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High-sensitivity optical scanning using memory integration

  • US 7,417,243 B2
  • Filed: 09/18/2006
  • Issued: 08/26/2008
  • Est. Priority Date: 06/22/2001
  • Status: Expired due to Fees
First Claim
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1. An inspection system comprising:

  • a light source providing non-continuous illumination;

    a two dimensional array of photosensors operative to acquire at a frame rate a plurality of at least partially overlapping two dimensional image frames of an object to be inspected, wherein said non-continuous illumination and said frame rate are generally synchronized; and

    a defect analyzer operative to receive said two dimensional image frames, to combine overlapping portions of said two dimensional image frames to generate a representation of said object to be inspected, and to provide a report of defects on said object to be inspected based on an inspection of said representation.

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