Display unit of a helmet or a vehicle or an airplane

• US 7,425,931 B1
• Filed: 02/15/2000
• Issued: 09/16/2008
• Est. Priority Date: 02/16/1995
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Teramoto, Satoshi, Arai, Yasuyuki, Yamazaki, Shunpei
• Primary Examiner(s): LEWIS, DAVID LEE
• Application Number:
  US09/504,235
• Time in Patent Office: 3,136 Days
• Field of Search: 345/7, 345/8, 345/55, 345/76, 345/87, 345/92, 345/205, 349/11, 349/42, 349/43, 349/122, 349/138, 257/59, 257/60, 257/66, 257/67, 257/57, 257/432
• US Class Current: 345/7
• CPC Class Codes: H01L 21/02422 Non-crystalline insulating materials, e.g. glass, polymers
• CPC Class Codes: H01L 21/02532 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/02672 using crystallisation enhancing elements
• CPC Class Codes: H01L 21/02675 using laser beams
• CPC Class Codes: H01L 2221/68318 Auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support
• CPC Class Codes: H01L 2221/68359 used as a support during manufacture of interconnect decals or build up layers
• CPC Class Codes: H01L 2221/68363 used in a transfer process involving transfer directly from an origin substrate to a target substrate without use of an intermediate handle substrate
• CPC Class Codes: H01L 27/1266 the substrate on which the devices are formed not being the final device substrate, e.g. using a temporary substrate
• CPC Class Codes: H01L 27/1277 using a crystallisation promoting species, e.g. local introduction of Ni catalyst
• CPC Class Codes: H01L 29/66757 Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate
• CPC Class Codes: Y10S 438/928 Front and rear surface processing
• CPC Class Codes: Y10S 438/977 Thinning or removal of substrate

Abstract

A method of manufacturing a semiconductor device, comprises the steps of: forming a first insulating film on a first substrate; forming a second insulating film on the first insulating film; forming an amorphous silicon film on the second insulating film; holding a metal element that promotes the crystallization of silicon in contact with a surface of the amorphous silicon film; crystallizing the amorphous silicon film through a heat treatment to obtain a crystalline silicon film; forming a thin-film transistor using the crystalline silicon film; forming a sealing layer that seals the thin-film transistor; bonding a second substrate having a translucent property to the sealing layer; and removing the first insulating film to peel off the first substrate.

Claims

1. A display unit of a helmet comprising:

a pair of transparent substrates comprising a resin, each of said transparent substrates having a curved surface; and

a pixel thin film transistor provided over one of said transparent substrates and comprising a source region and a drain region and a channel formation region and a gate electrode, said channel formation region provided between said source region and said drain region, said gate electrode provided adjacent to said channel formation region with a gate insulating film therebetween,

wherein at least said channel formation region contains hydrogen atoms at a density of 1×

10²⁰ atoms cm<sup>−

3</sup> or lower, and contains carbon and nitrogen atoms at a density of 5×

10¹⁸ atoms cm<sup>−

3</sup> or lower, and contains oxygen atoms at a density of 5×

10¹⁹ atoms cm<sup>−

3</sup> or lower,

wherein said helmet is provided with a shield; and

wherein said display unit is provided over said shield.

2. The unit of claim 1 wherein said helmet is used for an auto-bicycle.

3. The unit of claim 1 further comprising an active matrix circuit between said transparent substrates.

4. The unit of claim 1 wherein information is displayed on said shield.

5. The unit of claim 4 wherein said information comprises a speed.

6. The unit of claim 1 wherein said display unit comprises a liquid-crystal display.

7. The unit of claim 1 wherein said display unit comprises an EL display.

8. The unit of claim 1 wherein said density of said hydrogen atoms is higher than 1×

10¹⁵ atoms cm<sup>−

3</sup>, said density of said carbon and nitrogen atoms is higher than 1×

10¹⁶ atoms cm<sup>−

3</sup>, and said density of said oxygen atoms is higher than 1×

10¹⁷ atoms cm<sup>−

3</sup>.

