Microvalve assemblies and related structures and related methods

• US 7,448,412 B2
• Filed: 07/22/2005
• Issued: 11/11/2008
• Est. Priority Date: 07/23/2004
• Status: Expired due to Fees

• Current Assignee: AFA Controls LLC (IMI PLC)
• Original Assignee: AFA Controls LLC (IMI PLC)
• Inventors: Laski, James C., Douglas, Kevin R., Gibson, Paul W., Harris, Donald C., Teach, William O.
• Primary Examiner(s): Hepperle; Stephen M
• Assistant Examiner(s): Schneider; Craig M
• Application Number:
  US11/188,294
• Publication Number:
  US 20060016486A1
• Time in Patent Office: 1,208 Days
• Field of Search: 137/596.17, 137/829, 137831-832, 251/129.06
• US Class Current: 137/831
• CPC Class Codes: F15C 5/00 Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
• CPC Class Codes: F16K 2099/0074 using photolithography, e.g. etching
• CPC Class Codes: F16K 2099/008 Multi-layer fabrications
• CPC Class Codes: F16K 99/0001 Microvalves microdevices B81B1/00; manufacture or treatment of devices or systems in or on a substrate B81C1/00; microfluidic structures B01L3/5027; micropumps F04B19/006
• CPC Class Codes: F16K 99/0007 of cantilever type
• CPC Class Codes: F16K 99/0028 Valves having multiple inlets or outlets
• CPC Class Codes: F16K 99/0051 using electrostatic means
• CPC Class Codes: G05D 7/0694 by action on throttling means or flow sources of very small size, e.g. microfluidics microvalves F16K99/0001; microstructural devices per se B81B
• CPC Class Codes: Y10T 137/0491 Valve or valve element assembling, disassembling, or replacing
• CPC Class Codes: Y10T 137/0497 Fluid actuated or retarded
• CPC Class Codes: Y10T 137/2213 Electrically-actuated element [e.g., electro-mechanical transducer]
• CPC Class Codes: Y10T 137/2224 Structure of body of device
• CPC Class Codes: Y10T 137/7761 Electrically actuated valve
• CPC Class Codes: Y10T 137/86558 Plural noncommunicating flow paths
• CPC Class Codes: Y10T 137/87169 Supply and exhaust
• CPC Class Codes: Y10T 137/87217 Motor
• CPC Class Codes: Y10T 137/87225 Fluid motor

Abstract

A valve chip may include a substrate having first and second faces and openings between the first and second faces, and a plurality of flexible valve flaps on one of the faces of the substrate with each flexible valve flap being associated with at least one of the openings. The valve chip may be packaged by forming a frame having an opening therein, and securing the valve chip in the opening of the frame. More particularly, the valve chip may be secured in the opening so that central portions of the first and second faces of the substrate are exposed through the opening in the frame and so that a fluid seal is provided between the frame and edges of the substrate. Related valves, valve assemblies, and methods are also discussed.

Claims

1. A valve comprising:

a substrate having first and second opposing faces, a hole through the substrate between the first and second faces, and a pair of input pads thereon;

a movable valve member on the substrate with the movable valve member being associated with the hole in the substrate, wherein the movable valve member is configured to open or substantially block the hole responsive to an electrical signal applied to the pair of input pads;

a frame surrounding and supporting the substrate at edges thereof so that central portions of the first and second faces of the substrate are exposed through an opening in the frame and so that a fluid seal is provided between the frame and edges of the substrate; and

a baffle on the frame and spaced apart from the substrate, the baffle having at least one opening therethrough, wherein the baffle and the substrate define a baffle chamber therebetween and wherein the opening through the baffle defines a width that is less than a width of the baffle chamber in a direction parallel with respect to a surface of the substrate.

2. A valve according to claim 1 wherein the movable valve member comprises a flexible valve flap.

3. A valve according to claim 2 wherein the flexible valve flap is mechanically coupled with the substrate along a single continuous segment.

