Pressure transducer with differential amplifier
First Claim
Patent Images
1. A semiconductor-based pressure sensor adapted for enhanced operation with control electronics, comprising:
- a pressure transducer having an output formed on a silicon die; and
an amplifier having an input and an output and fabricated on the silicon die next to the pressure transducer;
wherein the pressure transducer'"'"'s output is provided to the amplifier'"'"'s input via electrical connection.
1 Assignment
0 Petitions
Accused Products
Abstract
A semiconductor-based pressure sensor adapted for enhanced operation with controls electronics includes a pressure transducer having an output formed on a silicon die and an amplifier having an input and an output and fabricated on the silicon die next to the pressure transducer. The pressure transducer'"'"'s output is provided to the amplifier'"'"'s input via electrical connection. Output from the amplifier is connectable to a controller such as an ASIC.
39 Citations
20 Claims
-
1. A semiconductor-based pressure sensor adapted for enhanced operation with control electronics, comprising:
-
a pressure transducer having an output formed on a silicon die; and an amplifier having an input and an output and fabricated on the silicon die next to the pressure transducer; wherein the pressure transducer'"'"'s output is provided to the amplifier'"'"'s input via electrical connection. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
-
12. A method, using a semiconductor-based pressure sensor device to measure pressure comprising:
-
a semiconductor-based pressure sensor device including a pressure diaphragm adapted to generate electrical signals in response to pressure and signal amplifier electrically connected to the pressure diaphragm and fabricated with the pressure diaphragm on the same semiconductor wafer; and exposing the pressure diaphragm to a fluidic media, wherein the pressure experienced by the diaphragm is used as a reference pressure to generate an electrical signal representing measurement of the media pressure; and amplifying the electrical signal generated by the diaphragm with the amplifier. - View Dependent Claims (13, 14, 15, 16, 17)
-
-
18. A semiconductor-based pressure sensor adapted for enhanced operation with control electronics, comprising:
-
a pressure transducer having an output formed on a silicon die; and a differential amplifier having an input and an output and fabricated on the silicon die next to the pressure transducer; wherein the pressure transducer'"'"'s output is provided to the differential amplifier'"'"'s input via electrical connection and the differential amplifier'"'"'s output is connected to a controller. - View Dependent Claims (19, 20)
-
Specification