9. A display unit of a helmet comprising:

a pair of transparent substrates comprising a tempered glass, each of said transparent substrates having a curved surface; and

a pixel thin film transistor provided over one of said transparent substrates and comprising a source region and a drain region and a channel formation region and a gate electrode, said channel formation region provided between said source region and said drain region, said gate electrode provided adjacent to said channel formation region with a gate insulating film therebetween,

wherein at least said channel formation region contains hydrogen atoms at a density of 1×

10²⁰ atoms cm<sup>−

3</sup> or lower, and contains carbon and nitrogen atoms at a density of 5×

10¹⁸ atoms cm<sup>−

3</sup> or lower, and contains oxygen atoms at a density of 5×

10¹⁹ atoms cm<sup>−

3</sup> or lower,

wherein said helmet is provided with a shield; and

wherein said display unit is provided over said shield.

10. The unit of claim 9 wherein said helmet is used for an auto-bicycle.

11. The unit of claim 9 further comprising an active matrix circuit between said transparent substrates.

12. The unit of claim 9 wherein information is displayed on said shield.

13. The unit of claim 12 wherein said information comprises a speed.

14. The unit of claim 9 wherein said display unit comprises a liquid-crystal display.

15. The unit of claim 9 wherein said display unit comprises an EL display.

16. The unit of claim 9 wherein said density of said hydrogen atoms is higher than 1×

10¹⁵ atoms cm<sup>−

3</sup>, said density of said carbon and nitrogen atoms is higher than 1×

10¹⁶ atoms cm<sup>−

3</sup>, and said density of said oxygen atoms is higher than 1×

10¹⁷ atoms cm<sup>−

3</sup>.

17. A display unit of a vehicle comprising:

a pair of transparent substrates comprising a resin, each of said transparent substrates having a curved surface; and

a pixel thin film transistor provided over one of said transparent substrates and comprising a source region and a drain region and a channel formation region and a gate electrode, said channel formation region provided between said source region and said drain region, said gate electrode provided adjacent to said channel formation region with a gate insulating film therebetween,

wherein at least said channel formation region contains hydrogen atoms at a density of 1×

10²⁰ atoms cm<sup>−

3</sup> or lower, and contains carbon and nitrogen atoms at a density of 5×

10¹⁸ atoms cm<sup>−

3</sup> or lower, and contains oxygen atoms at a density of 5×

10¹⁹ atoms cm<sup>−

3</sup> or lower,

wherein said vehicle is provided with a front glass; and

wherein said display unit is provided over said front glass.

18. The unit of claim 17 further comprising an active matrix circuit between said transparent substrates.

19. The unit of claim 17 wherein information is displayed on said front glass.

20. The unit of claim 17 wherein said display unit comprises a liquid-crystal display.

21. The unit of claim 17 wherein said display unit comprises an EL display.

22. The unit of claim 17 wherein said density of said hydrogen atoms is higher than 1×

10¹⁵ atoms cm<sup>−

3</sup>, said density of said carbon and nitrogen atoms is higher than 1×

10¹⁶ atoms cm<sup>−

3</sup>, and said density of said oxygen atoms is higher than 1×

10¹⁷ atoms cm<sup>−

3</sup>.

23. A display unit of a vehicle comprising:

a pair of transparent substrates comprising a tempered glass, each of said transparent substrates having a curved surface; and

a pixel thin film transistor provided over one of said transparent substrates and comprising a source region and a drain region and a channel formation region and a gate electrode, said channel formation region provided between said source region and said drain region, said gate electrode provided adjacent to said channel formation region with a gate insulating film therebetween,

wherein at least said channel formation region contains hydrogen atoms at a density of 1×

10²⁰ atoms cm<sup>−

3</sup> or lower, and contains carbon and nitrogen atoms at a density of 5×

10¹⁸ atoms cm<sup>−

3</sup> or lower, and contains oxygen atoms at a density of 5×

10¹⁹ atoms cm<sup>−

3</sup> or lower,

wherein said vehicle is provided with a front glass; and

wherein said display unit is provided over said front glass.

