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Operation voltage supply apparatus and operation voltage supply method for semiconductor device

  • US 7,307,434 B2
  • Filed: 09/09/2004
  • Issued: 12/11/2007
  • Est. Priority Date: 09/16/2003
  • Status: Active Grant
First Claim
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1. An operation voltage supply apparatus for a semiconductor device, which comprises:

  • a voltage development device which includes;

    a variable voltage source anda voltage compensation circuit which includes;

    a voltage input terminal to which a set voltage set by said variable voltage source is inputted,an output terminal for outputting an output voltage to be applied to a voltage application pad of said semiconductor device, anda measurement input terminal for receiving a measurement voltage at a voltage measurement pad of said semiconductor device,said voltage compensation circuit providing a compensation voltage resulting from the sum of said set voltage and a different voltage between said set voltage and said measurement voltage to the semiconductor device through the voltage output terminal; and

    a probe card which includes;

    a voltage application probe for electrically connecting said voltage application pad and said output terminal anda voltage measurement probe for electrically connecting said voltage measurement pad and said measurement input terminal to measure the measurement voltage.

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