Acceleration sensor

• US 7,350,424 B2
• Filed: 02/06/2003
• Issued: 04/01/2008
• Est. Priority Date: 02/12/2002
• Status: Expired due to Fees

• Current Assignee: RPX Corporation
• Original Assignee: Nokia Corporation
• Inventors: Hjelt, Kari, Ryhanen, Tapani, Silanto, Samuli, Salminen, Jukka
• Primary Examiner(s): Lefkowitz, Edward
• Assistant Examiner(s): ROY, PUNAM P
• Application Number:
  US10/502,454
• Publication Number:
  US 20050252308A1
• Time in Patent Office: 1,881 Days
• Field of Search: 738/620.41, 738/620.43, 738/620.46, 738/626.32, 738/626.34, 738/626.36, 738/626.37, 738/626.39, 738/626.8, 7351432-51433, 735/140.1, 735/143.4, 735/143.6, 200/61.08
• US Class Current: 73/862.041
• CPC Class Codes: G01P 15/06 using members subjected to a permanent deformation
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/0891 with indication of predetermined acceleration values G01P15/135 takes precedence
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 35/146 operated by plastic deformation or rupture of structurally associated elements

Abstract

A low-cost breakable inertial threshold sensor using mainly micro-machining silicon technology constructed on a silicon-wafer or on some other brittle material according to the MEMS process. The sensor comprises a first body portion, a second body portion, and detecting means for giving an indication if the second body portion has damaged the detecting means. The status of the sensor can be read in various ways. In one embodiment the status is remotely readable.

Claims

1. An apparatus comprising a group of at least two acceleration sensors arranged on one carrier;

wherein each acceleration sensor comprises a first body portion, a second body portion, and a breakable interconnecting element, constructed to break at a determine rupture point, said interconnecting element making the first body portion integral with the second body portion and a detector arranged for giving an indication when the breakable interconnecting element of the sensor is ruptured;

and wherein at least two of the sensors are oriented differently from one another, such that a first sensor is more sensitive than a second sensor to a force in a first direction, and the second sensor is more sensitive than the first sensor to a force in a second direction different to the first direction.

2. The apparatus as in claim 1, Wherein the group comprises acceleration sensors responding to forces in at least three different directions.

3. The apparatus as in claim 1, wherein the detector comprises a conductive path, strip, or wire arranged at least on the interconnecting element.

4. The apparatus as in claim 3, wherein the interconnecting element is adapted to break when an external force affecting the second body portion of one of said at least two acceleration sensor exceeds a predetermined threshold level, wherein a break of the interconnecting element causes a break in the conductive path, strip, or layer.

5. The apparatus as in claim 1, wherein the detector comprises a conductive doped-silicon or polycrystalline silicon layer at least on the interconnecting element.

6. The apparatus, as in claim 1, wherein the detector comprises a conductive, path, strip or wire arranged at a distance from the second body portion, wherein the second body of the acceleration sensors moves and breaks the path, strip, or wire when an external force affecting the second body portion exceeds a predetermined threshold level.

7. The apparatus as in claim 1, wherein the detector forms a part of an electrical detection loop.

8. The apparatus as in claim 1, wherein the indication is stored in a memory.

9. The apparatus as in claim 1, wherein the indication is remotely readable.

10. The apparatus as in claim 1, wherein the at least two acceleration sensors is are produced by micromachining technology using a surface mountable brittle material.

11. The apparatus as is claim 10, wherein the brittle material is single-crystal silicon.

12. The apparatus as in claim 10, wherein the brittle material is polycrystalline silicon.

13. The apparatus as in any claim 10, wherein the indication contains at least information identifying a detecting loop broken by an external acceleration force.

14. The apparatus as in claim 13, wherein the indication further contains the time when the indication was given.

15. The apparatus as in claim 1, wherein the status of the acceleration sensor group is readable immediately or from the memory.

16. The apparatus as in claim 15, wherein at least one of the acceleration sensors in the group is adapted to give a warning to the user when an external force affecting the second body portion exceeds a predetermined threshold level.

17. The apparatus as in claim 1, wherein all sensors of the group are integrated in a single block.

18. The apparatus as in claim 1, wherein an acceleration of any of the sensors of the group is remotely identifiable.

19. The apparatus as in claim 18, wherein all sensors of the group are integrated in a single block and the single block further comprises means for storing indications containing at least the time when the indication was given and the identity of the detector.

20. The apparatus as in claim 1, wherein all sensors of the group are integrated in a single block and the single block further comprises means for storing indications containing at least the time when the indication was given and the identity of the detector.

21. The apparatus as in claim 1, wherein all sensors of the group are integrated in a multichip module together with means for storing indications containing at least the time when the indication was given and the identity of the detector.

22. The apparatus as in claim 1, wherein all sensors of the group are integrated in an integrated circuit together with means for storing indications containing at least the time when the indication was given and the identity of the detector.

23. A handheld terminal, comprising

an acceleration sensor arrangement comprising a group of at least two acceleration sensors;

wherein each acceleration sensor comprises a first body portion, a second body portion, an interconnecting element making the first body integral with the second body, and a detector means arranged for giving an indication when a breakable component of the sensor is ruptured and further giving an indication to a user of the handheld terminal of rupture of the breakable component;

and wherein at least two of the sensors are oriented differently from one another, such that a first sensor is more sensitive than a second sensor to a force in a first direction, and the second sensor is more sensitive than the first sensor to a force in a second direction different to the first direction.

24. The handheld terminal as in claim 23, wherein the acceleration sensor arrangement is arranged to indicate to the handheld terminal when an acceleration sensor of the arrangement exceeds a predetermined threshold level and to give a warning to a user of the terminal if said indication is active when the terminal is switched on.

25. A method comprising:

giving an indication when a breakable component of at least one acceleration sensor of an acceleration arrangement is ruptured;

wherein the acceleration sensor arrangement comprises a group of at least two acceleration sensors, each acceleration sensor comprising a first body portion, a second body portion, and a breakable interconnecting element, constructed to break at a predetermined rupture point, said interconnecting element making the first body portion integral with the second body portion and a detector arrangement for giving the indication when the breakable interconnecting element of the sensor is ruptured;

and wherein at least two of the sensors are oriented differently from one another, such that a first sensor is more sensitive than a second sensor to a force in a first direction, and the second sensor is more sensitive than the first sensor to a force in a second direction different to the first direction.

26. The method of claim 25, further comprising registering in a non-volatile memory a status of the breakable component of each sensor.

27. A method as in claim 26, comprising registering the status of the breakable component at power-up and power-down events of a device comprising the acceleration sensor arrangement.

28. A method as in claim 27, comprising storing time-stamped data in the non-volatile memory indicating the status of the breakable component at the two most recent power-up and power-down events.

29. A method as in claim 28, comprising overwriting previous time-stamped data indicative of a previous event, if a current status of the breakable component is unchanged compared to a previous status indicated by the previous time-stamped data.