Laser-irradiated metallized electroceramic

• US 7,318,844 B2
• Filed: 07/08/2004
• Issued: 01/15/2008
• Est. Priority Date: 07/21/2003
• Status: Active Grant

• Current Assignee: Hitachi Energy Limited
• Original Assignee: ABB Research Ltd. (ABB Ltd.)
• Inventors: Greuter, Felix, Kessler, Reto, Hagemeister, Michael
• Primary Examiner(s): Graybill; David E.
• Application Number:
  US10/885,877
• Publication Number:
  US 20050016969A1
• Time in Patent Office: 1,286 Days
• Field of Search: None
• US Class Current: 29/25.02
• CPC Class Codes: C04B 2111/00844 for electronic applications
• CPC Class Codes: C04B 35/00 Shaped ceramic products characterised by their composition porous ceramic products C04B38/00; ceramic articles characterised by particular shape, see the relevant classes, e.g. linings for casting ladles, tundishes, cups or the like B22D41/02; ceramic substrates for microelectronic semi-conductors H01L23/15; Ceramics compositions containing free metal bonded to carbides, diamond, oxides, borides, nitrides, silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides or sulfides other than as macroscopic reinforcing agents C22C; shaping of ceramics B28B; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products chemical preparation of powders of inorganic compounds C01; infiltration of sintered ceramic preforms with molten metal C04B41/51
• CPC Class Codes: C04B 41/0036 Laser treatment working by laser beam B23K26/00
• CPC Class Codes: C04B 41/009 characterised by the material treated
• CPC Class Codes: C04B 41/51 Metallising , e.g. infiltration of sintered ceramic preforms with molten metal covering materials with metals in general C23C; ceramic compositions containing free metal bonded to carbides, diamond, oxides, borides, nitrides, silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides or sulfides, other than as macroscopic reinforcing agents C22C; infiltration of preforms containing free metal, e.g. cermets C22C
• CPC Class Codes: C04B 41/53 involving the removal of at least part of the materials of the treated article, e.g. etching, drying of hardened concrete C04B41/0036 - C04B41/0054 take precedence
• CPC Class Codes: C04B 41/88 Metals
• CPC Class Codes: H01C 7/108 Metal oxide
• CPC Class Codes: Y10T 29/49082 Resistor making

Abstract

The manufacturing method for an electroceramic component (1), for example a varistor (1), comprises a laser irradiation of a part (5; 6) of the surface of an electroceramic body (2) before a metallization (3; 4) is applied to the part (5; 6) of the surface. By means of the laser irradiation it is possible to produce a micro-roughness and/or a chemical modification of the surface which permits good adhesion of the metallization, and it is possible to reduce or eliminate areas of unevenness or waviness of that part (5; 6) of the surface of the electroceramic body (2) which is to be metallized. In addition, improved transverse conductivity can be produced, by virtue of which a low contact resistance and a very homogeneous current distribution is achieved, in particular near to the metallization (3; 4). In addition it is possible to remove residues which originate in particular from a sinter support or from the application of a passivation layer. After the laser irradiation, the electroceramic body advantageously has a border (9) which adjoins the part (5; 6) of the surface and which is not laser-irradiated. The laser beam can advantageously be pulsed and focused.

Claims

1. A method for manufacturing an electroceramic component, a metallization being applied to at least one part of the surface of a sintered electroceramic body, comprising irradiating the at least one part of the surface with laser light before the metallization is applied thereby physically removing electroceramic material from the at least one part of the surface, wherein a focused laser beam is used as the laser light before the metallization is applied, the part of the surface is irradiated with the laser light in order to reduce a waviness of the part of the surface, and the laser beam is focused on an area which is arranged in parallel with an area which averages the waviness of the part of the surface.

2. The manufacturing method as claimed in claim 1, wherein, after the laser irradiation, the electroceramic body has a border which adjoins the at least one part of the surface, which border is not irradiated, or is irradiated less, with the laser light than the at least one part of the surface.

3. The manufacturing method as claimed in claim 1, wherein, in order to roughen the part of the surface, the part of the surface is irradiated with the laser light before the metallization is applied.