4. A valve according to claim 1 further comprising:

first and second conductive leads in the frame, the first and second conductive leads being electrically coupled to the respective input pads on the substrate.

5. A valve according to claim 4 wherein portions of the first and second conductive leads are exposed along an outside edge of the frame.

6. A valve according to claim 4 wherein the first and second conductive leads are wire bonded to the respective input pads.

7. A valve according to claim 1 wherein the frame has a thickness greater than a thickness of the substrate and wherein the frame includes a recessed ledge along the opening in the frame with the edges of the substrate being supported by the recessed ledge.

8. A valve according to claim 7 wherein the edges of the substrate are secured to the recessed ledge using an adhesive.

9. A valve according to claim 1 wherein the valve member is between the substrate and the baffle.

10. A valve according to claim 1 wherein the baffle provides a restriction to fluid flow in series with the hole through the substrate.

11. A valve according to claim 1 wherein the baffle, the frame and the substrate define an enclosure with the movable valve member being included in the enclosure.

12. A valve according to claim 1 wherein the frame comprises a rigid polymer material.

13. A valve according to claim 1 wherein the movable valve member comprises an electro-statically actuated valve flap configured to open or substantially block the hole in the substrate in response to the electrical signal applied to the pair of input pads.

14. A valve according to claim 1 further comprising:

a fixed electrode on/in the substrate wherein the fixed electrode is electrically coupled with a first one of the pair of input pads on the substrate; and

a movable electrode on/in the movable valve member wherein the movable electrode is electrically coupled with a second one of the pair of input pads on the substrate, wherein the moveable valve member is configured to open or substantially block the hole in the substrate in response to electro-static forces generated between the fixed and movable electrodes.

15. A valve according to claim 1 wherein the substrate has a second hole through the substrate between the first and second faces, the valve further comprising:

a second movable valve member on the substrate with the second movable valve member being associated with the second hole in the substrate.

16. A valve according to claim 15 wherein the second movable valve member is configured to open or substantially block the second hole responsive to an electrical signal applied to the pair of input pads.

59. A valve according to claim 5 wherein the exposed portions of the first and second conductive leads are exposed through slots in the frame wherein each slot defines at least one sidewall spaced apart from the respective lead so that a recessed side of each of the leads is exposed adjacent the respective spaced apart sidewall of a respective slot.

17. A valve comprising:

a substrate having first and second opposing faces, a hole through the substrate between the first and second faces, and a pair of input pads thereon;

a movable valve member on the substrate with the movable valve member being associated with the hole in the substrate, wherein the movable valve member is configured to open or substantially block the hole responsive to an electrical signal applied to the pair of input pads;

a frame surrounding and supporting the substrate at edges thereof so that central portions of the first and second faces of the substrate are exposed through an opening in the frame and so that a fluid seal is provided between the frame and edges of the substrate; and

first and second conductive leads in the frame, the first and second conductive leads being electrically coupled to the respective input pads on the substrate wherein portions of the first and second conductive leads are exposed along an outside edge of the frame wherein the exposed portions of the first and second conductive leads are oriented in a direction substantially perpendicular with respect to the substrate wherein a length of each of the exposed portions of the leads in the direction substantially perpendicular with respect to the substrate is substantially greater than a width of the exposed portions of each of the leads in a direction substantially parallel with respect to the substrate.

18. A valve according to claim 17 wherein the movable valve member comprises a flexible valve flap.

19. A valve according to claim 17 wherein the exposed portions of the first and second conductive leads are exposed through slots in the frame wherein each slot defines at least one sidewall spaced apart from the respective lead so that a recessed side of each of the leads is exposed adjacent the respective spaced apart sidewall of a respective slot.

20. A valve according to claim 17 wherein the first and second conductive leads are wire bonded to the respective input pads.

21. A valve according to claim 17 wherein the frame has a thickness greater than a thickness of the substrate and wherein the frame includes a recessed ledge along the opening in the frame with the edges of the substrate being supported by the recessed ledge.

