Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates

• US 7,517,462 B2
• Filed: 01/03/2005
• Issued: 04/14/2009
• Est. Priority Date: 06/27/2003
• Status: Expired due to Term

• Current Assignee: Microfabrica Incorporated (Technoprobe S.P.A.)
• Original Assignee: Microfabrica Incorporated (Technoprobe S.P.A.)
• Inventors: Smalley, Dennis R., Zhang, Gang, Cohen, Adam L., Lockard, Michael S., Kim, Kieun, Frodis, Uri, McPherson, Dale S., Le, Qui T.
• Primary Examiner(s): ALANKO, ANITA KAREN
• Application Number:
  US11/029,014
• Publication Number:
  US 20050173374A1
• Time in Patent Office: 1,562 Days
• Field of Search: None
• US Class Current: 216/2
• CPC Class Codes: B33Y 10/00 Processes of additive manufacturing
• CPC Class Codes: B44C 1/22 Removing surface-material, e.g. by engraving, by etching for multi-layer articles B44C3/005
• CPC Class Codes: B81C 1/00492 Processes for surface micromachining not provided for in groups B81C1/0046 - B81C1/00484
• CPC Class Codes: C03C 15/00 Surface treatment of glass, not in the form of fibres or filaments, by etching etching or surface-brightening compositions, in general C09K13/00
• CPC Class Codes: C03C 25/68 by etching
• CPC Class Codes: C23C 18/1605 by masking
• CPC Class Codes: C23C 18/161 from plating step, e.g. inkjet
• CPC Class Codes: C23C 18/1651 Two or more layers only obtained by electroless plating
• CPC Class Codes: C23C 18/1653 Two or more layers with at least one layer obtained by electroless plating and one layer obtained by electroplating
• CPC Class Codes: C23C 18/405 Formaldehyde
• CPC Class Codes: C23F 1/00 Etching metallic material by chemical means manufacture of printing surfaces B41C; manufacture of printed circuits H05K
• CPC Class Codes: C25D 1/003 3D structures, e.g. superposed patterned layers
• CPC Class Codes: C25D 5/02 Electroplating of selected surface areas
• CPC Class Codes: C25D 5/10 Electroplating with more than one layer of the same or of different metals for bearings C25D7/10
• CPC Class Codes: H01L 21/2885 using an external electrical current, i.e. electro-deposition
• CPC Class Codes: H01L 21/44 Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/38 - H01L21/428
• CPC Class Codes: H01L 21/4763 Deposition of non-insulating, e.g. conductive -, resistive -, layers on insulating layers; After-treatment of these layers manufacture of electrodes H01L21/28, H01L21/44
• CPC Class Codes: H01L 21/76885 By forming conductive members before deposition of protective insulating material, e.g. pillars, studs

Abstract

Some embodiments of the present invention are directed to techniques for building up single layer or multi-layer structures on dielectric or partially dielectric substrates. Certain embodiments deposit seed layer material directly onto substrate materials while other embodiments use an intervening adhesion layer material. Some embodiments use different seed layer materials and/or adhesion layer materials for sacrificial and structural conductive building materials. Some embodiments apply seed layer and/or adhesion layer materials in what are effectively selective manners while other embodiments apply the materials in blanket fashion. Some embodiments remove extraneous depositions (e.g. depositions to regions unintended to form part of a layer) via planarization operations while other embodiments remove the extraneous material via etching operations. Other embodiments are directed to the electrochemical fabrication of multilayer mesoscale or microscale structures which are formed using at least one conductive structural material, at least one conductive sacrificial material, and at least one dielectric material. In some embodiments the dielectric material is a UV-curable photopolymer.

Claims

1. A process for forming a multilayer three-dimensional structure on a dielectric substrate, comprising:

(a) forming and adhering a first layer of material to a dielectric substrate or to a substrate containing at least one region of dielectric material;

(b) forming and adhering at least one layer to a previously formed layer to build up a three-dimensional structure from a plurality of adhered layers;

wherein the formation of the first layer of material comprises;

(i) depositing a first seed layer material onto the substrate including at least some portions of the substrate that are not to receive a selected one of a structural material and sacrificial material;

(ii) depositing a selected one of structural material and sacrificial material onto the first seed layer material over those portions of the substrate that are to receive the selected one of structural material and sacrificial material, wherein the portions that are to receive the selected one are less than all portions of the substrate;

(iii) removing portions of the first seed layer material that are not located between the selected one and the substrate or located adjacent to the selected one;

(iv) after removing portions of the first seed layer depositing a second seed layer material onto those portions of the substrate that are to receive a non-selected one of the structural material and sacrificial material;

(v) depositing the non-selected one of the structural material and sacrificial material onto the second seed layer material over those portions of the substrate that are to receive the non-selected one of structural material and sacrificial material;

(vi) planarizing the deposited selected one of the structural material and sacrificial material and the deposited non-selected one of the structural material and sacrificial material to a height corresponding to a desired thickness of the first layer.

