Capacitive pressure sensor with reference chamber
First Claim
Patent Images
1. A capacitive pressure sensor comprising:
- a substrate assembly having a conductive layer;
a conductive membrane mounted to the substrate assembly so that a sealed reference chamber is defined by the conductive membrane and the substrate assembly; and
a cap arranged on the substrate assembly so as to cover, and be spaced from, the conductive membrane, the cap having one or more apertures such that differential pressure between the reference chamber and the space between the conductive membrane and cap can cause deflection of the conductive membrane which, in turn, varies the capacitance between the conductive membrane and the conductive layer.
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Abstract
A capacitive pressure sensor includes a substrate assembly having a conductive layer. A conductive membrane is mounted to the substrate assembly so that a sealed reference chamber is defined by the conductive membrane and the substrate assembly. A cap is arranged on the substrate assembly and defines one or more apertures so that an antechamber is defined between the cap and the conductive membrane. Differential pressure between the reference chamber and antechamber can cause deflection of the conductive membrane which, in turn, varies the capacitance between the conductive membrane and the conductive layer.
21 Citations
7 Claims
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1. A capacitive pressure sensor comprising:
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a substrate assembly having a conductive layer; a conductive membrane mounted to the substrate assembly so that a sealed reference chamber is defined by the conductive membrane and the substrate assembly; and a cap arranged on the substrate assembly so as to cover, and be spaced from, the conductive membrane, the cap having one or more apertures such that differential pressure between the reference chamber and the space between the conductive membrane and cap can cause deflection of the conductive membrane which, in turn, varies the capacitance between the conductive membrane and the conductive layer. - View Dependent Claims (2, 3, 4)
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5. A capacitive pressure sensor comprising:
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a substrate assembly having a conductive layer; a conductive membrane mounted to the substrate assembly so that a sealed reference chamber is defined by the conductive membrane and the substrate assembly; a cap arranged on the substrate assembly so as to cover, and be spaced from, the conductive membrane, the cap having one or more apertures such that differential pressure between the reference chamber and the space between the conductive membrane and cap can cause deflection of the conductive membrane which, in turn, varies the capacitance between the conductive membrane and the conductive layer; and a cover configured to be engaged with the cap. - View Dependent Claims (6, 7)
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Specification