Bi-convex solid immersion lens

  • US 7,492,529 B2
  • Filed: 05/08/2007
  • Issued: 02/17/2009
  • Est. Priority Date: 01/16/2002
  • Status: Active Grant
First Claim
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1. A method for testing a semiconductor chip, comprising:

  • placing the chip in a test bench;

    providing electrical connectivity to the chip and provide electrical signals via the connectivity;

    placing a solid immersion lens (SIL) over a selected location of the chip;

    providing cooling fluid so as to control the temperature of the chip; and

    ,detecting light emanating from the chip in response to the electrical signals.

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