Dry-etching method

• US 7,476,624 B2
• Filed: 06/07/2002
• Issued: 01/13/2009
• Est. Priority Date: 06/15/2001
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Yamada, Norikazu, Iijima, Etsuo
• Primary Examiner(s): Vinh; Lan
• Application Number:
  US10/480,821
• Publication Number:
  US 20040192056A1
• Time in Patent Office: 2,412 Days
• Field of Search: 216/59, 216/60, 216/67, 216/79, 438/9, 438/706, 438/710, 438/714, 438/719, 438/721, 438/742, 438/712, 438/720, 438/725, 438/734
• US Class Current: 438/714
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01L 21/32137 of silicon-containing layers

Abstract

A main etching step is effected in a state shown in FIG. 1A under a first pressure using a gas containing at least HBr, e.g., a mixture gas of HBr and Cl₂ as an etching gas. The main etching is ended before a silicon oxide film 102, as shown in FIG. 1B, is exposed. An over-etching process is effected under a second pressure higher than the first pressure using a gas containing at least HBr, e.g., an HBr single gas so as to completely expose the silicon oxide film 102 as shown in FIG. 1C. In such a way, the selectivity of a silicon-containing conductive layer with respect to the silicon oxide film is improved compared to conventional methods. Without etching the silicon oxide film layer, which is an underlying layer, and without marring the shape of the silicon-containing conductive film layer formed by etching, only the desired silicon-containing conductive film layer is removed by etching reliably.

Claims

1. A dry etching method for etching a polysilicon layer formed on a silicon oxide film layer through a mask layer having a predetermined pattern shape formed on the polysilicon layer, the method comprising:

a main etching process for performing a plasma etching under a first pressure lower than 13 Pa by using a main etching gas containing at least an HBr gas; and

an overetching process for performing, after the main etching process, a plasma etching under a second pressure ranging from 13 Pa to 27 Pa, which is higher than that of the main etching process,

wherein the overetching process includes a first overetching process employing a first overetching gas and a second overetching process employing a second overetching gas following the first overetching process,

wherein each of the overetching gases is a mixture gas of HBr and O₂ or the HBr gas, and

wherein a pressure in the second overetching process is set to be higher than that in the first overetching process.

2. The method of claim 1, wherein compositions of the overetching gases are different from each other.

3. The method of claim 1, wherein bias voltages applied in the first and the second overetching process are different from each other.

4. The method of claim 1, wherein flow rates of the first and the second overetching gases are different from each other.

5. A dry etching method for etching a polysilicon layer formed on a silicon oxide film layer through a mask layer having a predetermined pattern shape formed on the polysilicon, the method comprising:

a first etching process for performing a plasma etching under a first pressure lower than 13 Pa by using a first etching gas containing at least an HBr gas;

a second etching process for performing, after the first etching process, a plasma etching under a second pressure ranging from 13 Pa to 27 Pa, by employing a second etching gas, the second pressure being higher than that of the first etching process; and

a third etching process for performing, after the second etching process, a plasma etching under a third pressure ranging from 13 Pa to 27 Pa, by employing a third etching gas, the third pressure being higher than that of the first etching process,

wherein each of the second and the third etching gas is a mixture gas of HBr and O₂ or the HBr gas, and

wherein the third pressure is higher than the second pressure.

6. The method of claim 5, wherein compositions of the second and the third etching gases are different from each other.

7. The method of claim 5, wherein bias voltages applied in the second and the third etching process are different from each other.

8. The method of claim 5, wherein flow rates of the second and the third etching gases are different from each other.

9. A dry etching method for etching a silicon-containing conductive film layer formed on a silicon oxide film layer through a mask layer having a predetermined pattern shape formed on the silicon-containing conductive film layer by etching gases containing at least an HBr gas, the method comprising:

a main etching process for performing a plasma etching under a first pressure lower than 13 Pa; and

an overetching process for performing, after the main etching process, a plasma etching under a second pressure ranging from 13 Pa to 27 Pa, which is higher than that of the main etching process,

wherein the overetching process includes a first overetching process and a second overetching process following the first overetching process, and bias voltages applied in the first and the second overetching process are different from each other, and

wherein a pressure in the second overetching process is set to be higher than that in the first overetching process.

10. The method of claim 9, wherein compositions of etching gases used in the first and the second overetching process are different from each other.

11. The method of claim 9, wherein flow rates of etching gases used in the first and the second overetching process are different from each other.

12. A dry etching method for etching a silicon-containing conductive film layer formed on a silicon oxide film layer through a mask layer having a predetermined pattern shape formed on the silicon-containing conductive film layer by an etching gas containing at least an HBr gas, the method comprising:

a first etching process for performing a plasma etching under a first pressure lower than 13 Pa;

a second etching process for performing, after the first etching process, a plasma etching under a second pressure ranging from 13 Pa to 27 Pa, which is higher than that of the first etching process; and

a third etching process for performing, after the second etching process, a plasma etching under a third pressure ranging from 13 Pa to 27 Pa, which is higher than that of the first etching process, wherein bias voltages applied in the second and the third etching process are different from each other,

wherein the third pressure is higher than the second pressure.

13. The method of claim 12, wherein compositions of etching gases in the second and the third etching process are different from each other.

14. The method of claim 12, wherein flow rates of etching gases in the second and the third etching process are different from each other.