22. A valve according to claim 21 further comprising:

a flexible gasket between the recessed ledge and the edges of the substrate.

23. A valve according to claim 22 wherein the edges of the substrate are secured to the flexible gasket and the recessed ledge with portions of the frame overlapping edges of the substrate opposite the recessed ledge.

24. A valve according to claim 21 wherein the edges of the substrate are secured to the recessed ledge using an adhesive.

25. A valve according to claim 17 further comprising:

a baffle on the frame and spaced apart from the substrate, the baffle having at least one opening therethrough.

26. A valve according to claim 25 wherein the valve member is between the substrate and the baffle.

27. A valve according to claim 25 wherein the baffle and the substrate define a baffle chamber therebetween wherein the opening through the baffle defines a width that is less than a width of the baffle chamber in a direction parallel with respect to a surface of the substrate.

28. A valve according to claim 25 wherein the baffle provides a restriction to fluid flow in series with the hole through the substrate.

29. A valve according to claim 25 wherein the baffle has a wedge shape.

30. A valve according to claim 29 further comprising:

first and second conductive leads on a first edge of the frame, the first and second conductive leads being electrically coupled to the respective input pads on the substrate, wherein a thin portion of the baffle is adjacent the first edge of the frame and wherein a wide portion of the baffle is adjacent a second edge of the frame opposite the first edge.

31. A valve according to claim 25 wherein the baffle, the frame and the substrate define an enclosure with the movable valve member being included in the enclosure.

32. A valve according to claim 25 further comprising:

a flexible gasket on the frame such that the frame is between the flexible gasket and the baffle.

33. A valve according to claim 17 further comprising:

a flexible gasket on the frame with the substrate being recessed in the frame relative to the gasket, the flexible gasket defining an opening therein having dimensions greater than dimensions defined by a perimeter of the substrate.

34. A valve according to claim 17 wherein the frame comprises a rigid polymer material.

35. A valve comprising:

a substrate having first and second opposing faces, a hole through the substrate between the first and second faces, and a pair of input pads thereon;

a movable valve member on the substrate with the movable valve member being associated with the hole in the substrate, wherein the movable valve member is configured to open or substantially block the hole responsive to an electrical signal applied to the pair of input pads;

a frame surrounding and supporting the substrate at edges thereof so that central portions of the first and second faces of the substrate are exposed through an opening in the frame and so that a fluid seal is provided between the frame and edges of the substrate; and

first and second conductive leads in the frame, the first and second conductive leads being electrically coupled to the respective input pads on the substrate wherein portions of the first and second conductive leads are exposed along an outside edge of the frame wherein the exposed portions of the first and second conductive leads are exposed through slots in the frame wherein each slot defines at least one sidewall spaced apart from the respective lead so that a recessed side of each of the leads is exposed adjacent the respective spaced apart sidewall of a respective slot.

36. A valve according to claim 35 wherein the movable valve member comprises a flexible valve flap.

37. A valve according to claim 35 wherein the exposed portions of the first and second conductive leads are oriented in a direction substantially perpendicular with respect to the substrate wherein a length of each of the exposed portions of the leads in the direction substantially perpendicular with respect to the substrate is substantially greater than a width of the exposed portions of each of the leads in a direction substantially parallel with respect to the substrate.

38. A valve according to claim 35 wherein the first and second conductive leads are wire bonded to the respective input pads.

39. A valve according to claim 35 wherein the frame has a thickness greater than a thickness of the substrate and wherein the frame includes a recessed ledge along the opening in the frame with the edges of the substrate being supported by the recessed ledge.

40. A valve according to claim 39 further comprising:

a flexible gasket between the recessed ledge and the edges of the substrate.

41. A valve according to claim 40 wherein the edges of the substrate are secured to the flexible gasket and the recessed ledge with portions of the frame overlapping edges of the substrate opposite the recessed ledge.

