Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
First Claim
1. A micro electromechanical system, comprising:
- a conductor layer;
a mechanical layer separated by a cavity from the conductor layer and configured to move relative to the conductor layer; and
a charged layer comprising an incorporated charged species, the charged layer disposed between the conductor layer and the mechanical layer, further comprising a plurality of interferometric light modulating devices, wherein some of the interferometric light modulating devices comprise the charged layer and other of the interferometric light modulating devices lack the charged layer.
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Accused Products
Abstract
By varying the spacing between a partially-reflective, partially-transmissive surface and a highly reflective surface positioned behind the partially-reflective, partially-transmissive surface, an interferometric modulator selectively creates constructive and/or destructive interference between light waves reflecting off the two surfaces. The spacing can be varied by applying a voltage to create electrostatic attraction between the two surfaces, which causes one or both surfaces to deform and move closer together. In the absence of such attraction, the surfaces are in a relaxed position, where they are farther apart from one another. A actuation voltage is needed to create sufficient electrostatic attraction to cause a surface to deform. The actuation voltage can be modified by implanting ions in a dielectric layer attached to one or both surfaces. Upon the application of a voltage, the ions create a baseline level of repulsion or attraction between the two surfaces, which thus require more or less voltage, respectively, to cause a surface to deform. The degree of ion implantation can be chosen to set the actuation voltage as desired, or the surfaces can be made to deform at a given voltage by appropriately selecting the degree of ion implantation.
454 Citations
20 Claims
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1. A micro electromechanical system, comprising:
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a conductor layer; a mechanical layer separated by a cavity from the conductor layer and configured to move relative to the conductor layer; and a charged layer comprising an incorporated charged species, the charged layer disposed between the conductor layer and the mechanical layer, further comprising a plurality of interferometric light modulating devices, wherein some of the interferometric light modulating devices comprise the charged layer and other of the interferometric light modulating devices lack the charged layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A microelectromechanical system, comprising:
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a plurality of interferometric modulators, each interferometric modulator comprising; a conductor layer; a mechanical layer separated by a cavity from the conductor layer and configured to move relative to the conductor layer; and a charged layer comprising an incorporated charged species, the charged layer disposed between the conductor layer and the mechanical layer, wherein at least some of the interferometric light modulating devices comprise different incorporated charged species than other of the interferometric light modulating devices. - View Dependent Claims (17)
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18. A microelectromechanical system, comprising:
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a conductor layer; a mechanical layer separated by a cavity from the conductor layer and configured to move relative to the conductor; a charged layer comprising an incorporated charged species, the charged layer disposed between the conductor layer and the mechanical layer; and an other charged layer spaced from the charged layer by the cavity, the other charged layer comprising additional incorporated charged species. - View Dependent Claims (19, 20)
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Specification