Semiconductor device and method of manufacturing the same

  • US 7,312,118 B2
  • Filed: 02/24/2006
  • Issued: 12/25/2007
  • Est. Priority Date: 11/27/2002
  • Status: Expired due to Fees
First Claim
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1. A method of manufacturing a semiconductor device, comprising:

  • forming a stacked film above a semiconductor substrate, the stacked film comprising a first conductive film, a second conductive film provided below the first conductive film, a third conductive film provided below the second conductive film, a first dielectric film provided between the first conductive film and the second conductive film, and a second dielectric film provided between the second conductive film and the third conductive film;

    forming a capacitor structure comprising a first electrode formed of the first conductive film, a second electrode formed of the second conductive film, and a third electrode formed of the third conductive film by patterning the stacked film;

    forming an insulating film covering the capacitor structure and having a first hole reaching the first electrode, a second hole reaching the second electrode and a third hole reaching the third electrode; and

    forming a first conductive connection electrically connecting the first electrode and the third electrode and having portions buried in the first and third holes, and a second conductive connection formed separately from the first conductive connection and having a portion buried in the second hole,wherein forming the capacitor structure comprises;

    patterning the first conductive film to form the first electrode and a ring-shape conductive portion surrounding the first electrode;

    forming a mask pattern covering the first electrode and a part of the ring-shape conductive portion;

    patterning the first dielectric film with the ring-shape conductive portion and the mask pattern used as a mask;

    patterning the ring-shape conductive portion with the mask pattern used as a mask to form a ring-shape electrode; and

    patterning the second conductive film with the patterned first dielectric film used as a mask.

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