4. The manufacturing method as claimed in claim 1, wherein, in order to improve the adhesion of the metallization by modifying the chemical quality of the part of the surface, the part of the surface is irradiated with the laser light before the metallization is applied.

5. The manufacturing method as claimed in claim 1, wherein, in order to increase the electrical transverse conductivity of the part of the surface, the part of the surface is irradiated with the laser light before the metallization is applied.

6. The manufacturing method as claimed in claim 1, wherein, after the sintering, the part of the surface of the electroceramic body has a waviness, and in that, before the metallization is applied, the part of the surface is irradiated with the laser light in order to reduce the waviness of the part of the surface.

7. The manufacturing method as claimed in claim 1, wherein an amount of energy which is deposited per unit area in the part of the surface by means of the laser beam in order to level out a part of the surface which is curved before the irradiation by laser is selected as a function of the location on the part of the surface.

8. The manufacturing method as claimed in claim 1, wherein the electroceramic component is a varistor or a high-temperature superconductor component or a piezo ceramic component or a ceramic capacitor or an NTC thermistor or a PTC thermistor or a ceramic resistor or a ceramic gas sensor, or wherein the electroceramic component is a varistor and the electroceramic body is a varistor body, and in that the varistor body is a doped sintered metal oxide ceramic, based on ZnO, SnO₂, SrTiO₃ or TiO₂, or a doped carbide ceramic.

9. The manufacturing method as claimed in claim 1, wherein the electroceramic component is a varistor and the electroceramic body is a varistor body and in that, before the application of the metallization, the part of the surface is irradiated with laser light in order to reduce a voltage dependence of the transverse conductivity of the part of the surface, before the application of the metallization, the part of the surface is irradiated with laser light in order to produce an ohmic voltage dependence of the transverse conductivity of the part of the surface.

10. The manufacturing method as claimed in claim 1, wherein either the electroceramic body is fashioned in an essentially cylindrical shape, disk shape or plate shape, in each case a part of the surface being arranged on the two boundary faces of the cylinder or of the disk or of the plate which are parallel with one another, on which two parts of the surface in each case one metallization is applied by thermal spraying, or the electroceramic body is fashioned in an essentially tubular shape or cylindrical shape, a metallization being applied by thermal spraying to two essentially annular parts of the surface which are spaced apart from one another axially and are arranged on the outer surface of the tube or cylinder.

11. An electroceramic manufactured according to claim 1.

12. The electroceramic component of claim 11, wherein the component is a varistor, or a high-temperature superconductor component or a piezo ceramic component or a ceramic capacitor or an NTC thermistor or a PTC thermistor or a ceramic resistor or a ceramic gas sensor.

13. The electroceramic component of claim 11, wherein the surface irradiated with laser light possess a reduced waviness.

14. The electroceramic component of claim 12, wherein the component is a varistor and comprises a substantially ohmic transverse conductivity.

15. A method for manufacturing an electroceramic component, a metallization being applied to at least one part of the surface of a sintered electroceramic body, comprising irradiating the at least one part of the surface with laser light before the metallization is applied thereby physically removing electroceramic material from the at least one part of the surface, wherein the electroceramic body has a particle structure, and in that loose particles and/or particle composites of the electroceramic body are found to be present on the part of the surface and/or particles and/or particle composites of the electroceramic body which are arranged in fissures in the particle structure are found to be present, the part of the surface being irradiated with laser light, before the application of the metallization, in order to remove such particles and/or particle composites.

16. The manufacturing method as claimed in claim 15, wherein, after the sintering, the part of the surface of the electroceramic body has a waviness, and in that, before the metallization is applied, the part of the surface is irradiated with the laser light in order to reduce the waviness of the part of the surface.

17. The manufacturing method as claimed in claim 15, wherein the electroceramic component is a varistor or a high-temperature superconductor component or a piezo ceramic component or a ceramic capacitor or an NTC thermistor or a PTC thermistor or a ceramic resistor or a ceramic gas sensor, or wherein the electroceramic component is a varistor and the electroceramic body is a varistor body, and in that the varistor body is a doped sintered metal oxide ceramic, based on ZnO, SnO₂, SrTiO₃ or TiO₂, or a doped carbide ceramic.

