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Flexible apparatus and method to enhance capacitive force sensing

  • US 7,353,713 B2
  • Filed: 12/16/2005
  • Issued: 04/08/2008
  • Est. Priority Date: 04/09/2003
  • Status: Active Grant
First Claim
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1. A force measuring device comprising:

  • a sensor capacitor having a fixed surface and a movable surface substantially parallel to the fixed surface;

    at least one spring assembly positioned between the fixed surface and the movable surface;

    the at least one spring assembly to alter in height in response to a force applied perpendicular to the movable surface and to cause a change in a gap between the fixed surface and the movable surface;

    a circuit to generate a measurement of the force based on an algorithm that considers a change in a capacitance of the sensor capacitor; and

    a shielding spacer between the reference capacitor and a bottom layer to minimize an effect of a stray capacitance affecting the measurement.

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