42. A valve according to claim 39 wherein the edges of the substrate are secured to the recessed ledge using an adhesive.

43. A valve according to claim 35 further comprising:

a baffle on the frame and spaced apart from the substrate, the baffle having at least one opening therethrough.

44. A valve according to claim 43 wherein the valve member is between the substrate and the baffle.

45. A valve according to claim 43 wherein the baffle and the substrate define a baffle chamber therebetween wherein the opening through the baffle defines a width that is less than a width of the baffle chamber in a direction parallel with respect to a surface of the substrate.

46. A valve according to claim 43 wherein the baffle provides a restriction to fluid flow in series with the hole through the substrate.

47. A valve according to claim 43 wherein the baffle has a wedge shape.

48. A valve according to claim 47 further comprising:

first and second conductive leads on a first edge of the frame, the first and second conductive leads being electrically coupled to the respective input pads on the substrate, wherein a thin portion of the baffle is adjacent the first edge of the frame and wherein a wide portion of the baffle is adjacent a second edge of the frame opposite the first edge.

49. A valve according to claim 43 wherein the baffle, the frame and the substrate define an enclosure with the movable valve member being included in the enclosure.

50. A valve according to claim 43 further comprising:

a flexible gasket on the frame such that the frame is between the flexible gasket and the baffle.

51. A valve according to claim 35 further comprising:

a flexible gasket on the frame with the substrate being recessed in the frame relative to the gasket, the flexible gasket defining an opening therein having dimensions greater than dimensions defined by a perimeter of the substrate.

52. A valve according to claim 35 wherein the frame comprises a rigid polymer material.

53. A valve comprising:

a substrate having first and second opposing faces, a hole through the substrate between the first and second faces, and a pair of input pads thereon;

a movable valve member on the substrate with the movable valve member being associated with the hole in the substrate, wherein the movable valve member is configured to open or substantially block the hole responsive to an electrical signal applied to the pair of input pads;

a frame surrounding and supporting the substrate at edges thereof so that central portions of the first and second faces of the substrate are exposed through an opening in the frame and so that a fluid seal is provided between the frame and edges of the substrate wherein the frame has a thickness greater than a thickness of the substrate and wherein the frame includes a recessed ledge along the opening in the frame with the edges of the substrate being supported by the recessed ledge; and

a flexible gasket between the recessed ledge and the edges of the substrate.

54. A valve according to claim 53 wherein the edges of the substrate are secured to the flexible gasket and the recessed ledge with portions of the frame overlapping edges of the substrate opposite the recessed ledge.

55. A valve according to claim 53 wherein the movable valve member comprises a flexible valve flap.

56. A valve according to claim 53 further comprising:

first and second conductive leads in the frame, the first and second conductive leads being electrically coupled to the respective input pads on the substrate.

57. A valve according to claim 56 wherein portions of the first and second conductive leads are exposed along an outside edge of the frame.

58. A valve according to claim 57 wherein the exposed portions of the first and second conductive leads are oriented in a direction substantially perpendicular with respect to the substrate wherein a length of each of the exposed portions of the leads in the direction substantially perpendicular with respect to the substrate is substantially greater than a width of the exposed portions of each of the leads in a direction substantially parallel with respect to the substrate.

60. A valve according to claim 56 wherein the first and second conductive leads are wire bonded to the respective input pads.

61. A valve according to claim 53 wherein the edges of the substrate are secured to the recessed ledge using an adhesive.

62. A valve according to claim 53 further comprising:

a baffle on the frame and spaced apart from the substrate, the baffle having at least one opening therethrough.

63. A valve according to claim 62 wherein the valve member is between the substrate and the baffle.

64. A valve according to claim 62 wherein the baffle and the substrate define a baffle chamber therebetween wherein the opening through the baffle defines a width that is less than a width of the baffle chamber in a direction parallel with respect to a surface of the substrate.

65. A valve according to claim 62 wherein the baffle provides a restriction to fluid flow in series with the hole through the substrate.