24. The unit of claim 23 further comprising an active matrix circuit between said transparent substrates.

25. The unit of claim 23 wherein information is displayed on said front glass.

26. The unit of claim 23 wherein said display unit comprises a liquid-crystal display.

27. The unit of claim 23 wherein said display unit comprises an EL display.

28. The unit of claim 23 wherein said density of said hydrogen atoms is higher than 1×

10¹⁵ atoms cm<sup>−

3</sup>, said density of said carbon and nitrogen atoms is higher than 1×

10¹⁶ atoms cm<sup>−

3</sup>, and said density of said oxygen atoms is higher than 1×

10¹⁷ atoms cm<sup>−

3</sup>.

29. A display unit of an airplane comprising:

a pair of transparent substrates comprising a resin, each of said transparent substrates having a curved surface; and

a pixel thin film transistor provided over one of said transparent substrates and comprising a source region and a drain region and a channel formation region and a gate electrode, said channel formation region provided between said source region and said drain region, said gate electrode provided adjacent to said channel formation region with a gate insulating film therebetween,

wherein at least said channel formation region contains hydrogen atoms at a density of 1×

10²⁰ atoms cm<sup>−

3</sup> or lower, and contains carbon and nitrogen atoms at a density of 5×

10¹⁸ atoms cm<sup>−

3</sup> or lower, and contains oxygen atoms at a density of 5×

10¹⁹ atoms cm<sup>−

3</sup> or lower,

wherein said airplane is provided with a front glass; and

wherein said display unit is provided over said front glass.

30. The unit of claim 29 further comprising an active matrix circuit between said transparent substrates.

31. The unit of claim 29 wherein information is displayed on said front glass.

32. The unit of claim 29 wherein said display unit comprises a liquid-crystal display.

33. The unit of claim 29 wherein said display unit comprises an EL display.

34. The unit of claim 29 wherein said density of said hydrogen atoms is higher than 1×

10¹⁵ atoms cm<sup>−

3</sup>, said density of said carbon and nitrogen atoms is higher than 1×

10¹⁶ atoms cm<sup>−

3</sup>, and said density of said oxygen atoms is higher than 1×

10¹⁷ atoms cm<sup>−

3</sup>.

35. A display unit of an airplane comprising:

a pair of transparent substrates comprising a tempered glass, each of said transparent substrates having a curved surface; and

a pixel thin film transistor provided over one of said transparent substrates and comprising a source region and a drain region and a channel formation region and a gate electrode, said channel formation region provided between said source region and said drain region, said gate electrode provided adjacent to said channel formation region with a gate insulating film therebetween,

wherein at least said channel formation region contains hydrogen atoms at a density of 1×

10²⁰ atoms cm<sup>−

3</sup> or lower, and contains carbon and nitrogen atoms at a density of 5×

10¹⁸ atoms cm<sup>−

3</sup> or lower, and contains oxygen atoms at a density of 5×

10¹⁹ atoms cm<sup>−

3</sup> or lower,

wherein said airplane is provided with a front glass; and

wherein said display unit is provided over said front glass.

36. The unit of claim 35 further comprising an active matrix circuit between said transparent substrates.

37. The unit of claim 35 wherein information is displayed on said front glass.

38. The unit of claim 35 wherein said display unit comprises a liquid-crystal display.

39. The unit of claim 35 wherein said display unit comprises an EL display.

40. The unit of claim 35 wherein said density of said hydrogen atoms is higher than 1×

10¹⁵ atoms cm<sup>−

3</sup>, said density of said carbon and nitrogen atoms is higher than 1×

10¹⁶ atoms cm<sup>−

3</sup>, and said density of said oxygen atoms is higher than 1×

10¹⁷ atoms cm<sup>−

3</sup>.

