Light-emitting device, method of manufacturing a light-emitting device, and electronic equipment

• US 7,372,200 B2
• Filed: 06/02/2006
• Issued: 05/13/2008
• Est. Priority Date: 07/03/2001
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei
• Primary Examiner(s): Roy; Sikha
• Application Number:
  US11/446,307
• Publication Number:
  US 20060220551A1
• Time in Patent Office: 711 Days
• Field of Search: 313/506
• US Class Current: 313/506
• CPC Class Codes: H01L 2221/68368 used in a transfer process involving at least two transfer steps, i.e. including an intermediate handle substrate
• CPC Class Codes: H05B 33/22 characterised by the chemical or physical composition or the arrangement of auxiliary dielectric or reflective layers
• CPC Class Codes: H10K 2102/311 Flexible OLED
• CPC Class Codes: H10K 50/8426 Peripheral sealing arrangements, e.g. adhesives, sealants
• CPC Class Codes: H10K 50/844 Encapsulations
• CPC Class Codes: H10K 50/846 comprising getter material or desiccants
• CPC Class Codes: H10K 59/00 Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 59/1201 Manufacture or treatment
• CPC Class Codes: H10K 59/131 Interconnections, e.g. wiring lines or terminals
• CPC Class Codes: H10K 59/179 Interconnections, e.g. wiring lines or terminals
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask
• CPC Class Codes: H10K 71/80 using temporary substrates
• CPC Class Codes: H10K 77/111 Flexible substrates
• CPC Class Codes: Y02E 10/549 Organic PV cells
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

The present invention uses plastic film in vacuum sealing an OLED. Inorganic insulating films which can prevent oxygen or water from being penetrated therein and an organic insulating film which has a smaller internal stress than that of the inorganic insulating films are laminated on an inside of the plastic film. By sandwiching the organic insulating film between the inorganic insulating films, a stress can be relaxed. Further, by laminating a plurality of inorganic insulating films, even if one of the inorganic insulating films has a crack, the other inorganic insulating films can effectively prevent oxygen or water from being penetrated into an organic light emitting layer. Further, the stress of the entire sealing film can be relaxed and cracking due to the stress takes place less often.

Claims

1. A display device comprising:

a first substrate;

a wiring formed over the first substrate;

a second substrate over the wiring;

at least one contact hole in the second substrate;

a conductive resin provided in the contact hole; and

an FPC provided over the second substrate with a drying material interposed therebetween, the FPC electrically connected to the wiring through the conductive resin.

2. A display device according to claim 1, wherein the first substrate comprises a first plastic substrate.

3. A display device according to claim 1, wherein the first substrate comprises one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate, and polyethylene naphthalate.

4. A display device according to claim 1, wherein the second substrate comprises a second plastic substrate.

5. A display device according to claim 1, wherein the second substrate comprises one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate, and polyethylene naphthalate.

6. A display device according to claim 1, wherein the display device is an active matrix type light-emitting device.

7. A display device according to claim 1, wherein the display device is a passive type light-emitting device.

8. A display device according to claim 1, wherein the display device is incorporated in at least one selected from the group consisting of a video camera, a digital camera, a goggle-type display, a personal computer, and a portable telephone.

9. A display device comprising:

a first substrate;

a wiring formed over the first substrate;

a second substrate over the wiring;

at least one tapered contact hole in the second substrate;

an FPC provided over the second substrate with a drying material interposed therebetween, the FPC electrically connected to the wiring;

a plurality of insulating films covering the first substrate, the second substrate and a part of the FPC; and

a plastic film covering the plurality of insulating films,

wherein an internal stress of at least one of the plurality of insulating films is smaller than those of the other insulating films.

10. A display device according to claim 9, wherein the first substrate comprises a first plastic substrate.

11. A display device according to claim 9, wherein the first substrate comprises one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate, and polyethylene naphthalate.

12. A display device according to claim 9, wherein the other insulating films comprise one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride, and aluminum silicon oxynitride.

13. A display device according to claim 9, wherein the at least one of the plurality of insulating films comprises one selected from the group consisting of polyimide, acrylic, polyamide, polyimideamide, benzocyclobutene, an epoxy resin, polyethylene, polytetrafluoroethyelen, polystyrene, poly(p-phenylene vinylene), polyvinyl chloride, and a polyparaxylylene-based resin.

14. A display device according to claim 9, wherein the second substrate comprises a second plastic substrate.

15. A display device according to claim 9, wherein the second substrate comprises one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate, and polyethylene naphthalate.

16. A display device according to claim 9, wherein the plastic film is flexible.

17. A display device according to claim 9, wherein the plastic film comprises at least one selected from the group consisting of polyester, polypropylene, polyvinyl chloride, polyvinyl fluoride, polystyrene, polyacrylonitrile, polyethylene terephthalate, and nylon.

18. A display device according to claim 9, wherein the display device is an active matrix type light-emitting device.

19. A display device according to claim 9, wherein the display device is a passive type light-emitting device.

20. A display device according to claim 9, wherein the display device is incorporated in at least one selected from the group consisting of a video camera, a digital camera, a goggle-type display, a personal computer, and a portable telephone.

21. A display device according to claim 9, wherein the plurality of insulating films comprises a first insulating film, a second insulating film covering the first insulating film, and a third insulating film covering the second insulating film.

22. A light-emitting device according to claim 21, wherein at least one of the first insulating film and the third insulating film comprises one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride, and aluminum silicon oxynitride.

23. A light-emitting device according to claim 21, wherein the second insulating film comprises one selected from the group consisting of polyimide, acrylic, polyamide, polyimideamide, benzocyclobutene, an epoxy resin, polyethylene, polytetrafluoroethyelen, polystyrene, poly(p-phenylene vinylene), polyvinyl chloride, and a polyparaxylylene-based resin.

24. A display device comprising:

a first substrate;

a wiring formed over the first substrate;

a second substrate over the wiring;

at least one contact hole in the second substrate;

a conductive resin provided in the contact hole;

an FPC provided over the second substrate with a drying material interposed therebetween, the FPC electrically connected to the wiring through the conductive resin;

a plurality of insulating films covering the first substrate, the second substrate and a part of the FPC; and

a plastic film covering the plurality of insulating films,

wherein an internal stress of at least one of the plurality of insulating films is smaller than those of the other insulating films.

25. A display device according to claim 24, wherein the first substrate comprises a first plastic substrate.

26. A display device according to claim 24, wherein the first substrate comprises one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate, and polyethylene naphthalate.

27. A display device according to claim 24, wherein the other insulating films comprise one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride, and aluminum silicon oxynitride.

28. A display device according to claim 24, wherein the at least one of the plurality of insulating films comprises one selected from the group consisting of polyimide, acrylic, polyamide, polyimideamide, benzocyclobutene, an epoxy resin, polyethylene, polytetrafluoroethyelen, polystyrene, poly(p-phenylene vinylene), polyvinyl chloride, and a polyparaxylylene-based resin.

29. A display device according to claim 24, wherein the second substrate comprises a second plastic substrate.

30. A display device according to claim 24, wherein the second substrate comprises one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate, and polyethylene naphthalate.

31. A display device according to claim 24, wherein the plastic film is flexible.

32. A display device according to claim 24, wherein the plastic film comprises at least one selected from the group consisting of polyester, polypropylene, polyvinyl chloride, polyvinyl fluoride, polystyrene, polyacrylonitrile, polyethylene terephthalate, and nylon.

33. A display device according to claim 24, wherein the display device is an active matrix type light-emitting device.

34. A display device according to claim 24, wherein the display device is a passive type light-emitting device.

35. A display device according to claim 24, wherein the display device is incorporated in at least one selected from the group consisting of a video camera, a digital camera, a goggle-type display, a personal computer, and a portable telephone.

36. A display device according to claim 24, wherein the plurality of insulating films comprises a first insulating film , a second insulating film covering the first insulating film, and a third insulating film covering the second insulating film.

37. A light-emitting device according to claim 36, wherein at least one of the first insulating film and the third insulating film comprises one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride, and aluminum silicon oxynitride.

38. A light-emitting device according to claim 36, wherein the second insulating film comprises one selected from the group consisting of polyimide, acrylic, polyamide, polyimideamide, benzocyclobutene, an epoxy resin, polyethylene, polytetrafluoroethyelen, polystyrene, poly(p-phenylene vinylene), polyvinyl chloride, and a polyparaxylylene-based resin.

39. A display device comprising:

a first substrate;

a display element formed over the first substrate;

a second substrate over the display element;

at least one contact hole in the second substrate;

a conductive resin provided in the contact hole; and

an FPC provided over the second substrate with a drying material interposed therebetween, the FPC electrically connected to the display element through the conductive resin.

40. A display device according to claim 39, wherein the first substrate comprises a first plastic substrate.

41. A display device according to claim 39, wherein the first substrate comprises one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate, and polyethylene naphthalate.

42. A display device according to claim 39, wherein the second substrate comprises a second plastic substrate.

43. A display device according to claim 39, wherein the second substrate comprises one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate, and polyethylene naphthalate.

44. A display device according to claim 39, wherein the display element is a light-emitting element.

45. A display device according to claim 39, wherein the display device is an active matrix type light-emitting device.

46. A display device according to claim 39, wherein the display device is a passive type light-emitting device.

47. A display device according to claim 39, wherein the display device is incorporated in at least one selected from the group consisting of a video camera, a digital camera, a goggle-type display, a personal computer, and a portable telephone.

48. A display device comprising:

a first substrate;

a display element formed over the first substrate;

a second substrate over the display element;

at least one tapered contact hole in the second substrate;

an FPC provided over the second substrate with a drying material interposed therebetween, the FPC electrically connected to the display element;

a plurality of insulating films covering the first substrate, the second substrate and a part of the FPC; and

a plastic film covering the plurality of insulating films,

wherein an internal stress of at least one of the plurality of insulating films is smaller than those of the other insulating films.

