Semiconductor on insulator structure
First Claim
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1. A semiconductor on insulator structure comprising:
- an insulating substrate, the insulating substrate being a silicon oxycarbide substrate; and
a semiconductor layer bonded to the insulating substrate, the insulating substrate being a different material than the semiconductor layer, wherein the insulating substrate has a coefficient of thermal expansion that is approximately equal to a coefficient of thermal expansion for the semiconductor layer, the semiconductor layer bonded to the insulating substrate being in a wafer configuration such that the semiconductor layer is arranged to provide a layer in which to form an integrated circuit.
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Abstract
An apparatus and a method for forming the apparatus include a semiconductor layer on an insulating substrate, where the substrate is a different material than the semiconductor layer, and has a coefficient of thermal expansion substantially equal to that of the semiconductor layer. The semiconductor layer can also be formed having a thickness such that it does not yield due to temperature-induced strain at device processing temperatures. A silicon layer bonded to a silicon oxycarbide glass substrate provides a silicon on insulator wafer in which circuitry for electronic devices is fabricated.
259 Citations
40 Claims
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1. A semiconductor on insulator structure comprising:
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an insulating substrate, the insulating substrate being a silicon oxycarbide substrate; and a semiconductor layer bonded to the insulating substrate, the insulating substrate being a different material than the semiconductor layer, wherein the insulating substrate has a coefficient of thermal expansion that is approximately equal to a coefficient of thermal expansion for the semiconductor layer, the semiconductor layer bonded to the insulating substrate being in a wafer configuration such that the semiconductor layer is arranged to provide a layer in which to form an integrated circuit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An electronic device comprising:
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an insulating substrate, the insulating substrate being a silicon oxycarbide substrate; a semiconductor layer bonded to the insulating substrate, the insulating substrate being a different material than the semiconductor layer, wherein the insulating substrate has a coefficient of thermal expansion that is approximately equal to a coefficient of thermal expansion for the semiconductor layer; and circuitry in the semiconductor layer. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. An electronic device comprising:
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a silicon oxycarbide substrate; a silicon layer bonded to the silicon oxycarbide substrate, wherein the silicon oxycarbide substrate has a coefficient of thermal expansion that is approximately equal to a coefficient of thermal expansion for the silicon layer; and circuitry in the silicon layer. - View Dependent Claims (21, 22, 23, 24, 25)
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26. An electronic system comprising:
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a controller; a bus; and an electronic device coupled to the processor by the bus, the electronic device including; an insulating substrate, the insulating substrate being a silicon oxycarbide substrate; a semiconductor layer bonded to the insulating substrate, the insulating substrate being a different material than the semiconductor layer, wherein the insulating substrate has a coefficient of thermal expansion that is approximately equal to a coefficient of thermal expansion for the semiconductor layer; and circuitry in the semiconductor layer. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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37. An electronic system comprising:
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a processor; a system bus; and a memory device coupled to the processor by the system bus, the memory device including; a silicon oxycarbide substrate; a silicon layer bonded to the silicon oxycarbide substrate, wherein the silicon oxycarbide substrate has a coefficient of thermal expansion that is approximately equal to a coefficient of thermal expansion for the silicon layer; and a circuit in the silicon layer. - View Dependent Claims (38, 39, 40)
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Specification