41. A helmet comprising:

a shield;

a pair of transparent substrates comprising a resin provided over said shield, each of said transparent substrates having a curved surface; and

a pixel thin film transistor provided over one of said transparent substrates and comprising a source region and a drain region and a channel formation region and a gate electrode, said channel formation region provided between said source region and said drain region, said gate electrode provided adjacent to said channel formation region with a gate insulating film therebetween,

wherein at least said channel formation region contains hydrogen and halogen atoms at a density of 1×

10²⁰ atoms cm<sup>−

3</sup> or lower, and contains carbon and nitrogen atoms at a density of 5×

10¹⁸ atoms cm<sup>−

3</sup> or lower, and contains oxygen atoms at a density of 5×

10¹⁹ atoms cm<sup>−

3</sup> or lower.

42. The helmet of claim 41 wherein said information comprises a speed.

43. The helmet of claim 41 wherein said helmet is used for an auto-bicycle.

44. The helmet of claim 41 further comprising an active matrix circuit between said transparent substrates.

45. The helmet of claim 41 wherein information is displayed on said shield.

46. The helmet of claim 41 wherein said density of said hydrogen and halogen atoms is higher than 1×

10¹⁵ atoms cm<sup>−

3</sup>, and density of said carbon and nitrogen atoms is higher than 1×

10¹⁶ atoms cm<sup>−

3</sup>, and said density of said oxygen atoms is higher than 1×

10¹⁷ atoms cm<sup>−

3</sup>.

47. A helmet comprising:

a shield;

a pair of transparent substrates comprising a tempered glass provided over said shield, each of said transparent substrates having a curved surface; and

a pixel thin film transistor provided over one of said transparent substrates and comprising a source region and a drain region and a channel formation region and a gate electrode, said channel formation region provided between said source region and said drain region, said gate electrode provided adjacent to said channel formation region with a gate insulating film therebetween,

wherein at least said channel formation region contains hydrogen and halogen atoms at a density of 1×

10²⁰ atoms cm<sup>−

3</sup> or lower, and contains carbon and nitrogen atoms at a density of 5×

10¹⁸ atoms cm<sup>−

3</sup> or lower, and contains oxygen atoms at a density of 5×

10¹⁹ atoms cm<sup>−

3</sup> or lower.

48. The helmet of claim 47 wherein said helmet is used for an auto-bicycle.

49. The helmet of claim 47 further comprising an active matrix circuit between said transparent substrates.

50. The helmet of claim 47 wherein information is displayed on said shield.

51. The helmet of claim 50 wherein said information comprises a speed.

52. The helmet of claim 47 wherein said density of said hydrogen and halogen atoms is higher than 1×

10¹⁵ atoms cm<sup>−

3</sup>, said density of said carbon and nitrogen atoms is higher than 1×

10¹⁶ atoms cm<sup>−

3</sup>, and said density of said oxygen atoms is higher than 1×

10¹⁷ atoms cm<sup>−

3</sup>.

53. A vehicle comprising:

a front glass;

a pair of transparent substrates comprising a resin provided over said front glass, each of said transparent substrates having a curved surface; and

a pixel thin film transistor provided over one of said transparent substrates and comprising a source region and a drain region and a channel formation region and a gate electrode, said channel formation region provided between said source region and said drain region, said gate electrode provided adjacent to said channel formation region with a gate insulating film therebetween,

wherein at least said channel formation region contains hydrogen and halogen atoms at a density of 1×

10²⁰ atoms cm<sup>−

3</sup> or lower, and contains carbon and nitrogen atoms at a density of 5×

10¹⁸ atoms cm<sup>−

3</sup> or lower, and contains oxygen atoms at a density of 5×

10¹⁹ atoms cm<sup>−

3</sup> or lower.

54. The vehicle of claim 53 further comprising an active matrix circuit between said transparent substrates.

55. The vehicle of claim 53 wherein information is displayed on said front glass.

56. The vehicle of claim 53 wherein said density of said hydrogen and halogen atoms is higher than 1×

10¹⁵ atoms cm<sup>−

3</sup>, said density of said carbon and nitrogen atoms is higher than 1×

10¹⁶ atoms cm<sup>−

3</sup>, and said density of said oxygen atoms is higher than 1×

10¹⁷ atoms cm<sup>−

3</sup>.