66. A valve according to claim 62 wherein the baffle has a wedge shape.

67. A valve according to claim 66 further comprising:

first and second conductive leads on a first edge of the frame, the first and second conductive leads being electrically coupled to the respective input pads on the substrate, wherein a thin portion of the baffle is adjacent the first edge of the frame and wherein a wide portion of the baffle is adjacent a second edge of the frame opposite the first edge.

68. A valve according to claim 62 wherein the baffle, the frame and the substrate define an enclosure with the movable valve member being included in the enclosure.

69. A valve according to claim 62 further comprising:

a flexible gasket on the frame such that the frame is between the flexible gasket and the baffle.

70. A valve according to claim 53 further comprising:

a flexible gasket on the frame with the substrate being recessed in the frame relative to the gasket, the flexible gasket defining an opening therein having dimensions greater than dimensions defined by a perimeter of the substrate.

71. A valve according to claim 53 wherein the frame comprises a rigid polymer material.

72. A valve comprising:

a substrate having first and second opposing faces, a hole through the substrate between the first and second faces, and a pair of input pads thereon;

a movable valve member on the substrate with the movable valve member being associated with the hole in the substrate, wherein the movable valve member is configured to open or substantially block the hole responsive to an electrical signal applied to the pair of input pads; and

a frame surrounding and supporting the substrate at edges thereof so that central portions of the first and second faces of the substrate are exposed through an opening in the frame and so that a fluid seal is provided between the frame and edges of the substrate; and

a baffle on the frame and spaced apart from the substrate, the baffle having at least one opening therethrough wherein the baffle has a wedge shape.

73. A valve according to claim 72 further comprising:

first and second conductive leads on a first edge of the frame, the first and second conductive leads being electrically coupled to the respective input pads on the substrate, wherein a thin portion of the baffle is adjacent the first edge of the frame and wherein a wide portion of the baffle is adjacent a second edge of the frame opposite the first edge.

74. A valve according to claim 72 wherein the movable valve member comprises a flexible valve flap.

75. A valve according to claim 72 further comprising:

first and second conductive leads in the frame, the first and second conductive leads being electrically coupled to the respective input pads on the substrate.

76. A valve according to claim 75 wherein portions of the first and second conductive leads are exposed along an outside edge of the frame.

77. A valve according to claim 76 wherein the exposed portions of the first and second conductive leads are oriented in a direction substantially perpendicular with respect to the substrate wherein a length of each of the exposed portions of the leads in the direction substantially perpendicular with respect to the substrate is substantially greater than a width of the exposed portions of each of the leads in a direction substantially parallel with respect to the substrate.

78. A valve according to claim 76 wherein the exposed portions of the first and second conductive leads are exposed through slots in the frame wherein each slot defines at least one sidewall spaced apart from the respective lead so that a recessed side of each of the leads is exposed adjacent the respective spaced apart sidewall of a respective slot.

79. A valve according to claim 75 wherein the first and second conductive leads are wire bonded to the respective input pads.

80. A valve according to claim 72 wherein the frame has a thickness greater than a thickness of the substrate and wherein the frame includes a recessed ledge along the opening in the frame with the edges of the substrate being supported by the recessed ledge.

81. A valve according to claim 80 further comprising:

a flexible gasket between the recessed ledge and the edges of the substrate.

82. A valve according to claim 81 wherein the edges of the substrate are secured to the flexible gasket and the recessed ledge with portions of the frame overlapping edges of the substrate opposite the recessed ledge.

83. A valve according to claim 80 wherein the edges of the substrate are secured to the recessed ledge using an adhesive.

84. A valve according to claim 72 wherein the valve member is between the substrate and the baffle.

85. A valve according to claim 72 wherein the baffle and the substrate define a baffle chamber therebetween wherein the opening through the baffle defines a width that is less than a width of the baffle chamber in a direction parallel with respect to a surface of the substrate.

