Operation voltage supply apparatus and operation voltage supply method for semiconductor device
First Claim
1. An operation voltage supply apparatus for a semiconductor device, which comprises:
- a voltage development device which includes;
a variable voltage source anda voltage compensation circuit which includes;
a voltage input terminal to which a set voltage set by said variable voltage source is inputted,an output terminal for outputting an output voltage to be applied to a voltage application pad of said semiconductor device, anda measurement input terminal for receiving a measurement voltage at a voltage measurement pad of said semiconductor device,said voltage compensation circuit providing a compensation voltage resulting from the sum of said set voltage and a different voltage between said set voltage and said measurement voltage to the semiconductor device through the voltage output terminal; and
a probe card which includes;
a voltage application probe for electrically connecting said voltage application pad and said output terminal anda voltage measurement probe for electrically connecting said voltage measurement pad and said measurement input terminal to measure the measurement voltage.
3 Assignments
0 Petitions
Accused Products
Abstract
The voltage application probe (54) and the voltage measurement probe (56) are connected to the voltage application pad (74) and the voltage measurement pad (76) of the semiconductor device (70). The voltage application pad (74) and the voltage measurement pad (76) are connected by the conductor (78), measuring the voltage applied to the voltage application pad (74) through the voltage measurement probe (56). The voltage compensation circuit (14) in the voltage development device (10) operates to make the voltage applied to the voltage application pad (74) equal to the set voltage for the voltage development device (10). Even when the resistance between the voltage application probe (54) and the voltage application pad (74) increases, the accurate setting voltage is applied to the voltage application pad (74).
8 Citations
16 Claims
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1. An operation voltage supply apparatus for a semiconductor device, which comprises:
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a voltage development device which includes; a variable voltage source and a voltage compensation circuit which includes; a voltage input terminal to which a set voltage set by said variable voltage source is inputted, an output terminal for outputting an output voltage to be applied to a voltage application pad of said semiconductor device, and a measurement input terminal for receiving a measurement voltage at a voltage measurement pad of said semiconductor device, said voltage compensation circuit providing a compensation voltage resulting from the sum of said set voltage and a different voltage between said set voltage and said measurement voltage to the semiconductor device through the voltage output terminal; and a probe card which includes; a voltage application probe for electrically connecting said voltage application pad and said output terminal and a voltage measurement probe for electrically connecting said voltage measurement pad and said measurement input terminal to measure the measurement voltage. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An operation voltage supply apparatus for a semiconductor device, comprising:
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a voltage development device which includes; a variable voltage source and a voltage compensation circuit which includes; a voltage input terminal to which a set voltage set by said variable voltage source is inputted, an output terminal for outputting an output voltage to be applied to a voltage application pad of said semiconductor device, and a measurement input terminal for receiving a measurement voltage at a voltage measurement pad of said semiconductor device, said voltage compensation circuit providing a compensation voltage resulting from the sum of said set voltage and a different voltage between said set voltage and said measurement voltage to the semiconductor device through the voltage output terminal; and a probe card which includes; a voltage application probe for electrically connecting said voltage application pad and said output terminal and a voltage measurement probe for electrically connecting said voltage measurement pad and said measurement input terminal to measure a voltage applied to said voltage application pad of said semiconductor device as a measurement voltage, wherein said voltage application pad and said voltage measurement pad share a common pad. - View Dependent Claims (14, 15, 16)
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Specification