Power FET with embedded body pickup
First Claim
1. A power transistor formed on a semiconductor substrate and including a lateral array of polysilicon lines separated by alternating source and drain regions, the power transistor comprising:
- one or more elongated body contact diffusion regions formed in areas of the source regions not receiving the source diffusion, each elongated body contact diffusion region having a rectangular shape with a width that extends in parallel with the edges of the two adjacent polysilicon lines and a length that extends perpendicular to the edges of the two adjacent polysilicon lines and having a dopant type opposite to the dopant type of the source region; and
one or more body pickup contacts, each body pickup contact formed only over a respective body contact diffusion region,wherein the body contact diffusion regions are formed in a fabrication process using ion implantation of dopants of a first type through a body diffusion mask, each body contact diffusion region defined by an exposed area in the body diffusion mask having a drawn area that overlaps the respective two adjacent polysilicon lines.
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Accused Products
Abstract
A power transistor formed on a semiconductor substrate and including a lateral array of polysilicon lines separated by alternating source and drain regions includes one or more body contact diffusion regions formed in the source regions where each body contact diffusion region has a length that extends to the edges of the two adjacent polysilicon lines, and one or more body pickup contacts where each body pickup contact is formed over a respective body contact diffusion region. In one embodiment, the body contact diffusion regions are formed in a fabrication process using ion implantation of dopants of a first type through a body diffusion mask. Each body contact diffusion region defined by an exposed area in the body diffusion mask has a drawn area that overlaps the respective two adjacent polysilicon lines.
130 Citations
10 Claims
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1. A power transistor formed on a semiconductor substrate and including a lateral array of polysilicon lines separated by alternating source and drain regions, the power transistor comprising:
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one or more elongated body contact diffusion regions formed in areas of the source regions not receiving the source diffusion, each elongated body contact diffusion region having a rectangular shape with a width that extends in parallel with the edges of the two adjacent polysilicon lines and a length that extends perpendicular to the edges of the two adjacent polysilicon lines and having a dopant type opposite to the dopant type of the source region; and one or more body pickup contacts, each body pickup contact formed only over a respective body contact diffusion region, wherein the body contact diffusion regions are formed in a fabrication process using ion implantation of dopants of a first type through a body diffusion mask, each body contact diffusion region defined by an exposed area in the body diffusion mask having a drawn area that overlaps the respective two adjacent polysilicon lines. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification