Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void

• US 7,387,737 B2
• Filed: 12/09/2005
• Issued: 06/17/2008
• Est. Priority Date: 04/26/2001
• Status: Expired due to Fees

• Current Assignee: Rockwell Automation Technologies Incorporated (Allen-Bradley Co., Inc.)
• Original Assignee: Rockwell Automation Technologies Incorporated (Allen-Bradley Co., Inc.)
• Inventors: Harris, Richard D., Lucak, Mark A., Knieser, Michael J., Kretschmann, Robert J.
• Primary Examiner(s): CULBERT, ROBERTS P
• Application Number:
  US11/299,151
• Publication Number:
  US 20060096947A1
• Time in Patent Office: 921 Days
• Field of Search: 216/2, 216/11, 216/33, 216/36, 438/40, 438/50, 438/51, 438/455, 438/456, 438/52
• US Class Current: 216/2
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2203/0315 Cavities
• CPC Class Codes: B81C 1/00484 Processes for releasing structures not provided for in group B81C1/00476
• CPC Class Codes: B81C 1/00626 Processes for achieving a desired geometry not provided for in groups B81C1/00563 - B81C1/00619
• CPC Class Codes: B81C 2201/019 Bonding or gluing multiple substrate layers
• CPC Class Codes: B81C 2203/0109 Bonding an individual cap on the substrate
• CPC Class Codes: H01G 5/40 Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations

Abstract

A method for fabricating an electrically isolated MEMS device having an outer stationary MEMS element and an inner movable MEMS element is provided that does not use a sacrificial layer. Rather, a pair of spacers are defined on the outer portions of the upper surface of a conductive wafer, and an insulating material is deposited thereon. The spacers are attached to a substrate to define an internal void therein. The wafer is then patterned to form the outer MEMS element as well as a conductive member for the inner MEMS element, separated from the outer MEMS element by a gap. A portion of the insulating layer that is disposed in the gap is then removed, thereby releasing the inner MEMS element from the stationary MEMS element.

Claims

1. A method of fabricating a circuit device comprising the steps of:

(a) providing a wafer and a substrate;

(b) depositing a first layer on the wafer;

(c) depositing a spacer material directly onto the first layer without first etching the first layer;

(d) etching through the spacer material to the first layer to form a recess within a middle portion of the spacer material using an etchant that preferentially etches the spacer material without etching the first layer;

(e) attaching the spacer material to the substrate without an intermediary adhesive layer to form a composite structure having a void disposed therein; and

(f) etching into the wafer towards the substrate to remove a portion of the wafer and release a movable element.

2. The method of claim 1 wherein the moveable element is a microelectromechanical system (MEMS) device.

3. The method of claim 1 wherein step (d) is performed without the use of a sacrificial layer arranged between the spacer material and the first layer.

4. The method of claim 1 wherein step (f) further comprises forming a gap between the movable element and the substrate, the gap being at least partially aligned with the void.

5. The method of claim 4 wherein the gap has a size that varies in response to movement by the movable element.

6. The method of claim 4 wherein step (c) further comprises producing first and second conductive elements associated with the substrate that are electrically isolated from each other.

9. The method of claim 1 wherein the wafer is conductive.

10. The method of claim 1 wherein the substrate is conductive.

11. The method of claim 1 wherein the spacer material is an insulator.

12. The method of claim 1 wherein the substrate is selected from the group consisting of glass, high resistivity silicon, crystalline sapphire, and ceramic.

13. The method of claim 1 wherein the substrate is nonconductive.

14. The method of claim 13 wherein to substrate is selected from to group consisting of silicon, silicon carbide, and gallium arsenide.

15. The method of claim 14 wherein the wafer comprises silicon.

7. A metod of fabricating a circuit device comprising the steps of:

(a) providing a wafer and a substrate;

(b) depositing a first layer on the wafer;

(c) depositing a spacer material directly onto the first layer;

(d) etching through the spacer material to the first layer to form a recess within a middle portion of the spacer material using an etchant that preferentially etches the spacer materlal without etching the first layer;

(e) attaching the spacer material to the substrate to form composite structure having a void disposed therein ; and

(f) etching into the wafer toward the substrate to remove a portion of the wafer and release a movable element,

wherein step (d) further comprises depositing an insulating layer onto the wafer in the recess.

8. The method of claim 7 wherein the insulating layer is selected from the group consisting of silicon nitride and silicon dioxide.

16. A method of fabricating a circuit device comprising the steps of:

(a) providing a wafer and a substrate;

(b) partially etching a middle portion of the wafer so as to form a recess in the middle portion of the wafter;

(c) depositing a first layer on the partially etched wafer, wherein the first layer is formed over the recess;

(d) attaching the first layer to the substrate such that a void is disposed between the substrate and the first layer;

(e) forming a movable element in the wafer; and

(f) etching into the wafer towards the substrate to remove a portion of the wafer and the first layer to release the movable element.

17. The method of claim 16 wherein the moveable element is a MEMS device.

18. The method of claim 16 wherein the movable element comprises a plurality of conductive elements electrically isolated from one another by the first layer, wherein the first layer is an insulator.

19. The method of claim 16 wherein step (f) further comprises forming a gap between the movable element and the substrate, the gap being at least partially aligned with the void.

20. The method of claim 19 wherein step (c) further comprises producing first and second conductive elements associated with the substrate that are electrically isolated from each other.

21. A method of fabricating a circuit device comprising the steps of:

(a) providing a wafer and a substrate;

(b) depositing a first layer on the wafer;

(c) depositing a spacer material on the first layer;

(d) selectively etching the first layer independently from selectively etching the spacer material without a sacrificial layer disposed between the first layer and the spacer material to form a recess within a middle portion of the spacer material;

(e) attaching the spacer material to the substrate to form a composite structure having a void disposed therein; and

(f) etching into the wafer towards the substrate to remove a portion of the wafer and release a movable element,

wherein step (d) further comprises depositing an insulating layer onto the wafer in the recess.