86. A valve according to claim 72 wherein the baffle provides a restriction to fluid flow in series with the hole through the substrate.

87. A valve according to claim 72 wherein the baffle, the frame and the substrate define an enclosure with the movable valve member being included in the enclosure.

88. A valve according to claim 72 further comprising:

a flexible gasket on the frame such that the frame is between the flexible gasket and the baffle.

89. A valve according to claim 72 further comprising:

a flexible gasket on the frame with the substrate being recessed in the frame relative to the gasket, the flexible gasket defining an opening therein having dimensions greater than dimensions defined by a perimeter of the substrate.

90. A valve according to claim 72 wherein the frame comprises a rigid polymer material.

91. A valve comprising:

a substrate having first and second opposing faces, a hole through the substrate between the first and second faces, and a pair of input pads thereon;

a movable valve member on the substrate with the movable valve member being associated with the hole in the substrate, wherein the movable valve member is configured to open or substantially block the hole responsive to an electrical signal applied to the pair of input pads;

a frame surrounding and supporting the substrate at edges thereof so that central portions of the first and second faces of the substrate are exposed through an opening in the frame and so that a fluid seal is provided between the frame and edges of the substrate;

a baffle on the frame and spaced apart from the substrate, the baffle having at least one opening therethrough; and

a flexible gasket on the frame such that the frame is between the flexible gasket and the baffle.

92. A valve according to claim 91 wherein the movable valve member comprises a flexible valve flap.

93. A valve according to claim 91 further comprising:

first and second conductive leads in the frame, the first and second conductive leads being electrically coupled to the respective input pads on the substrate.

94. A valve according to claim 93. wherein portions of the first and second conductive leads are exposed along an outside edge of the frame.

95. A valve according to claim 94 wherein the exposed portions of the first and second conductive leads are oriented in a direction substantially perpendicular with respect to the substrate wherein a length of each of the exposed portions of the leads in the direction substantially perpendicular with respect to the substrate is substantially greater than a width of the exposed portions of each of the leads in a direction substantially parallel with respect to the substrate.

96. A valve according to claim 94 wherein the exposed portions of the first and second conductive leads are exposed through slots in the frame wherein each slot defines at least one sidewall spaced apart from the respective lead so that a recessed side of each of the leads is exposed adjacent the respective spaced apart sidewall of a respective slot.

97. A valve according to claim 93 wherein the first and second conductive leads are wire bonded to the respective input pads.

98. A valve according to claim 91 wherein the frame has a thickness greater than a thickness of the substrate and wherein the frame includes a recessed ledge along the opening in the frame with the edges of the substrate being supported by the recessed ledge.

99. A valve according to claim 98 further comprising:

a flexible gasket between the recessed ledge and the edges of the substrate.

100. A valve according to claim 99 wherein the edges of the substrate are secured to the flexible gasket and the recessed ledge with portions of the frame overlapping edges of the substrate opposite the recessed ledge.

101. A valve according to claim 98 wherein the edges of the substrate are secured to the recessed ledge using an adhesive.

102. A valve according to claim 91 wherein the valve member is between the substrate and the baffle.

103. A valve according to claim 91 wherein the baffle and the substrate define a baffle chamber therebetween wherein the opening through the baffle defines a width that is less than a width of the baffle chamber in a direction parallel with respect to a surface of the substrate.

104. A valve according to claim 91 wherein the baffle provides a restriction to fluid flow in series with the hole through the substrate.

105. A valve according to claim 91 wherein the baffle has a wedge shape.

106. A valve according to claim 105 further comprising:

first and second conductive leads on a first edge of the frame, the first and second conductive leads being electrically coupled to the respective input pads on the substrate, wherein a thin portion of the baffle is adjacent the first edge of the frame and wherein a wide portion of the baffle is adjacent a second edge of the frame opposite the first edge.

107. A valve according to claim 91 wherein the baffle, the frame and the substrate define an enclosure with the movable valve member being included in the enclosure.

