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Next process-determining method, inspecting method and inspecting apparatus

  • US 7,463,762 B2
  • Filed: 09/29/2006
  • Issued: 12/09/2008
  • Est. Priority Date: 03/02/2001
  • Status: Expired due to Fees
First Claim
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1. A next process-determining method, comprising:

  • digitizing a sample object into digital sample data;

    compressing the digital sample data into compressed digital sample data having a predetermined data format;

    calculating a difference value between a size of the compressed digital sample data and a size of reference data formed by digitizing and compressing a reference sample object in the same manner as the sample object is processed;

    identifying which of a plurality of predetermined numerical ranges the difference value corresponds to; and

    determining a predetermined process to be performed with respect to the sample object, which is associated with the identified numerical range in advance as a next process to be carried out.

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