Pressure sensor with deflectable diaphragm
First Claim
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1. A pressure sensor for sensing a pressure of a process fluid:
- a sensor body having a cavity formed therein;
a pressure connection extending through the cavity into the body;
a deflectable diaphragm in the cavity configured to deflect in response to a pressure applied to the cavity through the pressure connection;
an electrode carried by the diaphragm configured to form a variable capacitor with the pressure sensor body having a capacitance which varies in response to the applied pressure; and
an electrical connection to the electrode which extends to outside of the pressure sensor body wherein the sensor body is formed from two sensor body halves.
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Abstract
A pressure sensor for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein. A deflectable diaphragm is positioned in the cavity and deflects in response to a pressure applied to the cavity. An electrode on the diaphragm forms a variable capacitor with the pressure sensor body. The capacitance varies in response to the applied pressure.
95 Citations
29 Claims
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1. A pressure sensor for sensing a pressure of a process fluid:
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a sensor body having a cavity formed therein; a pressure connection extending through the cavity into the body; a deflectable diaphragm in the cavity configured to deflect in response to a pressure applied to the cavity through the pressure connection; an electrode carried by the diaphragm configured to form a variable capacitor with the pressure sensor body having a capacitance which varies in response to the applied pressure; and an electrical connection to the electrode which extends to outside of the pressure sensor body wherein the sensor body is formed from two sensor body halves. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 26, 28)
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16. A method of sensing pressure of a process fluid, comprising:
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providing an electrode carried by a deflectable diaphragm; placing the deflectable diaphragm in a sensor body; applying a pressure to the deflectable diaphragm through the sensor body to thereby cause deflection; measuring changes in a capacitance between the electrode on the deflectable diaphragm and the sensor body; and determining pressure based upon changes in the measured capacitance wherein the sensor body is formed from two sensor body halves. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 27, 29)
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Specification