Micromachined devices
First Claim
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1. A method comprising:
- forming a micromachined gyroscope including a first structure and a second structure,the first structure for being dithered at a resonant frequency along a dither direction,the first and second structures being movable along a sensing direction orthogonal to the dither direction,the gyroscope further including a plurality of fingers forming part of a capacitor and circuitry for sensing the movement of the fingers along the sensing direction to provide a sensed signal indicative of a rotational velocity; and
packaging the gyroscope under ambient conditions,wherein the forming includes forming four substantially identical gyroscopes coupled in a cross-quad arrangement.
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Abstract
A micromachined device has a body suspended over a substrate and movable in a plane relative to the substrate. The body has a perimeter portion, a first cross-piece portion extending from one part of the perimeter portion to another part of the perimeter portion to define at least first and second apertures, a first plurality of fingers extending along parallel axes from the perimeter portion into the first aperture, and a second plurality of fingers extending along parallel axes from the perimeter portion into the second aperture.
38 Citations
2 Claims
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1. A method comprising:
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forming a micromachined gyroscope including a first structure and a second structure, the first structure for being dithered at a resonant frequency along a dither direction, the first and second structures being movable along a sensing direction orthogonal to the dither direction, the gyroscope further including a plurality of fingers forming part of a capacitor and circuitry for sensing the movement of the fingers along the sensing direction to provide a sensed signal indicative of a rotational velocity; and packaging the gyroscope under ambient conditions, wherein the forming includes forming four substantially identical gyroscopes coupled in a cross-quad arrangement. - View Dependent Claims (2)
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Specification
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Current AssigneeAnalog Devices, Inc.
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Original AssigneeAnalog Devices, Inc.
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InventorsGeen, John A., Carow, Donald W.
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Primary Examiner(s)CHAPMAN JR, JOHN E
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Application NumberUS11/193,246Publication NumberTime in Patent Office1,103 DaysField of Search735/041.2, 735/041.4US Class Current73/504.12CPC Class CodesG01C 19/5719 using planar vibrating mass...
