Semiconductor device, method of fabricating same, and, electrooptical device

• US 7,504,660 B2
• Filed: 05/25/2004
• Issued: 03/17/2009
• Est. Priority Date: 12/27/1994
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Teramoto, Satoshi, Arai, Yasuyuki, Yamazaki, Shunpei
• Primary Examiner(s): Picardat; Kevin M
• Application Number:
  US10/852,125
• Publication Number:
  US 20040211962A1
• Time in Patent Office: 1,757 Days
• Field of Search: 257/57, 257/59, 257/72, 257/66, 257/49, 438/161
• US Class Current: 257/59
• CPC Class Codes: G02F 1/133305 Flexible substrates, e.g. plastics, organic film
• CPC Class Codes: G02F 1/136227 Through-hole connection of the pixel electrode to the active element through an insulation layer
• CPC Class Codes: H01L 29/78636 with supplementary region or layer for improving the flatness of the device

Abstract

A pair of substrates forming the active matrix liquid crystal display are fabricated from resinous substrates having transparency and flexibility. A thin-film transistor has a semiconductor film formed on a resinous layer formed on one resinous substrate. The resinous layer is formed to prevent generation of oligomers on the surface of the resinous substrate during formation of the film and to planarize the surface of the resinous substrate.

Claims

1. A card-type electronic device comprising:

a pair of flexible substrates opposing to each other;

a resinous layer formed on and in contact with at least one of the pair of flexible substrates;

a thin film transistor formed between the pair of flexible substrates and formed on and in contact with the resinous layer, the thin film transistor having a channel forming region; and

a layer comprising resin formed over the at least one of the pair of flexible substrates, the layer covering the thin film transistor,

wherein the card-type electronic device has a flexibility.

5. A card-type electronic device according to any one of claims 1, 2 and 3, wherein the pair of flexible substrates comprise a plastic substrate.

6. A card-type electronic device according to any one of claims 1, 2 and 3, wherein the pair of flexible substrates comprise at least one selected from the group consisting of PET (polyethylene terephthalate), PEN (polyethylene naphthalate), PES (polyethylene sulfite), and polyimide.

7. A card-type electronic device according to any one of claims 1, 2 and 3, wherein the resinous layer comprises an acrylic resin.

8. A card-type electronic device according to any one of claims 1, 2 and 3, wherein the resinous layer comprises at least one selected from the group consisting of methyl esters of acrylic acid, ethyl esters of acrylic acid, butyl esters of acrylic acid, and 2-ethylhexyl esters of acrylic acid.

9. A card-type electronic device according to any one of claims 1, 2 and 3, wherein the thin film transistor comprises an inverted-staggered thin-film transistor.

10. A card-type electronic device according to any one of claims 1, 2 and 3, wherein the thin film transistor comprises a coplanar thin-film transistor.

11. A card-type electronic device according to any one of claims 1, 2, and 3, wherein the pair of flexible substrates are filmy.

2. A card-type electronic device comprising:

a pair of flexible substrates opposing to each other;

a resinous layer formed on and in contact with at least one of the pair of flexible substrates;

a thin film transistor formed between the pair of flexible substrates and formed on and in contact with the resinous layer, the thin film transistor having a channel forming region comprising crystalline silicon; and

a layer comprising resin formed over the at least one of the pair of flexible substrates, the layer covering the thin film transistor,

wherein the card-type electronic device has a flexibility.

3. A card-type electronic, device comprising:

a pair of flexible substrates opposing to each other;

a resinous layer formed on and in contact with at least one of the pair of flexible substrates;

a thin film transistor formed between the pair of flexible substrates and formed on and in contact with the resinous layer; and

a layer comprising resin formed over the at least one of the pair of flexible substrates, the layer covering the thin film transistor,

wherein the thin film transistor has a channel forming region comprising crystalline silicon,

wherein the crystalline silicon is formed by laser irradiation, and

wherein the card-type electronic device has a flexibility.

4. A card-type electronic device according to claim 3, wherein the laser light comprises at least one selected from the group consisting of KrF excimer laser light and XeCl laser light.

12. A portable electronic device comprising:

a pair of flexible substrates opposing to each other;

a resinous layer formed on and in contact with at least one of the pair of flexible substrates;

a thin film transistor formed between the pair of flexible substrates and formed on and in contact with the resinous layer, the thin film transistor having a channel forming region; and

a layer comprising resin formed over the at least one of the pair of flexible substrates, the layer covering the thin film transistor,

wherein the portable electronic device has a flexibility.

16. A portable electronic device according to any one of claims 12-14, wherein the pair of flexible substrates comprise a plastic substrate.

17. A portable electronic device according to any one of claims 12-14, wherein the pair of flexible substrates comprise at least one selected from the group consisting of PET (polyethylene terephthalate), PEN (polyethylene naphthalate), PES (polyethylene sulfite), and polyimide.

18. A portable electronic device according to any one of claims 12-14, wherein the resinous layer comprises an acrylic resin.

19. A portable electronic device according to any one of claims 12-14, wherein the resinous layer comprises at least one selected from the group consisting of methyl esters of acrylic acid, ethyl esters of acrylic acid, butyl esters of acrylic acid, and 2-ethylhexyl esters of acrylic acid.

20. A portable electronic device according to any one of claims 12-14, wherein the thin film transistor comprises an inverted-staggered thin-film transistor.

21. A portable electronic device according to any one of claims 12-14, wherein the thin film transistor comprises a coplanar thin-film transistor.

22. A portable electronic device according to any one of claims 12-14, wherein the layer comprising resin is polyimide.

23. A portable electronic device according to any one of claims 12-14, wherein the portable electronic device is a telecommunication appliance.

24. A portable electronic device according to any one of claims 12-14, wherein the portable electronic device is a liquid crystal display device.

13. A portable electronic device comprising:

a pair of flexible substrates opposing to each other;

a resinous layer formed on and in contact with at least one of the pair of flexible substrates;

a thin film transistor formed between the pair of flexible substrates and formed on and in contact with the resinous layer, the thin film transistor having a channel forming region comprising crystalline silicon; and

a layer comprising resin formed over the at least one of the pair of flexible substrates, the layer covering the thin film transistor,

wherein the portable electronic device has a flexibility.

14. A portable electronic device comprising:

a pair of flexible substrates opposing to each other;

a resinous layer formed on and in contact with at least one of the pair of flexible substrates;

a thin film transistor formed between the pair of flexible substrates and formed on and in contact with the resinous layer; and

a layer comprising resin formed over the at least one of the pair of flexible substrates, the layer covering the thin film transistor,

wherein the thin film transistor has a channel forming region comprising crystalline silicon,

wherein the crystalline silicon is formed by laser irradiation, and

wherein the portable electronic device has a flexibility.

15. A portable electronic device according to claim 14, wherein the laser light comprises at least one selected from the group consisting of KrF excimer laser light and XeCl laser light.