Light blocking electrical interconnect

• US 7,466,475 B2
• Filed: 05/03/2007
• Issued: 12/16/2008
• Est. Priority Date: 02/18/2005
• Status: Expired due to Fees

• Current Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Original Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Inventors: Martin, Eric T.
• Primary Examiner(s): Choi; William C
• Application Number:
  US11/743,976
• Publication Number:
  US 20070206269A1
• Time in Patent Office: 593 Days
• Field of Search: 359/198, 359/224, 359/230, 359/290, 359/291, 359/295
• US Class Current: 359/291
• CPC Class Codes: G02B 1/11 Anti-reflection coatings
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

An electrical interconnect to block light for use with an array of micro electromechanical machines separated by the first breaks includes a layer of an electrically conductive and an electrically isolated portions separated by second breaks configured to cross the first breaks on multiple sides of one of the micro electromechanical machines.

Claims

1. A device comprising:

a circuitry layer;

a movable member;

a conductive layer between the circuitry and the movable member;

a conductive plate between the movable member and the conductive layer;

a first charge transmitting flexure extending from the conductive layer to the movable member; and

a second charge transmitting flexure extending from the conductive layer to the movable member.

2. The device of claim 1, wherein the conductive layer is electrically isolated from the conductive plate.

3. The device of claim 2, wherein the device is part of a display.

4. The device of claim 3, wherein the device is part of a spatial light modulator.

5. The device of claim 1, wherein the movable member is semi-transparent and semi-reflective.

6. The device of claim 5, wherein the conductive plate is reflective.

7. The device of claim 1 including a third charge transmitting flexure extending from the conductive layer to the movable member.

8. The device of claim 1 including a fourth charge transmitting flexure extending from the conductive layer to the movable member.

9. The device of claim 1, wherein the movable member has a center point and wherein the conductive layer extends opposite the center point.

10. The device of claim 1, wherein the movable member has a first face with a first surface area and wherein the electrical interconnect layer has a second face facing the first face and having a second surface area of at least 80% of the first surface area.

11. The device of claim 1, wherein the electrical interconnect area has a surface area of at least 70 square microns opposite the movable member.

12. The device of claim 1, wherein the electrical interconnect layer is non-rectangular.

13. The device of claim 1, wherein the movable member has a first edge and a second opposite edge and wherein the electrical interconnect layer spans the first edge and the second edge.

14. A light modulator comprising:

a pixel plate;

a circuitry layer;

a conductive plate between the circuitry layer and the pixel plate; and

means spanning the pixel plate for transmitting electrical charge from the circuit layer to the pixel plate.