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Acceleration/angular velocity sensor unit

  • US 7,325,454 B2
  • Filed: 09/30/2005
  • Issued: 02/05/2008
  • Est. Priority Date: 09/30/2004
  • Status: Expired due to Fees
First Claim
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1. An acceleration/angular velocity sensor unit comprising:

  • an X-direction acceleration sensor for sensing an acceleration in an X-axis direction,a Y-direction acceleration sensor for sensing an acceleration in a Y-axis direction,a Z-direction acceleration sensor for sensing an acceleration in a Z-axis direction,an X-axis angular velocity sensor for sensing an angular velocity around an X-axis,a Y-axis angular velocity sensor for sensing an angular velocity around a Y-axis, anda Z-axis angular velocity sensor for sensing an angular velocity around a Z-axis,wherein the acceleration sensors and angular velocity sensors are all packaged on a single substrate, where the X-axis, the Y-axis, and the Z-axis intersect orthogonally mutually, whereinthe X-direction acceleration sensor, the X-axis angular velocity sensor, the Y-direction acceleration sensor, and the Y-axis angular velocity sensor are packaged on a first surface of the substrate such that respective X-axes and respective Y-axes are set in parallel, respectively, to the first surface,the Z-direction acceleration sensor and the Z-axis angular velocity sensor are packaged on a second surface that is opposed to the first surface of the substrate such that respective Z-axes are set perpendicularly to the second surface, and whereinthe X-direction acceleration sensor and the X-axis angular velocity sensor are arranged parallel to each other on the first surface of the substrate,the Y-direction acceleration sensor and the Y-axis angular velocity sensor are arranged parallel to each other on the first surface of the substrate, andthe Z-direction acceleration sensor and the Z-axis angular velocity sensor are arranged parallel to each other on the second surface of the substrate.

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