18. The manufacturing method as claimed in claim 15, wherein the electroceramic component is a varistor and the electroceramic body is a varistor body and in that, before the application of the metallization, the part of the surface is irradiated with laser light in order to reduce a voltage dependence of the transverse conductivity of the part of the surface, before the application of the metallization, the part of the surface is irradiated with laser light in order to produce an ohmic voltage dependence of the transverse conductivity of the part of the surface.

19. An electroceramic manufactured according to claim 15.

20. A method for manufacturing an electroceramic component, a metallization being applied to at least one part of the surface of a sintered electroceramic body, comprising irradiating the at least one part of the surface with laser light before the metallization is applied thereby physically removing electroceramic material from the at least one part of the surface the electroceramic body being supported during the sintering by at least part of the surface on a sinter support, wherein, before the application of the metallization, the part of the surface is irradiated with laser light in order to remove parts of the sinter support which have remained in the part of the surface after the sintering.

21. The manufacturing method as claimed in claim 20, wherein, after the sintering, the part of the surface of the electroceramic body has a waviness, and in that, before the metallization is applied, the part of the surface is irradiated with the laser light in order to reduce the waviness of the part of the surface.

22. The manufacturing method as claimed in claim 20, wherein the electroceramic component is a varistor or a high-temperature superconductor component or a piezo ceramic component or a ceramic capacitor or an NTC thermistor or a PTC thermistor or a ceramic resistor or a ceramic gas sensor, or wherein the electroceramic component is a varistor and the electroceramic body is a varistor body, and in that the varistor body is a doped sintered metal oxide ceramic, based on ZnO, SnO₂, SrTiO₃ or TiO₂, or a doped carbide ceramic.

23. The manufacturing method as claimed in claim 20, wherein the electroceramic component is a varistor and the electroceramic body is a varistor body and in that, before the application of the metallization, the part of the surface is irradiated with laser light in order to reduce a voltage dependence of the transverse conductivity of the part of the surface, before the application of the metallization, the part of the surface is irradiated with laser light in order to produce an ohmic voltage dependence of the transverse conductivity of the part of the surface.

24. An electroceramic manufactured according to claim 20.

29. The manufacturing method as claimed in claim 20, wherein the electroceramic component is a varistor or a high-temperature superconductor component or a piezo ceramic component or a ceramic capacitor or an NTC thermistor or a PTC thermistor or a ceramic resistor or a ceramic gas sensor, or wherein the electroceramic component is a varistor and the electroceramic body is a varistor body, and in that the varistor body is a doped sintered metal oxide ceramic, based on ZnO, SnO₂, SrTiO₃ or TiO₂, or a doped carbide ceramic.

25. A method for manufacturing an electroceramic component, a metallization being applied to at least one part of the surface of a sintered electroceramic body, comprising irradiating the at least one part of the surface with laser light before the metallization is applied thereby physically removing electroceramic material from the at least one part of the surface, the electroceramic body being provided, before the application of the metallization, at least partially with a nonconductive passivation layer, wherein, before the application of the metallization, the part of the surface is irradiated with laser light in order to remove parts of the passivation layer which are located on the part of the surface.

26. The manufacturing method as claimed in claim 25, wherein, after the laser irradiation, the electroceramic body has a border which adjoins the at least one part of the surface, which border is not irradiated, or is irradiated less, with the laser light than the at least one part of the surface.

27. The manufacturing method as claimed in claim 25, wherein, in order to roughen the part of the surface, the part of the surface is irradiated with the laser light before the metallization is applied.

28. The manufacturing method as claimed in claim 25, wherein, after the sintering, the part of the surface of the electroceramic body has a waviness, and in that, before the metallization is applied, the part of the surface is irradiated with the laser light in order to reduce the waviness of the part of the surface.

30. The manufacturing method as claimed in claim 25, wherein the electroceramic component is a varistor and the electroceramic body is a varistor body and in that, before the application of the metallization, the part of the surface is irradiated with laser light in order to reduce a voltage dependence of the transverse conductivity of the part of the surface, before the application of the metallization, the part of the surface is irradiated with laser light in order to produce an ohmic voltage dependence of the transverse conductivity of the part of the surface.

31. An electroceramic manufactured according to claim 25.