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Thin film coil, method of manufacturing the same, coil structure, and method of manufacturing the same

  • US 7,307,503 B2
  • Filed: 06/21/2005
  • Issued: 12/11/2007
  • Est. Priority Date: 07/01/2004
  • Status: Expired due to Fees
First Claim
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1. A thin film coil including a first coil pattern and a second coil pattern which are provided on a predetermined underlayer and turn spirally in parallel with each other around a predetermined center position,wherein the first coil pattern and the second coil pattern exist separately and are provided on the same level,each of a section of the first coil pattern and a section of the second coil pattern has a trapezoid shape having one side positioned on the side far from the underlayer and specifying two base angles as a longer one of a set of opposite sides which are parallel to each other and the other side positioned on the side close to the underlayer as a shorter one of the set of opposite sides,wherein a shape of the section of the first coil pattern and a shape of the section of the second coil pattern match each other in an arbitrary turn position,wherein a first inner-side base angle positioned on the side close to the center position and a first outer-side base angle positioned on the side far from the center position out of the two base angles are different from each other in the section of the first coil pattern, anda second inner-side base angle positioned on the side close to the center position and a second outer-side base angle positioned on the side far from the center position out of the two base angles are different from each other in the section of the second coil pattern.

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