49. A display device according to claim 48, wherein the first substrate comprises a first plastic substrate.

50. A display device according to claim 48, wherein the first substrate comprises one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate, and polyethylene naphthalate.

51. A display device according to claim 48, wherein the other insulating films comprise one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride, and aluminum silicon oxynitride.

52. A display device according to claim 48, wherein the at least one of the plurality of insulating films comprises one selected from the group consisting of polyimide, acrylic, polyamide, polyimideamide, benzocyclobutene, an epoxy resin, polyethylene, polytetrafluoroethyelen, polystyrene, poly(p-phenylene vinylene), polyvinyl chloride, and a polyparaxylylene-based resin.

53. A display device according to claim 48, wherein the second substrate comprises a second plastic substrate.

54. A display device according to claim 48, wherein the second substrate comprises one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate, and polyethylene naphthalate.

55. A display device according to claim 48, wherein the plastic film is flexible.

56. A display device according to claim 48, wherein the plastic film comprises at least one selected from the group consisting of polyester, polypropylene, polyvinyl chloride, polyvinyl fluoride, polystyrene, polyacrylonitrile, polyethylene terephthalate, and nylon.

57. A display device according to claim 48, wherein the display element is a light-emitting element.

58. A display device according to claim 48, wherein the display device is an active matrix type light-emitting device.

59. A display device according to claim 48, wherein the display device is a passive type light-emitting device.

60. A display device according to claim 48, wherein the display device is incorporated in at least one selected from the group consisting of a video camera, a digital camera, a goggle-type display, a personal computer, and a portable telephone.

61. A display device according to claim 48, wherein the plurality of insulating films comprises a first insulating film, a second insulating film covering the first insulating film, and a third insulating film covering the second insulating film.

62. A light-emitting device according to claim 61, wherein at least one of the first insulating film and the third insulating film comprises one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride, and aluminum silicon oxynitride.

63. A light-emitting device according to claim 61, wherein the second insulating film comprises one selected from the group consisting of polyimide, acrylic, polyamide, polyimideamide, benzocyclobutene, an epoxy resin, polyethylene, polytetrafluoroethyelen, polystyrene, poly(p-phenylene vinylene), polyvinyl chloride, and a polyparaxylylene-based resin.

64. A display device comprising:

a first substrate;

a display element formed over the first substrate;

a second substrate over the display element;

at least one contact hole in the second substrate;

a conductive resin provided in the contact hole;

an FPC provided over the second substrate and with a drying material interposed therebetween, the FPC electrically connected to the display element through the conductive resin;

a plurality of insulating films covering the first substrate, the second substrate and a part of the FPC; and

a plastic film covering the plurality of insulating films,

wherein an internal stress of at least one of the plurality of insulating films is smaller than those of the other insulating films.

65. A display device according to claim 64, wherein the first substrate comprises a first plastic substrate.

66. A display device according to claim 64, wherein the first substrate comprises one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate, and polyethylene naphthalate.

67. A display device according to claim 64, wherein the other insulating films comprise one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride, and aluminum silicon oxynitride.

68. A display device according to claim 64, wherein the at least one of the plurality of insulating films comprises one selected from the group consisting of polyimide, acrylic, polyamide, polyimideamide, benzocyclobutene, an epoxy resin, polyethylene, polytetrafluoroethyelen, polystyrene, poly(p-phenylene vinylene), polyvinyl chloride, and a polyparaxylylene-based resin.

69. A display device according to claim 64, wherein the second substrate comprises a second plastic substrate.

70. A display device according to claim 64, wherein the second substrate comprises one selected from the group consisting of polyether sulfone, polycarbonate, polyethylene terephthalate, and polyethylene naphthalate.

71. A display device according to claim 64, wherein the plastic film, is flexible.

72. A display device according to claim 64, wherein the plastic film comprises at least one selected from the group consisting of polyester, polypropylene, polyvinyl chloride, polyvinyl fluoride, polystyrene, polyacrylonitrile, polyethylene terephthalate, and nylon.

73. A display device according to claim 64, wherein the display element is a light-emitting element.

74. A display device according to claim 64, wherein the display device is an active matrix type light-emitting device.

75. A display device according to claim 64, wherein the display device is a passive type light-emitting device.

76. A display device according to claim 64, wherein the display device is incorporated in at least one selected from the group consisting of a video camera, a digital camera, a goggle-type display, a personal computer, and a portable telephone.

77. A display device according to claim 64, wherein the plurality of insulating films comprises a first insulating film, a second insulating film covering the first insulating film, and a third insulating film covering the second insulating film.

78. A light-emitting device according to claim 77, wherein at least one of the first insulating film and the third insulating film comprises one selected from the group consisting of silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride, and aluminum silicon oxynitride.

79. A light-emitting device according to claim 77, wherein the second insulating film comprises one selected from the group consisting of polyimide, acrylic, polyamide, polyimideamide, benzocyclobutene, an epoxy resin, polyethylene, polytetrafluoroethyelen, polystyrene, poly(p-phenylene vinylene), polyvinyl chloride, and a polyparaxylylene-based resin.