Pressure sensor including temperature adjustment

  • US 7,533,573 B2
  • Filed: 02/14/2008
  • Issued: 05/19/2009
  • Est. Priority Date: 10/18/2004
  • Status: Expired due to Fees
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First Claim
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1. A pressure sensor for sensing a fluid pressure, the pressure sensor comprising:

  • a first chamber including a first conductive membrane, wherein a fluid is sealed within the first chamber at a reference pressure such that the first conductive membrane deflects from pressure differences between the reference pressure and the fluid pressure;

    a second chamber including a second conductive membrane which is sealed from the fluid pressure, wherein the second membrane deflects in response to a change in temperature which the pressure sensor is exposed thereto; and

    a circuit in electrical communication with the first and second conductive membranes, wherein the circuit is configured to obtain a first signal and second signal from the first and second conductive membranes respectively, the first and second signals being indicative of the deflection of the first and second conductive membranes, wherein the circuit adjusts the first signal by the second signal to generate an output signal indicative of the fluid pressure.

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