Electro-acoustic resonator with a top electrode layer thinner than a bottom electrode layer

  • US 7,522,018 B2
  • Filed: 12/04/2003
  • Issued: 04/21/2009
  • Est. Priority Date: 12/13/2002
  • Status: Active Grant
First Claim
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1. Electro-acoustic resonator (1, 8, 17) comprising a membrane structure FBAR (1) with a layer structure comprising a piezoelectric layer (5, 14, 24) and a top (6, 15, 25) and a bottom (4, 13, 23) electrode layer, with the thickness (T1, T2, . . . T6) of the two electrode layers being unequal, characterised in that the top electrode layer (T1, T3, T5) is thinner than the bottom (T2, T4, T6) electrode layer to increase a filter bandwidth of the electro-acoustic resonator.

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