Acceleration/angular velocity sensor unit
First Claim
1. An acceleration/angular velocity sensor unit comprising:
- an X-direction acceleration sensor for sensing an acceleration in an X-axis direction,a Y-direction acceleration sensor for sensing an acceleration in a Y-axis direction,a Z-direction acceleration sensor for sensing an acceleration in a Z-axis direction,an X-axis angular velocity sensor for sensing an angular velocity around an X-axis,a Y-axis angular velocity sensor for sensing an angular velocity around a Y-axis, anda Z-axis angular velocity sensor for sensing an angular velocity around a Z-axis,wherein the acceleration sensors and angular velocity sensors are all packaged on a single substrate, where the X-axis, the Y-axis, and the Z-axis intersect orthogonally mutually, whereinthe X-direction acceleration sensor, the X-axis angular velocity sensor, the Y-direction acceleration sensor, and the Y-axis angular velocity sensor are packaged on a first surface of the substrate such that respective X-axes and respective Y-axes are set in parallel, respectively, to the first surface,the Z-direction acceleration sensor and the Z-axis angular velocity sensor are packaged on a second surface that is opposed to the first surface of the substrate such that respective Z-axes are set perpendicularly to the second surface, and whereinthe X-direction acceleration sensor and the X-axis angular velocity sensor are arranged parallel to each other on the first surface of the substrate,the Y-direction acceleration sensor and the Y-axis angular velocity sensor are arranged parallel to each other on the first surface of the substrate, andthe Z-direction acceleration sensor and the Z-axis angular velocity sensor are arranged parallel to each other on the second surface of the substrate.
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Accused Products
Abstract
A longitudinal G sensor 51 and a roll rate sensor 54 are mounted onto a back surface 61b of a substrate 61 in parallel with an X-axis and a lateral G sensor 52 and a pitch rate sensor 55 are mounted thereon in parallel with a Y-axis, the longitudinal G sensor 51 and the lateral G sensor 52 are positioned thereon in close vicinity to each other, and the roll rate sensor 54 and the pitch rate sensor 55 are positioned thereon in close vicinity to each other, while a vertical G sensor 53 and a yaw rate sensor 56 are mounted onto a surface 61a of the substrate 61 in orthogonal to a Z-axis and also the vertical G sensor 53 and the yaw rate sensor 56 are mounted thereon in close vicinity to each other.
53 Citations
11 Claims
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1. An acceleration/angular velocity sensor unit comprising:
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an X-direction acceleration sensor for sensing an acceleration in an X-axis direction, a Y-direction acceleration sensor for sensing an acceleration in a Y-axis direction, a Z-direction acceleration sensor for sensing an acceleration in a Z-axis direction, an X-axis angular velocity sensor for sensing an angular velocity around an X-axis, a Y-axis angular velocity sensor for sensing an angular velocity around a Y-axis, and a Z-axis angular velocity sensor for sensing an angular velocity around a Z-axis, wherein the acceleration sensors and angular velocity sensors are all packaged on a single substrate, where the X-axis, the Y-axis, and the Z-axis intersect orthogonally mutually, wherein the X-direction acceleration sensor, the X-axis angular velocity sensor, the Y-direction acceleration sensor, and the Y-axis angular velocity sensor are packaged on a first surface of the substrate such that respective X-axes and respective Y-axes are set in parallel, respectively, to the first surface, the Z-direction acceleration sensor and the Z-axis angular velocity sensor are packaged on a second surface that is opposed to the first surface of the substrate such that respective Z-axes are set perpendicularly to the second surface, and wherein the X-direction acceleration sensor and the X-axis angular velocity sensor are arranged parallel to each other on the first surface of the substrate, the Y-direction acceleration sensor and the Y-axis angular velocity sensor are arranged parallel to each other on the first surface of the substrate, and the Z-direction acceleration sensor and the Z-axis angular velocity sensor are arranged parallel to each other on the second surface of the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 10)
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9. An acceleration/angular velocity sensor unit adapted to be mounted to a vehicle comprising:
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an X-direction acceleration sensor for sensing an acceleration in an X-axis direction, a Y-direction acceleration sensor for sensing an acceleration in a Y-axis direction, a Z-direction acceleration sensor for sensing an acceleration in a Z-axis direction, an X-axis angular velocity sensor for sensing an angular velocity around an X-axis, a Y-axis angular velocity sensor for sensing an angular velocity around a Y-axis, and a Z-axis angular velocity sensor for sensing an angular velocity around a Z-axis, wherein the acceleration sensors and angular velocity sensors are all packaged on a single substrate, where the X-axis, the Y-axis, and the Z-axis intersect orthogonally mutually, wherein the X-direction acceleration sensor, the X-axis angular velocity sensor, the Y-direction acceleration sensor, and the Y-axis angular velocity sensor are packaged on a first surface of the substrate such that respective X-axes and respective Y-axes are set in parallel, respectively, to the first surface, and the Z-direction acceleration sensor and the Z-axis angular velocity sensor are packaged on a second surface that is opposed to the first surface of the substrate such that respective Z-axes are set perpendicularly to the second surface. - View Dependent Claims (11)
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Specification