108. A valve according to claim 91 further comprising:

a flexible gasket on the frame with the substrate being recessed in the frame relative to the gasket, the flexible gasket defining an opening therein having dimensions greater than dimensions defined by a perimeter of the substrate.

109. A valve according to claim 91 wherein the frame comprises a rigid polymer material.

110. A valve comprising:

a substrate having first and second opposing faces, a hole through the substrate between the first and second faces, and a pair of input pads thereon;

a movable valve member on the substrate with the movable valve member being associated with the hole in the substrate, wherein the movable valve member is configured to open or substantially block the hole responsive to an electrical signal applied to the pair of input pads;

a frame surrounding and supporting the substrate at edges thereof so that central portions of the first and second faces of the substrate are exposed through an opening in the frame and so that a fluid seal is provided between the frame and edges of the substrate; and

a flexible gasket on the frame with the substrate being recessed in the frame relative to the gasket, the flexible gasket defining an opening therein having dimensions greater than dimensions defined by a perimeter of the substrate.

111. A valve according to claim 110 wherein the movable valve member comprises a flexible valve flap.

112. A valve according to claim 110 further comprising:

first and second conductive leads in the frame, the first and second conductive leads being electrically coupled to the respective input pads on the substrate.

113. A valve according to claim 112 wherein portions of the first and second conductive leads are exposed along an outside edge of the frame.

114. A valve according to claim 113 wherein the exposed portions of the first and second conductive leads are oriented in a direction substantially perpendicular with respect to the substrate wherein a length of each of the exposed portions of the leads in the direction substantially perpendicular with respect to the substrate is substantially greater than a width of the exposed portions of each of the leads in a direction substantially parallel with respect to the substrate.

115. A valve according to claim 112 wherein the exposed portions of the first and second conductive leads are exposed through slots in the frame wherein each slot defines at least one sidewall spaced apart from the respective lead so that a recessed side of each of the leads is exposed adjacent the respective spaced apart sidewall of a respective slot.

116. A valve according to claim 112 wherein the first and second conductive leads are wire bonded to the respective input pads.

117. A valve according to claim 110 wherein the frame has a thickness greater than a thickness of the substrate and wherein the frame includes a recessed ledge along the opening in the frame with the edges of the substrate being supported by the recessed ledge.

118. A valve according to claim 117 further comprising:

a flexible gasket between the recessed ledge and the edges of the substrate.

119. A valve according to claim 118 wherein the edges of the substrate are secured to the flexible gasket and the recessed ledge with portions of the frame overlapping edges of the substrate opposite the recessed ledge.

120. A valve according to claim 117 wherein the edges of the substrate are secured to the recessed ledge using an adhesive.

121. A valve according to claim 110 further comprising:

a baffle on the frame and spaced apart from the substrate, the baffle having at least one opening therethrough.

122. A valve according to claim 121 wherein the valve member is between the substrate and the baffle.

123. A valve according to claim 121 wherein the baffle and the substrate define a baffle chamber therebetween wherein the opening through the baffle defines a width that is less than a width of the baffle chamber in a direction parallel with respect to a surface of the substrate.

124. A valve according to claim 121 wherein the baffle provides a restriction to fluid flow in series with the hole through the substrate.

125. A valve according to claim 121 wherein the baffle has a wedge shape.

126. A valve according to claim 125 further comprising:

first and second conductive leads on a first edge of the frame, the first and second conductive leads being electrically coupled to the respective input pads on the substrate, wherein a thin portion of the baffle is adjacent the first edge of the frame and wherein a wide portion of the baffle is adjacent a second edge of the frame opposite the first edge.

127. A valve according to claim 121 wherein the baffle, the frame and the substrate define an enclosure with the movable valve member being included in the enclosure.

128. A valve according to claim 121 further comprising:

a flexible gasket on the frame such that the frame is between the flexible gasket and the baffle.

129. A valve according to claim 110 wherein the frame comprises a rigid polymer material.