57. A vehicle comprising:

a front glass;

a pair of transparent substrates comprising a tempered glass provided over said front glass, each of said transparent substrates having a curved surface; and

a pixel thin film transistor provided over one of said transparent substrates and comprising a source region and a drain region and a channel formation region and a gate electrode, said channel formation region provided between said source region and said drain region, said gate electrode provided adjacent to said channel formation region with a gate insulating film therebetween,

wherein at least said channel formation region contains hydrogen and halogen atoms at a density of 1×

10²⁰ atoms cm<sup>−

3</sup> or lower, and contains carbon and nitrogen atoms at a density of 5×

10¹⁸ atoms cm<sup>−

3</sup> or lower, and contains oxygen atoms at a density of 5×

10¹⁹ atoms cm<sup>−

3</sup> or lower.

58. The vehicle of claim 57 further comprising an active matrix circuit between said transparent substrates.

59. The vehicle of claim 57 wherein information is displayed on said front glass.

60. The vehicle of claim 57 wherein said density of said hydrogen and halogen atoms is higher than 1×

10¹⁵ atoms cm<sup>−

3</sup>, said density of said carbon and nitrogen atoms is higher than 1×

10¹⁶ atoms cm<sup>−

3</sup>, and said density of said oxygen atoms is higher than 1×

10¹⁷ atoms cm<sup>−

3</sup>.

61. An airplane comprising:

a front glass;

a pair of transparent substrates comprising a resin provided over said front glass, each of said transparent substrates having a curved surface; and

a pixel thin film transistor provided over one of said transparent substrates and comprising a source region and a drain region and a channel formation region and a gate electrode, said channel formation region provided between said source region and said drain region, said gate electrode provided adjacent to said channel formation region with a gate insulating film therebetween,

wherein at least said channel formation region contains hydrogen and halogen atoms at a density of 1×

10²⁰ atoms cm<sup>−

3</sup> or lower, and contains carbon and nitrogen atoms at a density of 5×

10¹⁸ atoms cm<sup>−

3</sup> or lower, and contains oxygen atoms at a density of 5×

10¹⁹ atoms cm<sup>−

3</sup> or lower.

62. The airplane of claim 61 further comprising an active matrix circuit between said transparent substrates.

63. The airplane of claim 61 wherein information is displayed on said front glass.

64. The airplane of claim 61 wherein said density of said hydrogen and halogen atoms is higher than 1×

10¹⁵ atoms cm<sup>−

3</sup>, said density of said carbon and nitrogen atoms is higher than 1×

10¹⁶ atoms cm<sup>−

3</sup>, and said density of said oxygen atoms is higher than 1×

10¹⁷ atoms cm<sup>−

3</sup>.

65. An airplane comprising:

a front glass;

a pair of transparent substrates comprising a tempered glass provided over said front glass, each of said transparent substrates having a curved surface; and

a pixel thin film transistor provided over one of said transparent substrates and comprising a source region and a drain region and a channel formation region and a gate electrode, said channel formation region provided between said source region and said drain region, said gate electrode provided adjacent to said channel formation region with a gate insulating film therebetween,

wherein at least said channel formation region contains hydrogen and halogen atoms at a density of 1×

10²⁰ atoms cm<sup>−

3</sup> or lower, and contains carbon and nitrogen atoms at a density of 5×

10¹⁸ atoms cm<sup>−

3</sup> or lower, and contains oxygen atoms at a density of 5×

10¹⁹ atoms cm<sup>−

1</sup> or lower.

66. The airplane of claim 65 further comprising an active matrix circuit between said transparent substrates.

67. The airplane of claim 65 wherein information is displayed on said front glass.

68. The airplane of claim 65 wherein said density of said hydrogen and halogen atoms is higher than 1×

10¹⁵ atoms cm<sup>−

3</sup>, said density of said carbon and nitrogen atoms is higher than 1×

10¹⁶ atoms cm<sup>−

3</sup>, and said density of said oxygen atoms is higher than 1×

10¹⁷ atoms cm<sup>−

3</sup>.