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Method for manufacturing a multi-layered thin film for use as an anode in a lithium secondary battery

  • US 7,316,867 B2
  • Filed: 11/29/2004
  • Issued: 01/08/2008
  • Est. Priority Date: 08/25/2001
  • Status: Expired due to Term
First Claim
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1. A method for manufacturing a multi-layered thin film structure for use as an anode of a lithium secondary battery comprising:

  • (a) forming a thin film of silicon-metal (Si-M) by depositing a metal reacting with silicon and silicon on a current collector to form a thin film having a layer thickness of 50 to 450 Å

    while not reacting with lithium;

    (b) forming a thin film of silver (Ag) by depositing Ag on the Si-M layer in form of a thin film silver layer having a thickness of 10 to 70 Å

    ; and

    (c) forming a multi-layered stacked thin film structure on the current collector by repeating the steps (a) and (b) more than one time.

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