Plasma generation apparatus
First Claim
1. A plasma generation apparatus, comprising:
- a chamber having a chamber lid and defining an airtight reaction region for generating a plasma;
a susceptor in the chamber;
a gas supply means supplying a process gas to the chamber; and
a toroidal core vertically disposed with respect to the susceptor through the chamber lid, comprising;
a toroidal ferromagnetic core combined with the chamber, the toroidal ferromagnetic core having a first portion outside the chamber and a second portion inside the chamber, the second portion having an opening portion;
a radio frequency (RF) power supply connected to the chamber;
a phase shifter connected to the RF power supply;
an induction coil electrically connected to the RF power supply, the induction coil rolling the first portion; and
a matching circuit matching an impedance between the RF power supply and the induction coil,wherein the plasma generation apparatus has at lease two toroidal ferromagnetic cores and the RF power supply independently corresponding to each of the at least two toroidal ferromagnetic cores.
1 Assignment
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Accused Products
Abstract
A plasma generation apparatus includes: a chamber having a chamber lid and defining an airtight reaction region; a susceptor in the chamber; a gas supplier supplying a process gas to the chamber; and a toroidal core vertically disposed with respect to the susceptor through the chamber lid, including: a toroidal ferromagnetic core combined with the chamber, the toroidal ferromagnetic core having a first portion outside the chamber and a second portion inside the chamber, the second portion having an opening portion; a radio frequency (RF) power supply connected to the chamber; an induction coil electrically connected to the RF power supply, the induction coil rolling the first portion; and a matching circuit matching an impedance between the RF power supply and the induction coil.
18 Citations
18 Claims
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1. A plasma generation apparatus, comprising:
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a chamber having a chamber lid and defining an airtight reaction region for generating a plasma; a susceptor in the chamber; a gas supply means supplying a process gas to the chamber; and a toroidal core vertically disposed with respect to the susceptor through the chamber lid, comprising; a toroidal ferromagnetic core combined with the chamber, the toroidal ferromagnetic core having a first portion outside the chamber and a second portion inside the chamber, the second portion having an opening portion; a radio frequency (RF) power supply connected to the chamber; a phase shifter connected to the RF power supply; an induction coil electrically connected to the RF power supply, the induction coil rolling the first portion; and a matching circuit matching an impedance between the RF power supply and the induction coil, wherein the plasma generation apparatus has at lease two toroidal ferromagnetic cores and the RF power supply independently corresponding to each of the at least two toroidal ferromagnetic cores. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A plasma generation apparatus, comprising:
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a chamber having a chamber lid and defining an airtight reaction region for generating a plasma; a susceptor in the chamber; a gas supply means supplying a process gas to the chamber; a plasma-inspecting unit measuring a plasma parameter in the chamber; a feedback control unit controlling one of the power supply unit and the matching circuit according to information of the plasma parameter; and a toroidal core module including a toroidal core vertically disposed with respect to the susceptor through the chamber lid, the toroidal core combined with the chamber, the toroidal core having a first portion outside the chamber and a second portion inside the chamber, the second portion having an opening portion, comprising; a power supply unit generating a radio frequency (RF) power by be connected to an external power supply; an induction coil electrically connected to the power supply unit, the induction coil rolling the toroidal core; a matching circuit matching an impedance between the power supply unit and the induction coil; a housing surrounding the toroidal core, the power supply unit, the induction coil and the matching circuit; and a rotation driving unit rotating the toroidal core with a predetermined angle and controlled by the feedback control unit in the housing. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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Specification