Hall sensor
First Claim
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1. A Hall sensor on a semiconductor substrate, the Hall sensor comprising:
- a Hall plate in the semiconductor substrate, the Hall plate comprising a first zone having a first conduction type;
a second zone in the semiconductor substrate, the second zone having a second conduction type;
a space-charge zone in the semiconductor substrate, the space-charge zone separating the first zone and the second zone;
first contacts for supplying a control current to the first zone; and
second contacts for supplying a compensation current to the second zone.
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Abstract
A Hall sensor on a semiconductor substrate includes a Hall plate in the semiconductor substrate, where the Hall plate includes a first zone having a first conduction type. The semiconductor substrate also include a second zone having a second conduction type. A space-charge zone in the semiconductor substrate separates the first zone and the second zone, first contacts supply a control current to the first zone, and second contacts supply a compensation current to the second zone.
34 Citations
20 Claims
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1. A Hall sensor on a semiconductor substrate, the Hall sensor comprising:
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a Hall plate in the semiconductor substrate, the Hall plate comprising a first zone having a first conduction type; a second zone in the semiconductor substrate, the second zone having a second conduction type; a space-charge zone in the semiconductor substrate, the space-charge zone separating the first zone and the second zone; first contacts for supplying a control current to the first zone; and second contacts for supplying a compensation current to the second zone. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An apparatus comprising:
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a first zone having a first doping, the first zone carrying a compensation current; a second zone having a second doping, the second zone carrying a control current; a third zone having the first doping; a first separation zone that separates the first and second zones, the compensation current affecting a thickness of the first separation zone; and a second separation zone that separates the second and third zones, the control current affecting a thickness of the second separation zone. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. An apparatus comprising:
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a first zone having a first doping, the first zone carrying a control current; a second zone having a second doping, the second zone carrying a compensation current; and a separation zone that separates the first and second zones, the control current and the compensation current keeping a thickness of the first zone and a thickness of the separation zone substantially constant. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification