal direction of the weight, wherein the vibrator has a groove formed between the two detection electrodes.

5. The acceleration sensor as claimed in any of claims 1 through 4, wherein the vibrator has a polarization axis that extends in a direction perpendicular to the longitudinal direction of the weight.

6. The acceleration sensor as claimed in any of claims 1 through 4, wherein the vibrator has a polarization axis in a direction perpendicular to the longitudinal direction of the weight.

7. The acceleration sensor as claimed in claim 1, wherein the vibrator is made of a piezoelectric ceramics material.

8. The acceleration sensor as claimed in claim 1, wherein:

the vibrator is made of a piezoelectric single-crystal material.

9. The acceleration sensor as claimed in any of claims 1 through 4, further comprising a positioning mechanism that is attached to the weight, wherein the positioning mechanism has positioning pieces that form a space to accommodate the vibrator.

10. The acceleration sensor as claimed in any of claims 1 through 4, further comprising a substrate that supports the vibrator.

11. The acceleration sensor as claimed in any of claims 1 through 4, wherein the vibrator is a shear vibrator.

12. An acceleration sensor comprising:

a weight;

a vibrator for supporting the weight at a center of gravity thereof, wherein the vibrator has such a cut angle that a piezoelectric constant in the longitudinal direction of the weight is zero and a piezoelectric constant in the thickness direction of the weight is also zero, and for detecting an in-plane acceleration, the vibrator being positioned in a center of the weight in a longitudinal direction of the weight such that a center of rotation being located at a position further out than the vibrator in the longitudinal direction, and

a circuit that outputs detection signals corresponding to angular acceleration and translational acceleration, the detection signals being obtained by processing outputs generated from two regions formed by dividing a surface of the vibrator into two in the longitudinal direction of the weight, and

wherein the weight has a size greater than that of the vibrator in the longitudinal direction,

wherein a sense signal based on the in-plane angular acceleration is output across detection electrodes provided on the vibrator.