Process control transmitter with vibration sensor
First Claim
1. A transmitter for use in an industrial process control system, comprising:
- a process coupling configured to couple to a process fluid;
a sensor housing having a cavity formed therein, the sensor housing cavity in fluidic communication with the process fluid through the process coupling;
a diaphragm in the cavity configured to isolate a portion of the cavity from the process fluid and to move in response to pressure applied by the process fluid;
a first electrode in the isolated portion of the cavity configured to form a first capacitance with the diaphragm;
a second electrode in the isolated portion of the cavity configured to form a second capacitance with the diaphragm; and
measurement circuitry coupled to the first and second capacitance configured to measure a pressure of the process fluid based upon at least one of the first capacitance and second capacitance, the measurement circuitry further configured to measure vibrations in the process fluid based upon at least one of the first capacitance and second capacitance.
1 Assignment
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Accused Products
Abstract
A transmitter for use in an industrial process control system, includes a process coupling configured to couple to a process fluid. A sensor housing has a cavity formed therein which is in fluidic communication with the process fluid. A diaphragm in the cavity isolates a portion of the cavity from the process fluid and moves in response to pressure applied by the process fluid. A first electrode in the isolated portion of the cavity is configured to form a first capacitance with the diaphragm and a second electrode in the isolated portion of the cavity configured to form a second capacitance with the diaphragm. Measurement circuitry coupled to the first and second capacitance measures a pressure of the process fluid based upon at least one of the first capacitance and second capacitance. The measurement circuitry further configured to measure vibrations in the process fluid based upon at least one of the first capacitance and second capacitance.
81 Citations
23 Claims
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1. A transmitter for use in an industrial process control system, comprising:
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a process coupling configured to couple to a process fluid; a sensor housing having a cavity formed therein, the sensor housing cavity in fluidic communication with the process fluid through the process coupling; a diaphragm in the cavity configured to isolate a portion of the cavity from the process fluid and to move in response to pressure applied by the process fluid; a first electrode in the isolated portion of the cavity configured to form a first capacitance with the diaphragm; a second electrode in the isolated portion of the cavity configured to form a second capacitance with the diaphragm; and measurement circuitry coupled to the first and second capacitance configured to measure a pressure of the process fluid based upon at least one of the first capacitance and second capacitance, the measurement circuitry further configured to measure vibrations in the process fluid based upon at least one of the first capacitance and second capacitance. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of measuring parameters in an industrial process, comprising:
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fluidically coupling a sensor housing to a process fluid of the process, the sensor housing having a cavity formed therein; providing a movable diaphragm in the cavity which forms an isolated portion of the cavity which is isolated from the process fluid and which moves in response to pressure applied by the process fluid; sensing a change in electrical capacitance between the diaphragm and a first electrode; sensing a change in electrical capacitance between the diaphragm and a second electrode; determining a pressure based upon a change in sensed capacitance; and sensing vibrations in the process fluid based upon changes in electrical capacitance. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23)
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Specification