2. The process of claim 1 additionally comprising the deposition of a first adhesion layer material onto at least those areas of the substrate that are to receive the selected one of the structural material and sacrificial material.

3. The process of claim 2 additionally comprising removing any first adhesion layer material, after removing the portions of the first seed layer material that are not covered by the selected one of the structural material and sacrificial material such that remaining portions of the first adhesion layer material are located only between the first seed layer material and the substrate.

4. The process of claim 1 additionally comprising the deposition of a second adhesion layer material, after removing the first seed layer material onto at least those areas of the substrate to receive the non-selected one of the structural material and sacrificial material.

5. The process of claim 4 additionally comprising removing any second adhesion layer material that is not covered by the non-selected one of the structural material and sacrificial material such that remaining portions of the second adhesion layer material are located only between the second seed layer material and the substrate.

6. The process of claim 4 additionally comprising the deposition of a first adhesion layer material onto at least those areas of the substrate to receive the selected one of the structural material and sacrificial material.

7. The process of claim 6 wherein the first adhesion layer material is substantially the same as the second adhesion layer material.

8. The process of claim 6 wherein the first adhesion layer material is different from the second adhesion layer material.

9. The process of claim 2 wherein the deposition of the first seed layer material locates the material on the first seed layer material on the substrate in regions extending beyond the regions to be occupied by the selected one of the structural material and sacrificial material.

11. The process of claim 3 wherein the deposition of the second seed layer material results in the second seed layer material overlaying regions occupied by the selected one of the structural material and sacrificial material.

12. The process of claim 3 wherein the deposition of the second seed layer material results in the second seed layer material being only located to those regions where the second material is to be located.

10. A process for forming a multilayer three-dimensional structure on a dielectric substrate, comprising:

(a) forming and adhering a first layer of material to a dielectric substrate or to a substrate containing at least one region of dielectric material;

(b) forming and adhering at least one layer to a previously formed layer to build up a three-dimensional structure from a plurality of adhered layers;

wherein the formation of the first layer of material comprises;

(i) depositing a first seed layer material onto the substrate, wherein the deposition of the first seed layer material locates the first seed layer material on the substrate to only those regions to be occupied by a selected one of the structural material and sacrificial material and the deposition of the first seed layer material results in the first seed layer material overlaying a masking material that is located in regions where the selected one of the structural material and sacrificial material is not to be located;

(ii) depositing a selected one of structural material and sacrificial material onto the first seed layer material over those portions of the substrate that are to receive the selected one of structural material and sacrificial material, wherein the portions that are to receive the selected one are less than all portions of the substrate;

(iii) removing the masking material and removing portions of the first seed layer material that are not located between the selected one and the substrate;

(iv) depositing a second seed layer material onto those portions of the substrate that are to receive a non-selected one of the structural material and sacrificial material;

(v) depositing the non-selected one of the structural material and sacrificial material onto the second seed layer material over those portions of the substrate that are to receive the non-selected one of structural material and sacrificial material;

(vi) planarizing the deposited selected one of the structural material and sacrificial material and the deposited non-selected one of the structural material and sacrificial material to a height corresponding to a desired thickness of the first layer.

13. A process for forming and adhering a layer of material to a dielectric substrate or to a substrate having at least one region of dielectric material, comprising:

(a) depositing a first seed layer material onto the substrate;

(b) depositing the selected one of structural material and sacrificial material onto the first seed layer material over those portions of the substrate that are to receive the selected one of structural material and sacrificial material, wherein the portions that are to receive the selected one are less than all portions of the substrate;

(c) removing portions of the first seed layer material that are not located between the selected one and the substrate or located adjacent to the selected one;

(d) depositing a second seed layer material onto those portions of the substrate that are to receive a non-selected one of the structural material and sacrificial material;

(e) depositing a the non-selected one of the structural material and sacrificial material onto the second seed layer material over those portions of the substrate that are to receive the non-selected one of structural material and sacrificial material;

(f) planarizing the deposited selected one of the structural material and sacrificial material and the non-selected one of the structural material and sacrificial material to a height corresponding to a desired thickness of the first layer.